High Purity Fluoropolymer

3/4" x 5/8" Class 1 2 1 2 1 2 3 1 2 1 2 1 2 A A B C A B A B A B A B 15A 20A 25A Note 1) For each piping diameter for each body size, the second and later numbers or symbols indicate reducing.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

For details, please contact SMC. 3-11-17 18 Manifold Specifications Standard Specifications ISO Size 1 ISO Size 2 ISO Size 1 Maniflod block size VSR/S8-6 VSR/S8-8 VSR/S8-6 Applicable solenoid valve 1 to 10 Number of stations 1/4, 3/8, 1/2, 3/4, 1 A, B port Port size 1/4, 3/8, 1/2, 3/4, 1 P , EA, PB port VV82-P-03/04/06 VV81-P-02/03/04 Individual SUP spacer VV82-R-03/04/06 VV81-R-02/03/04

Series VQ Metal Seal/Rubber Seal Body Ported

lever style B C Note 1) See p.1.10-34for AC.

Brake mechanism added

cable O.D. 6.8 to 9.6) Hs Hs 49 Ht Ht 56 34 36 A B B 33 A D-A3C D-G39C/K39C D-G5/K59 D-G5W/K59W D-G5BA D-G59F/G5NT G 1/2 (Applicable cable O.D. 6.8 to 9.6) B A HW 49 Hs Hs 24.5 B A 33 36 D-F5/J59 D-F5NT D-F5W/J59W D-F5BA/F59F D-A44 G 1/2 (Applicable cable O.D. 6.8 to 11.5) Hs Hs 31.5 Ht Ht 56 A 36 B B 30 A D-A44C G 1/2 (Applicable cable O.D. 6.8 to 11.5) B A HW 49.5 Hs 36 692 Auto Switch

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M5 x 0.8 AS231FG-01 AS221FG-01 R 1/8 AS231FG-02 AS221FG-02 R 1/4 AS331FG-02 AS321FG-02 R 1/4 AS331FG-03 AS321FG-03 R 3/8 AS431FG-04 AS421FG-04 R 1/2 AS131FG-U10/32 AS121FG-U10/32 10-32 UNF AS231FG-N01 AS221FG-N01 NPT 1/8 AS231FG-N02 AS221FG-N02 NPT 1/4 AS331FG-N02

VFA3000

(1.9) 38 (2.1) 02 03 04 JIS Symbol 3 8 1 2 1 4 , , 2 position double 2 position single : 0.66 02 03 04: 0.71 VFA5444 -X1 3 position exhaustcenter 1 8 39 (2.2) 44 (2.4) 02 03 04 3 8 1 2 1 4 , , : 0.66 02 03 04: 0.71 VFA5544 -X1 3 position pressuretcenter 1 8 36 (2) 15.3 (0.85) 39.6 (2.2) 15.3 (0.85) 02 03 04 ( ) for normal position.

AS-FPQ/AS-FPG

Metric sizes Type 4 6 8 10 12 04 06 08 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 x 0.8 1/8 1/4 3/8 1/2 M5 01 02 03 04 With One-touch fitting Clean specification Metal part material Q G Brass (electoless nickel plated) Stainless steel (SUS304) Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06

VP300/500/700

Common exhaust: VV3P7-41Stations 1-04 (G) (E) (T) (D, Y) N.C.

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

Model *1 Port size A B D E300-03-A 3/8 31.8 30 30 E400-04-A 1/2 31.8 36 36 Port size B *1 in model numbers indicates a pipe thread type. No indication is necessary for Rc; however, indicate N for NPT, and F for G. * Separate spacers are required for modular units.

