HEC_W-E

Approx.1200W(water), 800W(Fluorinert FC-77) Cooling capacity Conditions: set temp. 25C, ambient temp. 25C, radiating water temp. 20C, radiating water flow rate 10 L/min Approx.2200W(water), 1500W(Fluorinert FC-77) Heating capacity Conditions: set temp. 25C, ambient temp. 25C, radiating water temp. 20C, radiating water flow rate 10 L/min Recirculating fluid : Water, Fluorine solvent(GALDEN

MHK2

MHK2-12S 120 12 9 4 9 13 76 Normally open Normally closed MHK2-16S 16 23 6 14.6 20.6 114 DL1 MHK2-20S 20 34 10 16 26 237 L2 MHK2-25S 25 58 14 19 33 443 20MHK2-12C 12 12 4 9 13 76 MHK2-16C 16 25 6 14.6 20.6 115 MHK2-20C 20 44 10 16 26 237 MHK2-25C 25 73 14 19 33 443 Series MHKL2/Long Stroke Type Note) Width at opening (mm) L2 Width at closing (mm) L1 Effective gripping force per finger (N)

Clean Gas Filter

Material Case Note 1 Stainless steel 316 Electrolytic polishing (Interior/Exterior) V-clamp 2 Stainless steel 304 Holder 1 3 Polyester Holder 2 4 Filter medium 5 Element PTFE Seal 6 FKM V-seal 7 300 SFA100/200/300 Series Clean Gas Filter: Cartridge Type/Disc Type Flow Rate Characteristics Fluid: Compressed air Inlet temperature: 20C Dimensions SFA100/101, SFA200/201, SFA300/301 SFA10 Inlet

CG5-S

) Max. operating pressure (at 20C) 0.8MPa 1.5MPa Refer to series TU burst pressure characteristics curve.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

size 3.2, 4, 6 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Tubing O.D. 1/8", 5/32" 1/8" 3/16", 1/4" 1/4", 5/16" 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 3/16", 1/4" Controlled flow (Free flow) Flow rate (l/min (ANR)) 100 180 230 260 390 660 790 1580 1710 460 920 Effective area (mm 2) 1.5 2.7 3.5 4 6 7 10 12 14 24 26 Note) Flow rate values are measured at 0.5 MPa and 20C

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AK ASS ASR ASF Flow Rate and Effective Area JIS Symbol ASD230FM ASD330FM ASD430FM Model 6, 8 8, 10 6 Metric size 4, 6 Tubing O.D. 1/8", 5/32" 3/16", 1/4" 1/4", 5/16" 3/8" 3/16", 1/4" Inch size Flow rate (l/min(ANR)) Controlled flow (Free flow) 7 12 38 0.1 0.6 0.2 Effective area (mm 2) Note) Flow rate values are measured at 0.5 MPa and 20C.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

8, 10 3.2, 4 4 6 6 8 10, 12 10 12 Tubing O.D. 1/8", 5/32" 3/16", 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/8" 5/32" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 3/8" 1/2" Flow rate (l/min (ANR)) 100 230 180 260 390 460 660 790 920 1580 1710 Controlled flow (Free flow) 1.5 3.5 2.7 4 6 7 10 12 14 24 26 Effective area (mm2) Note) Flow rate values are at a pressure of 0.5 MPa and a temperature of 20C

MHK2

MHK2-12S 120 12 9 4 9 13 76 Normally open Normally closed MHK2-16S 16 23 6 14.6 20.6 114 DL1 MHK2-20S 20 34 10 16 26 237 L2 MHK2-25S 25 58 14 19 33 443 20MHK2-12C 12 12 4 9 13 76 MHK2-16C 16 25 6 14.6 20.6 115 MHK2-20C 20 44 10 16 26 237 MHK2-25C 25 73 14 19 33 443 Series MHKL2/Long Stroke Type Note) Width at opening (mm) L2 Width at closing (mm) L1 Effective gripping force per finger (N)

AS-FG/ASD-FG

Speed controller Cylinder Solenoid valve Tube Silencer Maximum return speed mm/s 100 200 300 6 ASD230FG CJ2 VJ500 TU0604 1m AN11001 10 16 Cylinder size 20 ASD330FG CM2 VZ500 TU0604 1m AN11001 25 Cylinder size 32 Values for pressure of 0.5MPa and temperature of 20C.

TA

Note2) The value at temperature of 20C and O.D. variable rate 10% max.

