0.4

) P kit Flat ribbon cable connector (26P) J/G kit T kit Terminal block (VQ1000, 24 terminals) T kit Terminal block (VQ2000) M kit Stations L kit (VQ1000/2000): 3.

SQ1000/2000

plate assembly u F kit L kit T kit S kit P (J) kit q !

REA/REB

Bore size (mm) Model Elbow type Straight type In-line type 10 15 20 25 32 40 50 63 AS1201F-M5-04-X214 AS1301F-M5-04-X214 AS1001F-04-X214 AS1201F-M5-04-X214 AS1301F-M5-04-X214 AS1001F-04-X214 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214

ZP

Weight (g) Pad form Flat/Flat with ribs Female thread Female thread Female thread One-touch fitting One-touch fitting One-touch fitting Barb fitting Barb fitting Barb fitting Deep Bellows Stroke (mm) Vacuum entry port Model NU NU NU B5 B01 04 06 08 B5 B01 04 06 08 B3 B5 B01 04 06 08 B3 ZPT2004 3507 4010 ZPT thin section series 10 to 16 02 to 08 6 22 24 26 27 22 22 24 26 27 22 10 to 16 10

HRX-OM-M090

Allowable voltage range 10% Circuit protector17 A 10 (For option -T-MT : 15 Electric system Applicable earth leakage breaker capacity9 A 10 (For option -T-MT : 15 (50/60Hz) A 4.6/5.1 4.7/5.2 5.1/5.9 Rated operating current4 For option -T-MT : 5.6/6.7 For option -T-MT : 5.7/6.8 For option -T-MT : 6.1/7.5 consumption4 (50/60Hz) kVA 0.9/1.0 0.9/1.0 1.0/1.2 Rated power For option -T-MT : 1.1/

Sine Rodless Cylinder Series REA/REB

AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 2. Speed adjustment is possible with meter-in/meter-out type speed controllers, but it may not be possible to obtain the cushion effect (smooth start-up, soft stop). 3.

Suction Guard (Produced upon receipt of order) FHG Series

(06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 1/2 3/4 1 1 1/4 1 1/2 2 1/2 3/4 1 1 1/4 1 1/2 2 78 78 83 106 106 111 3.6 3.6 3.6 6.4 6.4 6.5 71 71 71 104 104 104 53 53 53 74 74 74 3.7 3.7 3.7 7.4 7.4 7.5 Weight values are for the minimum T dimension (symbol 1) in each standard T dimension.

VEX1

Construction Component Parts Description No. q w e r t y u i o !0 !1 !

KB

Rc(PT)1 4 KBZ1-04 KBZ1-06 4 6 KBZ2-08 8 KBZ3-10 10 KBZ3-12 12 KBZ4-12 Rc(PT)3 8 16 Bulkhead female connector: KBE Female connector union: KBH T Connecting thread Tube O.D. Part No. Part No.

13

06-06 ZH07BL-06-06 ZH10BS-06-06 ZH10BL-06-06 ZH13BS-08-10 ZH13BL-08-10 (Mounting hole) Applicable tubing diameter M I J K L M N O P Model ZH05BS-06-06 ZH05BL-06-06 ZH07BS-06-06 ZH07BL-06-06 ZH10BS-06-06 ZH10BL-06-06 ZH13BS-08-10 ZH13BL-08-10 5.8 2 31 57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 60 12.8 3.2 26 5.8 2 32 60 12.8 3.2 26 5.8 2 32 75 15.3 4.2 28 7.5 3

SYJ3000/5000/7000

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% Conditions Series CJ2 Series CM2 6 x 1 m AS3301F-06 12 x 1 m AS4001F-12 AN200-02 AS2301F-06 AN110-01 Series MB/CA2 Series CJ2 Series CM2 Series MB/CA2 Body ported Tubing bore x Length Speed controller Silencer Base mounted Tubing bore x Length Speed controller Silencer AN200-02 AN3301F-06 AS1301F-06 6 x 1 m AS3001F-06 SYJ7120-01

High Purity Chemical Valve

Symbol A R P 4 Metric sizes 03 04 06 3 4 6 Valve type N.C. 0 N.C.

LVQ

Symbol Breathing port thread type Metric sizes Threaded Threaded NPT 1/8 Rc 1/8 Nil 06 10 12 19 25 6 10 12 19 25 R Inch sizes 07 11 13 19 25 1/4 3/8 1/2 3/4 1 Variations LVQH20-T LVQH30-T LVQH40-T LVQH50-T LVQH60-T Model Connection fitting size Orifice diameter 4 8 10 16 22 Millimeter 6 10 12 19 25 Inch Type 1 Symbol 1/4 3/8 1/2 3/4 90 Degree turn type B A Multi-turn type B A 578 Series LVQH-T

Valve Single Unit

T1) terminal block) -1A: +COM -1NA: COM SX3000-64-1A 1NA SX5000-64-1A 1NA t-1 SX3000-64-26 2A 2NA SX5000-64-26 2A 2NA t-2 Note) 24 VDC -2A: +COM. -2NA: COM. 2A 2NA SX3000-64-20 2A 2NA SX5000-64-20 t-3 2A 2NA SX3000-64-10 2A 2NA SX5000-64-10 t-4 t-5 SX5000-64-3A SX3000-64-3A In common between +COM and COM.

Valve Single Unit

T1) terminal block) -1A: +COM -1NA: COM SX3000-64-1A 1NA SX5000-64-1A 1NA t-1 SX3000-64-26 2A 2NA SX5000-64-26 2A 2NA t-2 Note) 24 VDC -2A: +COM. -2NA: COM. 2A 2NA SX3000-64-20 2A 2NA SX5000-64-20 t-3 2A 2NA SX3000-64-10 2A 2NA SX5000-64-10 t-4 t-5 SX5000-64-3A SX3000-64-3A In common between +COM and COM.

HRX-OM-W058

The weight will increase by 6kg when option T [High pressure pump] is selected. *12 In case option T [High pressure pump] selected. *13 In case option T [High pressure pump] selected, this fitting is not enclosed as accessory. *14 In case option J [Automatic fluid filling] selected.

HRX-OM-R016

Allowable voltage range 10% Electric system Circuit protector17 A 10 (For option -T-MT : 15 Applicable earth leakage breaker capacity9 A 10 (For option -T-MT : 15 (50/60Hz) A 5.2/6.0 Rated operating current4 For option -T-MT : 6.2/7.6 consumption4 (50/60Hz) kVA 1.0/1.2 Rated power For option -T-MT : 1.2/1.5 Noise level10 (50/60Hz) dB 62/65 Dimensions11 mm W377xD500xH660 (W14.8XD19.7xH26.0

Series AS-FM/AS-M/ASD-FM

T Inch sizes L4 L5 A1 A2 M1 Max.

AS-FG/ASD-FG

T Inch size L4 L5 A1 A2 M1 Max.

Modular Type Regulator Series AR

t q e OUT IN OUT IN e q r r w w AR50, 60 AR30, 40 t q t q e e IN OUT IN OUT r w w r Parts list Material Note No.