EXxx-OMN0035CN

) ST(I) (07 ) ST(O) ON/OFF (07 ) ST(I) ON/OFF (07 ) ST(O) (07 ) (SI ) -52No.EX-OMN0035CN-A OFF (LED 0707) ON (LED 07) ()07 ON (LED 07) ()07 (SI ) -53No.EX-OMN0035CN-A EX600-DMPE EX600-DMNE EX600-DMPF EX600-DMNF PNP NPN PNP NPN D-sub(25 ) No.4-40 UNC (32 ) 8 () DC24 V Class22 A 2 A/ 0.5 A/ 2 A/ 4.7 k 5 mA ON /ON 17 V /3 mA (NPN 24 V ) (PNP 0 V ) OFF /OFF 5 V /1 mA (NPN

High Purity Fluoropolymer

Description Replacement parts Tubing outside diameter Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 4 04 04 04 04 6 06 06 06 8 08 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type

•

4D 4P Ii) I I NBR NLP-40 Piston packing NLP-SO NLP-63 I: NBR CM-040-16-127 Tube gasket CM-OSO-16-1 28 CM-063-16-129 I Plastic C1AOSO-07-306 C1A040-07-30S Wear ring C1A063-07-307 NBR Cushi9n packing A MC-2S $ I MC-25 NBR . Cushlb!')'p8cking B MC-20 MC-20 "qr .,. Gasket tor GusHi<:>n va 've. NBR CK40-1697 !

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

Refer to front matters 42 and 43 for Safety Instructions, and pages 507 to 509 for High Purity Chemical Air Operated Valve/Compact Type Precautions.

IP8101 Series

Hold down again for 1sec. or longer after interval No.DIG-31900-OM002 53 Mode button 1s Set button 1s or Mode button 1s Set button 1s or Mode button 1s Mode button 1s Set button Set button 1s 1s Fig. 42 Mode button 1s Set button 1s or Lower limiter Upper limiter Fig. 42-1 Mode button 1s Set button 1s Alarm setting Fig. 42-2 No.DIG-31900-OM002 54 Possible to select analog output

SY

SS5Y5 20 Top ported (type 20) SS5Y5 Side ported (type 41, 42) Base type Stations A/B port size 01 Rc 1/8 Type 41 02 2 stations 41 Type 41 02 Rc 1/4 Type 42 42 Type 42 ... ... 20 20 stations C6 6 One-touch fitting Type 41, 42 C8 8 One-touch fitting Type 41, 42 2 Valve Type Note) SY320-is for type 20 manifolds. SY340is for type 41 and 42 manifolds. SY340Ris for type 42 manifolds.

SYJ300/500/700

-D-01 M8 connector (WO): SYJ54-WO-01 VZ VS VFN Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 82.4 74.9 MAX. 10 74.6 49.6 [56.6] 63.6 34.2 48.5 54.1 M8 x 1 36.6 Approx. 300 (Lead wire length) 60.7 [67.7] Pg7 6 6 6 6 65.5 [67.7] 55.7 [57.9] 75.5 64.6 57.2 50.7 42 42 42 42 34.7 17 9 17 9 17 9 17 9 8.5 8.5 8.5 8.5 21 21 21 21 44.5 44.5 44.5 44.5 Refe page 4-4-61 for dimensions

KJ

(mm) Connection threads R Model M Effective area (mm 2) Weight (g) A L1 L2 VMG 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 DY04-01 15 6.9 32 DY04-02 17 19 2-applicable tubing 4 36.5 10 23.5 10 40 DY06-01 36 17 10 36.5 23.5 DY06-02 16 6 19 42 14 16 12 DY06-03 22 66 26.5 42.2 38.5 39.5 42.2 43.5 42.2 47.3 47.5 47.2 47.3 119 Reference dimensions after R thread installation.

