REA/REB

Specifications Specifications Applicable series REA Bore size REA Applicable series Bore size 25 to 63 2001mm and up 25 to 63 Applicable stroke Dimensions (mm) Bore size (mm) 25 50 40 32 63 B 48 88 72 62 102 Standard dimension (B) 46 86 70 60 100 Dimensions other than those in the table above are the same as the basic type. Refer to page 7.

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 39 39 40 40 41 41 43 45 47 54 54 55 55 56 60 65 68 70 70 71 71 72 77 78 82 84 87 89 91 93 96 97 98 99 99 100 101 102 Series MSUB Rotary Table: Basic Type Vane Style Size: 1, 3, 7, 20 . How to Order . Specifications. Construction. Dimensions .

CE2

Z B FX U FD FV RR FZ FT CX L TDe8 FY 224.5 117 15 10 15 85 29.5 299.5 71 80 16 9 60 10 100 12 30 42 76.5 + 0.058 0 + 0.3 + 0.1 0.032 0.059 D248.5 127 18 12 15 95 38 328.5 81 90 19 9 70 12 110 12 35 50 88.5 + 0.070 0 + 0.3 + 0.1 0.032 0.059 263 148 25 16 18 110 49 352 101 105 23 11.5 86 16 130 15 40 59 106 + 0.070 0 + 0.3 + 0.1 0.032 0.059 -X 31.5 297 192 20 25 140 61 403 119 130 28 13.5 102

ML2B

G 2-PA (Hexagon socket head taper plug) I F B + Stroke 2-PA (Port for operating cylinder) J J J J D D 2-PB 2-PB 2-MB, Depth LB II II (Hexagon socket head taper plug) (Hexagon socket head taper plug) J J 28 32 36 G 30 37 45 J 40 46.5 55 DD 11 15 16.5 A 110 140 170 H 73 88 106 EE 14.5 16 22 K 46 58 68 FF 63.5 77.5 95 L 45.5 54 64 GG 22 27 35 M 30.9 32.4 41.4 HH 24 32 37 N 16 15 19 O 69 84 102

MVGQ

J MVGQM (Slide bearing) A, DB, E Dimensions MVGQL (Ball bushing bearing) A, DB, E Dimensions DSymbol A E Symbol Bore size (mm) 40 A DB E DB Bore size (mm) Stroke Up to 50 st Over 50 st Up to 50 st Over 50 st -X 40 54 90 0 36 16 71.5 20 17.5 50 50 60 102 4 46 20 81 25 25 2063 63 61 102 0 41 20 81 25 20 Data 10-16-13 14 Valve Mounted Guide Cylinder Series MVGQ 80, 100 How to Order How to Order

REC

D-C80 D-C80C D-B53 D-B64 D-G5NTL Without indicator light Reed switch Without indicator light With timer Solid state switch 10-2-102

C85

22 6 6 19.7 16 22 20 8 G 1/8 M22 x 1.5 8.2 M8 x 1.25 24 13 12 15 15 11 32 17 6 20 16 11 44 24 8 28 20 8 22 22 10 G 1/8 M22 x 1.5 10.2 M10 x 1.25 30 17 12 15 15 11 32 20 8 22 16 11 50 28 8 33.5 25 (mm) S XC ZZ Z Bore 1 to 50 1 to 50 1 to 50 1 to 50 101 to 150 101 to 150 101 to 150 101 to 150 51 to 100 51 to 100 51 to 100 51 to 100 8 46(52){56(62)} 64(70){74(80)} 76(82){86(92)} 86(92){96(102

C95

D-Y7PV D-Y7WV D-A3, D-G39 D-K39 D-A44 D-Z7, D-Y59 D-Z80, D-Y7P D-Y7W D-F5, D-F5W, D-F5NTL D-J5, D-J59W D-F59F, D-F5BAL D-A5 D-A6 D-A59W Bore size (mm) D-Y7BAL CS1 Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht 125 160 200 250 68.5 84.5 100.5 67.5 84.5 100.5 66.5 86 104 128 116 134.5 154 72 89.5 103 65 83 100.5 65 83 100.5 65 83 100.5 126 144.5 164 71.5 90 102.5 127 66.5 86 104 128 70.5 89 102

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 92 93 94 94 95 95 95 95 96 96 96 96 96 97 97 98 98 99 99 99 100 100 102 103 103 104 106 106 107 109 111 111 Caution . Specifications. Construction. Dimensions . Series CQSW Compact Cylinder: Standard Type Double Acting, Double Rod 12, 16, 20, 25 .

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Bore size (mm) Stroke range (mm) O P AJ AI AH AG AB AA V U T S N M L A K J I B AP AK AL Rc 1/8 20 95 82 125 112 11 12 48 82 12 26 45 25 80 60 55 30 108 99 6.6 25 9 75, 100, 125, 150, 200 M6 x 1 depth 9 Rc 1/8 25 108 92 150 134 13 16 57 100 13 31 54 35 100 70 65 35 130 30 109 9 9 M6 x 1 depth 13 75, 100 125, 150 200, 250 300 Rc 1/8 32 118 102 150 134 16 16 65 114 16 38 60 35 106 80 73 40 135

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Stainless steel linear guide (specially treated) 102 CX The specially treated linear guide achieves low particulate generation, high linearity and high precision.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

34 8.5 A 30 4-M6 x 1 4-M5 x 0.8, depth 7 Bottom hole diameter 5.1 19 6.5 W 32 0.05 46 0.5 0.05 8 B D Piping port 2-M5 x 0.8 47 13 J Mounting base side B D 16.5 14.5 Across AA MXP16-30 Without magnet and switch rail 2-M3 x 0.5, depth 3.5 For rail mounting 8 2-M2 x 0.4, depth 3 For magnet mounting 8.5 10.7 6-M5 x 0.8, depth 7 20 20 L (mm) Model G M W H S Z J V K L MXP16-20 18 40 65 58 20 102

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

. *7 With lock only *8 For an actuator with lock, add the power consumption for the lock. 13 Battery-less Absolute Encoder: Electric Actuator/High Rigidity and High Precision Slider Type LEKFS Series Battery-less Absolute (Step Motor 24 VDC) Dimensions: In-line Motor LEKFS25E (102) 64 3H9 (+0.025 0 ) depth 3 Body mounting reference plane (B dimension range)1 4 x M5 x 0.8 thread depth 8.5

Refrigerated Air Dryers

IDF190D, 240D IDF370D IDF4E to 15E1 IDU3E to 15E1 (A) (A) No-fuse breaker D 40 Earth leakage breaker 60 A C Power connection B E Power cable outlet (17) 35 Grommet with membrane [mm] Dimensions Model A B C D E IDF4E, 6E, 8E, 11E 32 230 97 34 15 IDF15E1 43 258 102 82 IDU3E, 4E, 6E 32 97 34 15 IDU8E 42 100 37 Earth leakage breaker with cover 230 IDU11E 75 IDU15E1 43 258 102 82 Model A IDF190D

Integrated Controller

250 6 2 200 180 300, 350 8 3 300 280 400, 450 10 4 400 380 500 12 5 500 480 214 275 6 80 21 Easy to Operate Integrated Controller / Slider Type EQFSH Series Battery-less Absolute (Step Motor 24 VDC) Dimensions: In-line Motor Model Selection EQFS H Series EQY H Series Auto Switch Electric Specifications Wiring Examples Operation Data Setting Options Specific Product Precautions EQFS25H (102