SMC Corporation of America
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C 1 B A Basic (mm) (mm) T 9 10.5 MKB20-Z MKB25-Z Model Yh9 18 23 A B C E F G 36 40 47 52 36 40 35.5 40.5 18 21 17.9 22.5 S 28 27.5 Clamp stroke Model Rod state 0 0.043 0 0.052 20 mm Q R 112.5 142 113.5 143 30 mm Q R 132.5 172 133.5 173 10 mm Q R 92.5 112 93.5 113 Retracted Extended Retracted Extended MKB20-Z 72 82 92 MKB25-Z 73 83 93 Note) The above figure is with the auto switch (D-M9) mounted

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) RS Q G RS H A Series MK RZQ MI W S CEP1 CE1 Maximum operating pressure: 1 MPa CE2 ML2B C J G5-S Ideal for machine designs with small space requirements Series MK2 CV Suited for electronic parts inspection clamps.

Linearity (77F) 0.15% F .S. Repeatability (77F) 0.6% F .S. 0.5% F .S.

q q e IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Parts list Material No.

Q P L Model F Note) For 25 stroke, the shock absorber is mounted on a plate.

VXS VXS VXB VXE (3) Formula for flow rate When P2 + 0.1 0.5, choked flow P1 + 0.1 293 Q = 120 x S (P1 + 0.1) (3) 273 + T When P2 + 0.1 > 0.5, subsonic flow P1 + 0.1 293 Q = 240 x S (P2 + 0.1) (P1 P2) (4) 273 + T Conversion with sonic conductance C: VXP VXR VXH VXF VX3 VXA S = 5.0 x C(5) Q : Air flow rate[L/min(ANR)] S : Effective area [mm2] P1 : Upstream pressure [MPa] P2 : Downstream

+ 0.1 > 0.5, subsonic flow P1 + 0.1 293 Q = 240 x S (P2 + 0.1) (P1 P2) (4) 273 + t Conversion with sonic conductance C: S = 5.0 x C(5) Q :Air flow rate[dm3/min(ANR)], dm3 (cubic decimeter) of SI unit is good to be described by l (liter), too. 1 dm3 = 1 l S : Effective area [mm2] P1 : Upstream pressure [MPa] P2 : Downstream pressure [MPa] t : Temperature [C] Note) Formula for subsonic flow

RHC Basic style, Axial foot style, Rod side flange style, Head side flange style Mounting MK(2) RS Q G RS H A RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-6-9 9 Series RHC Construction: 20 to 40 u q !

Temperature distribution of the 120C specification Comparison with a KF25 flange 140 e, r, t 120 eBody 1 Temperature [C] 100 rBody 2 tBody 3 80 q, w 60 40 Heater wBellows 20 qValve 0 0 30 60 90 Time [Minute] Lightweight, Compact Large conductance, small body, excellent resistance against fluorine corrosion (body) XLA series Model A1 [mm] B [mm] Weight [kg] Conductance1 [L/s] XLA-16-2 40 108

Grease pack part number: GR-S-010 (10 g), GR-S-020 (20 g) 414 Air Cylinder: Non-rotating Rod Type Double Acting, Double Rod MBKW Series Standard Basic: (B) Cushion valve Port W V G 2 x Rc P G Width across flats KB Q E CJ1 CJP E D MM MM E KA B C CJ2 Section Q-Q Q JCM Width across flats B1 H1 A AL F H N MA MB Width across flats B1 ZZ + 2 x Stroke S + Stroke N F H + Stroke A AL H1 CM2 2 x 4

How to Order CG1 L 25 100 F Q CDG1 L 25 100 F Q With auto switch M9BW C (Built-in magnet) With auto switch Mounting Number of auto switches B Basic L Axial foot F Rod flange G Head flange U* Rod trunnion T* Head trunnion D Clevis Nil 2 pcs. S 1 pc. n n pcs. Auto switch Nil Without auto switch * Not available for 80 and 100.

Green Gray Tan S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S Color Indication Color S S S Color Black Red Green Blue White Yellow Orange Natural Silver Purple Brown Dk.

NPT, G) ,'" r .r "'" ',.. 1-::' : H I-::' r-Q Q , .J w =i" ~ I ~ ~ K F H -NJ ..!L M Stroke S + Stroke ZZ + Stroke (mmJ oS~((lr.;~ r;ilMg9 ' .:a6ra'~~ FT FZ 'AL QIl B E F FD FX FY G J 11 Ii. DC 0 " : '(mm~ .

Maximum piston speed: 500 mm/s It can be used at 50 to 500 mm/s provided that it is within the allowable kinetic energy range.

port in axial location (R) BB H BA S + Stroke 0 0.3 0 0.3 CY Z + Stroke MQQ M RHC Bore size (mm) A BA BB CA CB D F GA GB H MM NN NA NB NDn8 S Z MK(2) 0 0.022 0 0.027 10 15 15 12 17 14 4 8 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 10 46 74 RS Q G 16 15 18.3 18.3 20 20 5 8 8 5 28 M5 x 0.8 M12 x 1.0 12.5 9.5 12 47 75 RS H A R V Axial foot style (L): CJ5LS RZQ CA MI W S Rod cover side GB F NN MM GA

RS Q G RS H A Relation of Liquid Entry and Sliding Distance Amount of liquid entry (g) x 15 RZQ 10 Standard cylinder MI W S Stainless steel cylinder 5 CEP1 0 50 100 150 200 Sliding distance (km) 250 300 CE1 Conditions Working fluid Air Pressure 0.5 MPa Liquid Water-soluble coolant Piston speed 200 mm/sec (60 cpm) CE2 ML2B Special scraper C J G5-S Exterior configuration reduces residual

DeviceNet EX140-SDN1 OMRON Corp.: CompoBus/S (16 outputs) EX140-SCS1 OMRON Corp.: CompoBus/S (8 outputs) EX140-SCS2 CC-Link EX140-SMJ1 How to Order Valve Manifold Assembly Ordering example (CompoBus/S compatible SI unit) Double solenoid (24 VDC) 10-SZ3260-5LOZ-C6(-Q) (3 sets) 10-SS5Z3-60SR1D-05U (-Q) 1 set (Manifold part no.)

Q Q Q Q Q Q Q Q Q Q Q Q Q Q MXH Series 6, 10, 16, 20 The use of a recirculating linear guide produces a slide table with excellent rigidity, linearity and non-rotating accuracy.

S) C 2-Q Breathing port: R H G SMC SMC SMC SMC N V 1/4 1/4 1/4 U 3/8 E Pitch = B Dimensions (mm) Station n-A port 2 3 4 5 Model Symbol L1 L2 L3 L1 L2 L3 L1 L2 L3 L1 L2 L3 62 93 124 155 LLC2A 75 106 137 168 146 177 208 239 73 109.5 146 182.5 LLC3A 84 120.5 157 193.5 183 219.5 256 292.5 (mm) Dimensions 94 141 188 235 A B Q C D E G H K N R S U V W Y LLC4A Model LLC2A LLC3A LLC4A LLC5A 109 156

q e r q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.