SYJ300/500/700

VQ VKF VQZ L plug connector (L): SYJ54-L-01 M plug connector (M): SYJ54-M-01 DIN terminal (D): SYJ54-D-01 M8 connector (WO): SYJ54-WO-01 VZ VS VFN Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 82.4 74.9 MAX. 10 74.6 49.6 [56.6] 63.6 34.2 48.5 54.1 M8 x 1 36.6 Approx. 300 (Lead wire length) 60.7 [67.7] Pg7 6 6 6 6 65.5 [67.7] 55.7 [57.9] 75.5 64.6 57.2 50.7 42 42 42 42 34.7

4/5 Port Air Operated Valve Series SYJA3000

Station 2 52 43 Station 20 340 331 Station n L1 L2 3 68 59 4 84 75 5 100 91 6 116 107 7 132 123 8 148 139 9 164 155 10 180 171 11 196 187 12 212 203 13 228 219 14 244 235 15 260 251 16 276 267 17 292 283 18 308 299 19 324 315 1-5-44 5 Port Solenoid Valve Rubber Seal Series SYJ5000 C6 N7 Type 42: Side Ported/SS5YJ5-42Stations -01, [ ]: AC C6 N7 Grommet (G) For 01 For (Built-in One-touch

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

Type 42/Common external pilot type Q 42 SS5Y 05 5 C8 Add the valve and option part numbers in order starting from the first station as shown above.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

-01 Type 10-SS3YJ7-42-C6 1/4 Type 10-SS3YJ7-42-C8 Note) The values are for individually operated 2 position type manifold bases.

Table of Contents

-06-X214 AS2301F-01-06-X214 2.

VM

VM120-01-07 VM120-01-07S VM130-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Cross roller plunger Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM-30AR Red Push button (Mushroom) VM-30AB

Compact and Lightweight

ZH05DA06 06 06 One-touch One-touch One-touch 06 01 06 One-touch Screw-in One-touch 01 01 01 Screw-in Screw-in Screw-in ZH05DA07 07 07 One-touch One-touch One-touch 07 N01 07 One-touch Screw-in One-touch N01 N01 N01 Screw-in Screw-in Screw-in ZH07DA06 06 06 One-touch One-touch One-touch 06 01 06 One-touch Screw-in One-touch 01 01 01 Screw-in Screw-in Screw-in ZH07DA07 07

3 Port Air Operated Valve Series SYJA300

-01 SYJ74 1/4 1/4 Type SS3YJ7-42-C6 Type SS3YJ7-42-C8 1/4 Body ported for external pilot SYJ72R 1/4 1/8 2.2 0.34 0.55 2.4 0.32 0.62 Type SS3YJ7-21R Type SS3YJ7-41R 2.2 2.0 1.6 2.1 0.35 0.27 0.32 0.24 0.59 0.47 0.39 0.51 2.4 2.2 2.2 2.3 0.36 0.32 0.27 0.31 0.66 0.56 0.54 0.59 1/8 1/8 C6 1/4 1/4 1/4 C8 1/4 Base mounted for external pilot Type SS3YJ7-42R-01 SYJ74R Type SS3YJ7-42R-C6 Type SS3YJ7

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(For manifold type 20, 21R) VP 1 SYJ7 2 5 M 01 Body ported VG VP SYJ7 4 5 M 01 1 Base mounted VQ 3 port Port size Body option Manual override VQZ : Individual exhaust for the pilot valve : Non-locking push style : Without sub-plate VZ 01: With Rc (PT)1/8 port sub-plate VS For sub-plate style, manifold type 41R, 42, 42R R Port P/E Port (With gasket and screws) M: Common exhaust for the pilot

VQZ1000/2000/3000

M plug connector (M): VQZ1 50 1(R)-M-01 (Lead wire length) 54 <59> 300 Cross section 0.23 mm2 Cover diameter 1.5 Indicator light 119 300 131 55 (Lead wire length) 61 Indicator light 47.5 <52.5> R1 R2 R1 R2 P P Cover diameter 1.5 Cross section 0.23 mm2 < >: AC < >: AC 2-7-41 Base Mounted 42 42 Series VQZ1000/2000/3000 Dimensions: VQZ2000 2 position single Grommet (G): VQZ2150 1(R)-G-01

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

AK AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 VCHC Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa ASR ASQ 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321FG AS331FG AS421FG

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

ASS AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 ASR ASQ Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321FG AS331FG AS421FG AS431FG