VQ

VG R11 Manual override 21.5 (Min. bending inner radius) (29.3) VP 104 VQ VQZ Stations 1 2 3 4 5 n Dside Uside VZ 2-M5 X 0.8(E port) VS 2-M5 X 0.8(P port) 42.9 A A 20 (8.5) 1.5 5 n-M5 X 0.8 (A port) 5 (7.5) 15 P=10 38 Equation: L1=10n+32 L2=10n+43 n: Station (Max. 18) Dimensions n L 2 52 63 83 112.5 123 11 142 153 173 200 210.5 3 62 73 93 112.5 123 12 152 163 183 212.5 223 4 72 83 103

VXA21/22

Applicable Fluids Standard Option (1) Water (Standard, Up to 40C) Air (Standard, dry), Turbine oil Vacuum (Up to 1 Torr) Carbon dioxide (CO2), Nitrogen gas(N2) Freon11, 113, 114 Vacuum (Up to 103 Torr) (V, M) Non-leak (105 atm cc/sec or less) (V, M) Symbol N.C.

XL

B A Series XLA (mm) B mm Model Weight kg (lb) A mm Conductance l/s 40 XLA-16 XLA-25 XLA-40 XLA-50 Little heavy metal contamination The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers. 103 0.25 (0.55) 5 50 113 0.45 (0.99) 14 65 158 1.1 (2.43) 45 70 170 1.6 (3.53) 80

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, E/P REGULATOR, VALVE, VY1 E/P REGULATOR, DA, VY1 BODY PORT 1/8, 1.21254 lb

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

37 14 17 R 1/4 41.2 46.2 46.7 51.7 18.5 AS22 1FE-02-08SK 18.5 36.4 27.2 8 15.2 39 AS-FE AS-FE AS22 1FE-02-10SK 21 44.5 18.8 35.3 10 18.5 42 AS32 1FE-03-06SK 17 39.3 27.8 6 12.8 57 KE AS32 1FE-03-08SK 18.5 41 29.5 8 15.2 60 14 19 R 3/8 46.5 51.5 51.7 56.7 23 19.8 AS32 1FE-03-10SK 21 43.3 31.8 10 18.5 62 AS-FG AS32 1FE-03-12SK 22 44.3 32.8 12 20.9 64 AS42 1FE-04-10SK 21 47.9 33.6 10 18.5 103

Compact Hydraulic Cylinder

(mm) H I J K L C D E F U A B Z M N O P S Bore size (mm) 32 M10 x 1.5 60 4.5 14 8.5 73.5 12 16 45 20 31.5 65 14 34 5.5 9 depth 7 Rc1/8 58.5 40 M10 x 1.5 69 5 14 8.5 75.5 12 16 52 22 35 67 14 40 5.5 9 depth 7 Rc1/8 66 50 M12 x 1.75 86 7 18 11 87 15 20 64 25 41 76 19 50 6.6 11 depth 8 Rc1/4 80 63 M12 x 1.75 103 7 18 11 91 15 20 77 27 47.5 80 19 60 9 14 depth 10.5 Rc1/4 93 80 M16 x 2 132 6 22

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

depth 10 5 HA GA 4H9 ( ) depth 4 +0.030 0 4H9 ( ) depth 4 +0.030 0 B-B A-A (mm) Model F 28 28 38 34 34 36 36 N 4 4 4 6 6 8 10 G 18 18 20 9 23 12 H 32 32 40 39 36 36 NN 2 2 2 3 3 4 5 GA 18 18 20 38 48 59 84 HA 32 32 40 39 39 72 72 I 12 12 14 15 13 17 17 J 34 34 42 58 70 110 135 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 KA 117.5 142.5 NA 4 4 4 4 4 8 8 M 67 67 77 94 104 148 173 Z 66 66 76 93 103

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

( ) depth 3.5 +0.030 0 2 x M5 x 0.8 thread depth 8 N 35 1 x F 2 4 x M4 x 0.7 thread depth 6 4H9 ( ) depth 3.5 +0.030 0 27 M 0.5 30 32 Z ZZ (NN 1) x H G 8.5 18.5 8.5 18.5 H B A 4.2 8.5 9 9 20 1 4H9 ( ) depth 3.5 +0.030 0 5 B A NN x M5 x 0.8 thread depth 10 4H9 ( ) depth 3.5 +0.030 0 HA GA Section AA Section BB (mm) Model F 35 35 35 50 35 55 65 ZZ 99 99 99 111 131 177 231 M 71 71 71 83 103

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

A + Stroke L Rod end male thread H1 Rod end nut C1 X L1 Rod End Male Thread (mm) Bore size (mm) 63 Auto switch D-A9, F9 C1 X H1 L1 26 28.5 M18 x 1.5 33.5 80 32.5 35.5 M22 x 1.5 43.5 100 32.5 35.5 M26 x 1.5 43.5 (mm) Without auto switchWith auto switch Bore size (mm) Stroke range (mm) C D E F H I J K L M N O P Q S U Z A B A B 46 10 to 50 54 14 depth 10.5 63 64 56 15 20 77 10.5 M10 x 1.5 103

Rotary Actuator/Vane Type

When tightening the screw, take care that the auto switch does not tilt. 103 CRBm2 Series Auto Switch Mounting: Size 10, 15 (D-S/T99(V)m, S9P(V), 97/93A, 90/90A) External view and descriptions of auto switch unit This following shows the external view and typical descriptions of the auto switch unit.