Wedge Cam Operation Provides

53 External hold: 79 Internal hold: 90 MHKL2-16D 16 14 14.6 28.6 164 Double acting MRHQ MHKL2-20D 20 18 16 34 312 Auto switch MHKL2-25D 25 22 19 41 562 MHKL2-12S 90 105 20 9 11 12 9 Normally open Normally closed MHKL2-16S 165 28.6 14.6 14 16 17 MHKL2-20S 314 34 16 18 20 32 MHKL2-25S 565 41 19 22 25 53 L1 Single acting MHKL2-12C 105 20 9 11 12 11 L2 MHKL2-16C 166 28.6 14.6 14 16 22 MHKL2-20C

Microspeed Cylinder

16" 3/8" 3/16", 1/4" l/min (ANR) (CFM) 7 (0.25) 12 (0.42) 38 (1.33) Flow rate Controlled flow 0.1 (0.006) 0.6 (0.03) 0.2 (0.01) Effective area mm (cv) Free flow l/min (ANR) (CFM) Flow rate 175 (6.1) 350 (12.3) 75 (2.6) 295 (10.3) 5.3 (5.3) 2.7 (0.15) 1.1 (0.06) Effective area mm (cv) 4.5 (0.25) Note 1) Flow rates are the values measured with pressure at 0.5MPa (72psi) and temperature at 20C

Wedge Cam Operation Gripper Series MHK2

46) I.D.holding :12.6 (56) MHK2-20D 20 10 16 26 8.3 O.D. holding:18.0 (80) I.D. holding :19.3 (86) MHK2-25D 25 14 19 33 15.5 MHK2-12S 120 12 2.0 (9) 4 9 13 2.7 Normally open Normally closed MHK2-16S 16 5.2 (23) 6 14.6 20.6 4.0 MHK2-20S 20 7.6 (34) 10 16 26 8.4 L1 MHK2-25S 25 13.0 (58) 14 19 33 15.6 Single acting L2 MHK2-12C 12 2.7 (12) 4 9 13 2.7 MHK2-16C 16 5.6 (25) 6 14.6 20.6 4.1 MHK2-20C

Series AS-FM/AS-M/ASD-FM

3/16" 1/4" 3/16", 1/4" 5/16" Tube O.D. 1/4", 5/16" 3/8" 1/8", 5/32" 5/32" 3/16" Inch size 12 7 38 Flow rate l/min (ANR) Controlled flow 0.2 0.1 0.6 Effective area mm Flow direction symbols on body 230 180 100 460 260 390 Flow rate l/min (ANR) Meter-out type Meter-in type Free flow 3.5 2.7 1.5 7 4 6 Effective area mm Note) The flow rate value is at a pressure of 0.5MPa and temperature of 20C

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Inch sizes 1/4", 5/16" 3/16" 5/32" 3/16", 1/4" 1/8", 5/32", 3/16", 1/4" l/min (ANR) {Nl/min} Flow rate 12 38 7 Controlled flow Effective area mm 0.2 0.6 0.1 l/min (ANR) {Nl/min} Flow rate 460 100 290 130 230 Free flow Effective area mm 7 1.5 4.5 2 3.5 Note) Flow rates are values measured with pressure at 0.5MPa and temperature at 20C.

Refrigerated Air dryer Series IDU/IDF

Note) l/min (ANR) is for reference conditions of 20C, 1 ATM and 65% relative humidity. Features 3 Model Selection Data A Correction factor for temperature/Series IDU Inlet air temp.

High Vacuum Angle Valve, XL Series

Flow classification 11 The relation of the average free path of gas molecules and the pipe diameter D expressed as /D is the Knudsen number, and the relation of the pressure p(Torr) converted to air at 20C is expressed as pD.

Title not found

Color Metric sizes (mm) Inch sizes (inch) 1 8 " 3 16 " 1 4 " 3 8 " 1 2 ( ) 5 32 4 ( ) 5 16 8 6 10 12 16 " (3.2) One-touch In/Out connection With quick disconnect and air lock Black General tubing 1.5MPa max. at 20C Nylon Tubing Series T White Red Blue Yellow Green Black White Slightly flexible 1.0MPa max. at 20C Red Blue Yellow Green Soft Nylon Tubing Series TS Black White Flexible 0.8MPa

SZ3000

Response Time Note) Based on JISB8375-1981 dynamic performance test (with coil temperature of 20C and at rated voltage).

Series VQ Base Mounted Metal Seal/Rubber Seal

Characteristic Cable length (L) Multicore vinyl cable 0.3mm2 X 25C Conductor resistance /km, 20C Voltage limit V, 1min, AC 65 or less 1.5m 3m 5m AXT100-DS25-015 Cable 25 core X 24AWG AXT100-DS25-030 10 1000 AXT100-DS25-050 Insulation resistance M/km, 20C 5 or more For other commercial connectors, use a 25-pin female connector made in conformity with MIL-C-24308.