With Factory Installed

Example) 1NR 20 1/8 25 1/4 Port size 30 3/8 01 1/8 1/2 40 Accessory (optional) 1/4 02 03 3/8 Symbol Description Applicable model 04 1/2 B With bracket AR2001-AR4001 Optional Specifications Combination Table Optional specifications Applicable regulator model Optional specifications Symbol AR3001 1 N R AR 2001 AR2501 AR4001 O.02 ~ O.2MPa [O.2 ~ 2.0kgflcm 21 -1 Non relieving -N IN-OUT reversal

CE2

0.5 0.6 0.7 F 200 V Black COM (0 V) G Shield Data A phase output pulse Connector pin arrangement B phase output pulse G A F B H E D C 0 1 2 3 4 3 2 1 Counter value 10-12-55

VCA

AXT632-68-2 VCA23-VVCA20-3-1 VV2CA2Material Mounting screw Steel Manifold valve Note 1) Gasket HNBR Manifold base Al Note 1) Gasket is included with manifold valve . Series VCA30/40 Series VCA30 Series VCA40 Material Description Description No. Part no. AXT632-69-1 AXT632-69-2 VVCA30-3A-04-2 VVCA30-3A-04-1 OR-2200-200-H VCA35--VVCA30-6-n VVCA30-4A-04-2 VVCA30-4A-04-1 No. Part no.

VXZ

EPDM Brass or BC6, Copper H EPDM FKM NBR FKM EPDM FKM FKM EPDM NBR FKM H Stainless steel EPDM FKM NBR FKM EPDM FKM FKM EPDM NBR FKM Note 1) Note 1) B B Polyacetal Stainless steel, Silver Note 1) Stainless steel Silver Note 1) H Stainless steel H Note 1) Note 2) Note 1) Note 2) Brass or BC6, Copper B Note 1) Note 2) Note 1) Note 2) Polyacetal B H Brass or BC6, Copper Stainless steel Note 1

VCA

AXT632-69-1 AXT632-69-2 VVCA30-3A-04-2 VVCA30-3A-04-1 OR-2200-200-H VCA35--VVCA30-6-n VVCA30-4A-04-2 VVCA30-4A-04-1 Material Part no.

Table of Contents

Slide Bearing Felt Holder Ball bushing Spacer Aluminum alloy Replacement Parts: Seal Kit Bore size (mm) Contents Kit no. 20 25 32 40 50 MGP20-B-PS MGP25-B-PS MGP32-B-PS MGP40-B-PS MGP50-B-PS Set of nos. above @1, @2, @3, @4, #2, #3, $1, $2 Seal kit includes @1 to @4, #2, #3, $1, $2.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) X X X X X 1.2-72

Air Cylinder

8 @ B @ C Boss-cut Integrated clevis Spring extend t !2 u @1 y q !3 r !5 @0 !6 !0 i e o !4 !1 @ A !9 !8 @ B @ C !7 Boss-cut Integrated clevis Component Parts No.

CNA

B With rod boot on both sides S + Stroke H + Stroke H ZZ + 2 l + 2 strokes ZZ + 2 strokes Bore size (mm) Stroke range (mm) 40 50 63 80 100 AL B B1 BN BP BQ C D E F GA GB GC GD GL GL1 GR H1 J K KA A 30 35 35 40 40 Up to 500 Up to 600 Up to 600 Up to 750 Up to 750 27 32 32 37 37 60 70 86 102 116 22 27 27 32 41 96 108 115 139 160 1/8 1/4 1/4 1/4 1/4 1/8 1/8 1/4 1/4 1/4 44 52 64 78 92 16 20

CNA

7 %0 Clip B O-ring Stainless steel NBR !8 %1 Steel ball A Carbon steel !9 Steel ball B Carbon steel @0 Replacement Parts: Seal Kit Tooth ring Stainless steel @1 Bore size (mm) Kit no.

5 Port Air Operated Valve Series VFA3000 1

1 5 Port Air Operated Valve Series VFA3000 How to Order SA Thread type (Including pilot port) VA Nil F N T Rc G NPT NPTF SA Port size (P, A, B port) VA 01 02 1 8 1 4 Option R1, R2 port are 1/8.