CV/MVGQ

M22 x 1.5 M26 x 1.5 60 70 85 102 116 32 40 40 52 52 27 30 31 37 40 10 10 10 14 14 84 90 98 116 126 65 75 90 110 130 8 11 11 13 16 Without rod boot H 51 58 58 71 72 Bore size (mm) With rod boot e 43 52 52 65 65 TDe8 TI TQ TT TX TY TZ W I Q l 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke f 11.2 11.2 11.2 12.5 14.0 h 59 66 66 80 81 ZZ 229 239 247 280 292 Z 101 111 115 138 144 Z 93 103

New

Fluid 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa 1) Type of fluid Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side. Also, install a filter on the primary side, and be careful that no foreign material is picked up.

XM, XY

XMA series with KF (NW) flange A (mm) Model Weight (kg) Conductance (L/s) B (mm) CYV XMA-16 40 103 0.33 5 XMA-25 XMA-40 XMA-50 50 113 0.61 14 B 65 158 1.40 45 70 170 2.00 80 A 160 XMA-63 XMA-80 88 196 3.60 90 235 6.20 200 A : Common to all series. 479 Series Variations Operating pressure Flange size Shaft seal system Models Valve type Angle type In-line type Options Application Switch Indicator

MY1

115 175 200 G 23.5 25 60 70 LW 80 96 112 140 GB 37 39 71.5 79.5 HG 40 51 66 85 H 94 116 150 190 JJ M6 x 1 M8 x 1.25 J M12 x 1.75 M14 x 2 Model MY1B 50 MY1B 63 MY1B 80 MY1B100 PB 50 60 65 85 PE 240 280 M 14 16 20 25 PC 100 115 PF 22 42 PA 120 140 80 120 PD 8.5 9.5 N 47 50 85 95 Q 384 440 660 760 NC 38 51 65 85 QW 76 92 90 120 NE 76.5 100 124 157 Z 400 460 690 800 NG 51 59 82 103

NCA1

stroke 700 30 68 118 168 202 275 cylinders, oversized piston rods may be required. 1000 27 60 105 155 190 257 330 1400 24 53 92 142 174 244 308 385 1800 23 48 82 127 160 230 296 366 It must be noted, however, that oversized piston rods transmit more side load 2400 19 45 75 114 145 213 281 347 than is the case with more flexible smaller rods; therefore, the use of oversized 3200 16 41 67 103

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

A + Stroke L Rod end male thread H1 Rod end nut C1 X L1 Rod End Male Thread (mm) Bore size (mm) 63 Auto switch D-A9, F9 C1 X H1 L1 26 28.5 M18 x 1.5 33.5 80 32.5 35.5 M22 x 1.5 43.5 100 32.5 35.5 M26 x 1.5 43.5 (mm) Without auto switchWith auto switch Bore size (mm) Stroke range (mm) C D E F H I J K L M N O P Q S U Z A B A B 46 10 to 50 54 14 depth 10.5 63 64 56 15 20 77 10.5 M10 x 1.5 103

CV/MVGQ

1.5 60 70 85 102 116 32 40 40 52 52 27 30 31 37 40 10 10 10 14 14 84 90 98 116 126 65 75 90 110 130 8 11 11 13 16 Without rod boot H 51 58 58 71 72 Bore size (mm) 40 50 63 80 100 With rod boot e 43 52 52 65 65 TDe8 TI TQ TT TX TY TZ W I Q l 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke f 11.2 11.2 11.2 12.5 14.0 h 59 66 66 80 81 ZZ 229 239 247 280 292 Z 101 111 115 138 144 Z 93 103

RSH/RS1H

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com L CZ CT CT Y V U Conveyor lower limit position CD T R Stroke H B 2-P D QA FT A GA Rear pressure port Front pressure port QB 2-Plug WB GB E W (Width across corners I) (mm) Width across corners I 85 103 132 GA 16 24 24 H 128 144.5 171.5 FT 20 25 25 FX

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

5.5 6 18 22 22 30 15.5 19.5 19.5 27 13 17 17 19 14 16.5 20 26 8 10 12 16 12 14 18 25 2 2 2 2 12 12 12 13 10 10 10 10 35 40 40 50 5 6 6 8 26 31 38 47 M4 x 0.7 depth 7 6 8 10 14 M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 24 29 35.5 44 1/8 1/8 1/8 1/8 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1 depth 12 S 1 to 50 st 51 to 100 st 101 to 125 st 126 to 200 st Bore size (mm) TA TB TC S 94 94 96 103

CJ2

st 76 to 100 st 101 to 125 st 126 to 150 st 10 16 3.2 6.5 8 8 28 28 8 10 15 15 12 18.3 14 20 12 18.3 4 5 M4 x 0.7 12.5 18.5 5 8 84.5 86.5 92 95 104 107 116 119 125 149 167 179 3.3 5 48.5 48.5 56 57 68 69 80 81 87 111 129 141 M5 x 0.8 12.5 23.5 T-bracket Dimensions ZZ Bore size (mm) Bore size (mm) 10 16 TX TC TH TV TW TY 126 to 150 st 193 10 16 5 to 15 st 95.5 100.5 16 to 30 st 103