0.01

Example) G36-P4-01-X30 ISA2 ISA2 2 Port Solenoid Valve Regulator PSE VCA27A S 5 DL 02 4 Q AR 20 02 1 B IS Port size Voltage CE compliant 02 02N 02F Rc 1/4 NPT 1/4 G 1/4 Thread type ISG 1 2 3 4 5 6 36 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC 230 VAC Nil N F Rc NPT G ZSM1 Throttle Nil S B K Without throttle and manual lock With throttle With manual lock With manual lock and throttle Semi-standard

LEF-OM002xx

Electric actuators / Common precautions . 35 5.1 Design and selection . 35 5.2 Mounting . 36 5.3 Handling . 36 5.4 Operating environment. 37 5.5 Maintenance . 38 5.6 Precautions for actuator with lock . 38 6.

PFA/PFW

DC (+) 1 OUT 2 2 DC () 3 OUT 1 4 Flow direction 14 Digital Flow Switch for Water Series PFW Dimensions (mm)/ Separate Type For water 1in = 25.4mm Scale:70% PFW3mm mm-A Display unit Panel mount 3 x 7.2 (= 21.6) 41.8 8-M3 40.3 40 6.4 4.3 1 2 3 4 SMC FLOW SWITCH 35.8 19.4 40 UNIT RESET SET 5 6 7 8 Panel cutout dimensions 36 + 0.5 0 + 0.5 0 36 PFW3mm mm-B Display unit DIN rail The applicable

ZR

Vacuum release Vacuum valve/Release valve SOL.a ON OFF SOL.b OFF ON When power supply is stopped vacuum valve/vacuum release valve will hold the operation. 13-3-36 36 Series ZR Large Size Vacuum Module: Vacuum Pump System Function Plate: ZR1-RV3 A function plate is used when each connecting port for the valve unit is common.

SMC Electronic Switch Series Variations

ZSE1-01-15CN1 pc. ZS-20-5A-501 pc.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

connector (L): SYJ5140-L-01 M plug connector (M): SYJ5140-M-01 DIN terminal (D): SYJ5140-D-01 M8 connector (W0): SYJ5140-W0-01 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 82.9 82.6 Max. 10 75.4 50.1 [57.1] 64.1 34.7 54.6 M8 x 1 49 37.1 61.2 [68.2] Approx. 300 (Lead wire length) 6 Pg7 6 6 6 73.5 [75.7] 63.7 [65.9] 83.5 65.2 72.6 58.7 0.5 45.5 45.5 45.5 45.5 17 17 17 17 17

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

AS-F (Hexagon width across flats) (Hexagon width across flats) AS22 1FE-01-04SK 12.7 27.5 20.4 4 9.3 26 TMH AS22 1FE-01-06SK 13.5 27.5 20.4 13.4 6 11.6 27 12 12 R 1/8 44.9 49.9 48 53 14.2 AS22 1FE-01-08SK 18.5 32.4 25.3 8 15.2 29 ASD AS22 1FE-01-10SK 21 40.2 33.1 14.1 10 18.5 31 Applicable tubing O.D. d AS22 1FE-02-04SK 16 34.4 25.2 4 10.4 36 AS AS22 1FE-02-06SK 17 34.4 25.2 17.7 6 12.8 37

HRX-OM-X071

AL.01 to AL.32 D.OUT1 ALARM CODE No.15 screen Contact output signal 1 maintenance MT.01 MT.01 to MT.05 D.OUT1 MANT CODE No.16 screen Contact output signal 2 function RMT 1 D.OUT2 SEL No.17 screen Contact output signal 2 operation A A/B D.OUT2 TYPE No.18 screen Contact output signal 2 alarm AL.01 AL.01 to AL.32 D.OUT2 ALARM CODE No.19 screen Contact output signal 2 maintenance MT.01

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Model Elbow type Straight type In-line type 12-REA25 10-AS2001F-06-X214 10-AS2201F-01-06-X214 10-AS2301F-01-06-X214 12-REA32 10-AS2001F-06-X214 10-AS2301F-02-06-X214 10-AS2201F-02-06-X214 6. Do not use the cylinder with its body fixed. Be sure to secure both head covers (or end covers in case of CY1R) before using the cylinder.

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

PSxx-OMM0006CN

N01 R1/8 (M5 ) NPT1/8 (M5 ) C3602() O HNBR 45 g 46 g -62No.PS-OMM0006CN-E (M8(3 )71 ) 01/N01 5 4 M5/C4/C6 M5 5 -63No.PS-OMM0006CN-E W1/WF1 4 ( ISO228-1) -64No.PS-OMM0006CN-E A 01/N01 W1/WF1 -65No.PS-OMM0006CN-E B W1/WF1 -66No.PS-OMM0006CN-E D 01/N01 W1/WF1 -67No.PS-OMM0006CN-E 01/N01 W1/WF1/M5/C4/C6 -68No.PS-OMM0006CN-E + 01/N01 W1/WF1/M5/C4/C6 -69No.PS-OMM0006CN-E

EXxx-OMW0014CN

1 Valve 2, 3 diagnostics 01 2 Valve 4, 5 diagnostics 01 3 Valve 6, 7 diagnostics 01 4 Valve 8, 9 diagnostics 01 5 Valve 10, 11 diagnostics 01 6 Valve 12, 13 diagnostics 01 7 Valve 14, 15 diagnostics 01 Valve diagnostics 2 . 5-5 Valve diagnostics 2 Bit 0 Valve 16, 17 diagnostics 01 1 Valve 18, 19 diagnostics 01 2 Valve 20, 21 diagnostics 01 3 Valve 22, 23 diagnostics 01 4 Valve 24, 25

Compact Manifold Regulator

ZS-32-A ZS-32-D Refer to Best Pneumatics No. 8 for Pressure Switch Precautions, and the Operation Manual on SMC's website for Specific Product Precautions. 734 Compact Manifold Regulator ARM11A/B Series Common Supply Block ARM11A 1 S 01 3 Z A q w e r t y ARJ AR425 to 935 1. IN Piping Position 2.

VQ5000

2 (A) 4 (B) 2 Metal Rubber 4 Bore 6.1 Bore 6.1 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) PUSH TURN LOCK 2 2 position double 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 Light/Surge voltage suppressor 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Nil E Yes Without light, With surge voltage suppressor 3 position double check Note) For details about the double check type, refer to page 2-6-36

Process Pump Series PA3000/5000/PAX1000 Series PB1000

(except IDG1, IDG5) Maintenance Part Lists PA3000/Automatically operated type PA5000/Automatically operated type PAX1000 KT-PA5-31 KT-PAX1-31 KT-PA3-31 Diaphragm kit (PTFE) Diaphragm kit (PTFE) Diaphragm kit (PTFE) KT-PA5-32 KT-PAX1-36 KT-PA3-32 Check valve kit Diaphragm kit (NBR) Diaphragm kit (NBR) KT-PA5-36 KT-PAX1-37 KT-PA3-36 Check valve kit Check valve kit Switching valve parts kit

Process Pump Series PA3000/5000/PAX1000 Series PB1000

(except IDG1, IDG5) Maintenance Part Lists PA3000/Automatically operated type PA5000/Automatically operated type PAX1000 KT-PA5-31 KT-PA3-31 KT-PAX1-31 Diaphragm kit (PTFE) Diaphragm kit (PTFE) Diaphragm kit (PTFE) KT-PA5-32 KT-PA3-32 KT-PAX1-36 Check valve kit Diaphragm kit (NBR) Diaphragm kit (NBR) KT-PA5-36 KT-PA3-36 KT-PAX1-37 Check valve kit Check valve kit Switching valve parts kit

PA3000/5000/PAX1000

(except IDG1, IDG5) Maintenance Part Lists PA3000/Automatically operated type PA5000/Automatically operated type PAX1000 KT-PA5-31 KT-PA3-31 KT-PAX1-31 Diaphragm kit (PTFE) Diaphragm kit (PTFE) Diaphragm kit (PTFE) KT-PA5-32 KT-PA3-32 KT-PAX1-36 Check valve kit Diaphragm kit (NBR) Diaphragm kit (NBR) KT-PA5-36 KT-PA3-36 KT-PAX1-37 Check valve kit Check valve kit Switching valve parts kit

Secondary Batteries

01 90-VQ2000 Series compatible with secondary batteries For blanking manual specification 90 Material restriction OUT side port size Rc 1/8 01 IN side port size Rc 1/8 01 *Specifications and dimensions for the 90-series are the same as standard products. 7 3 Port Solenoid Valve Pilot Operated Poppet Type Rubber Seal 90-VP300/500 Series How to Order A 2 4 3 VP D Z 5 90 02 Series compatible

VDW

Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 1 2 10 20 Thread type VC Rc G NPT Nil F N Material VDW C S C37 SUS Type 30 VQ VVCW20-4A OUT port size Stations Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 VX2 VX Type 10 is M5 only.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Back cover 8 2-Color Display Digital Flow Switch RoHS PF2M7 Series How to Order PF2M7 10 C6 A M Integrated display q r t y u i w e q Rated flow range e Port size Piping variations 01 0.01 to 1 L/min 02 0.02 to 2 L/min 05 0.05 to 5 L/min 10 0.1 to 10 L/min 25 0.2 to 25 L/min 50 0.5 to 50 L/min 11 1 to 100 L/min 21 2 to 200 L/min With One-touch fitting Female thread C4*2, C6, C8, N7 01, 02,