Free Mount Cylinder

Material NBR Silicon rubber Urethane rubber Fluoro rubber Conductive NBR (2 to 16 only) Conductive silicon rubber (2 to 16 only) N S U F GN GS Material N S U F GN NBR Silicon rubber Urethane rubber Fluoro rubber Conductive NBR (2 to 16 only) Conductive silicon rubber (2 to 16 only) Pad type Flat Flat with ribs Deep Bellows (Except -X11) U C D B Table (1) Pad Dia./Pad Type Dia.

MY1

Load weight (kg) Caution The cylinder should be mounted in m1 orientation if maximum dustproofing is required. m m m Moment (Nm) M = F x L F3 M = F x L M = F x L F F2 L2 L1 L3 Maximum load weight Select the load weight from within the range of limits shown in the graphs. Note that the maximum allowable moment value may sometimes exceed even the operating limits shown in the graphs.

CXS

D-F9BV D-F9PV D-F9NV D-F9B D-F9P D-F9N DC(+) Brown [Red] Lead wire length: 0.5m 6 7 7 6 7 7 Lead wire length: 3m 31 37 37 31 37 37 Main circuit of switch OUT Black [White] DC() Blue [Black] Dimensions D-F9N, D-F9P, D-F9B D-F9P(V) DC(+) Brown [Red] Main circuit of switch OUT Black [White] DC() Blue [Black] D-F9B(V) OUT(+) Brown [Red] D-F9NV, DF9PV, D-F9BV Main circuit of switch OUT() Blue

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Decimal display Hexadecimal display 10 A 11 b 12 c 13 d 14 E 15 F Note 4) Applicable to non-magnetizing lock. 576 Programless Controller LECP1 Series Controller Details e r No.

CQS

7.5 7.5 9 11 B 32 32 41 44 L 13.5 13.5 14.5 15 A 25.5 25.5 34 37.5 B 22 22 29.5 32.5 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 B 17 17 19.5 22.5 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 6 8 10 12 M4 x 0.7 25 29 36 40 6 8 7 12 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 M3 x 0.5 5 6 8 10 32 38 47 52 15.5 20 25.5 28 3.5 3.5 5.4 5.4 12 16 20 25 M4 x 0.7 M4 x 0.7 M6 x 1.0 M5 x 0.8 M6 x 1.0 M6 x 1.0 Note

XL

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

Profile Design ISO/VDMA Air Cylinder Series CP95

179 244 65 46.5 24 5 6 4 9 12 37 194 259 75 56.5 24 5 8 4 11.5 14 46 218 300 95 72 30 5 8 4 17 15 51 233 320 114 89 32 5 1.8-15 Series CP95K Cylinder mounting accessories dimensions L, F, C and D [mm] Mounting type L STROKE STROKE Mounting type F Rear mounting STROKE Front mounting Mounting type C Mounting type D STROKE Bore 1.8-16 ISO/VDMA Air Cylinders Series CP95K Cylinder mounting

Compact and Lightweight

-N01-N01 12.7 12.7 12.7 67 42.5 27 26 NPT1/8 NPT1/8 NPT1/8 ZH07DA-N01-N01-N01 70.2 ZH10DA-N01-N01-N01 76.4 ZH13DA-N01-N02-N02 17.46 17.46 90.8 51 29.5 36.3 NPT1/4 NPT1/4 ZH15DA-N02-N03-N03 17.46 22.23 22.23 108.2 63.3 34.3 37.1 NPT1/4 NPT3/8 NPT3/8 ZH18DA-N03-N03-N03 22.23 131 73.6 41.1 39 NPT3/8 ZH20DA-N03-N04-N04 23.81 23.81 142.6 74.9 44.1 NPT1/2 NPT1/2 Inch Dimensions when the standard

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS121FM-U10/32-01 AS121FM-U10/32-03 AS121FM-U10/32-05 AS121FM-U10/32-07 AS221FM-N01-01 AS221FM-N01-03 AS221FM-N01-05 AS221FM-N01-07 AS221FM-N01-09 AS221FM-N02-03 AS221FM-N02-05 AS221FM-N02-07 AS221FM-N02-09 AS221FM-N02-11 1/8" 8.4 12.7 22.1 12.3 17.3 5/32" 9.3 7 9.6 28.8 30.1 25.1 8 33.8 10-32 UNF 16.5 26.1 21.3 11.4 3/16" 11.7 13.5 23.1 18.3 12 1/4" 16 1/8" 27.5 20.4 9.3 12.7 5/32" 17 13.4

High Vacuum Angle Valve, XL Series

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

Modular F.R.L. Unit

Contact SMC regarding the specifications for PSI unit and F .

Modular F.R.L. Units

Please consult with SMC separately for psi and F unit display specifications.

Modular F.R.L. Unit

Contact SMC regarding the specifications for PSI unit and F.

3 Port Solenoid Valve/

M12 Connector Cable (4 Pins) Made by OMRON Part number Cable length [mm] ZS-37-L 300 ZS-37-M 500 ZS-37-N 1000 ZS-37-P 2000 ZS-37-C 5000 Part number Cable length [mm] Changing the entry direction After separating the terminal block and housing, the cord entry can be changed by attaching the housing in the opposite direction 180.

Environment

L Foot F Rod flange*2 D Double clevis*3 !2 Cable length Note 2) [m] !3 Driver type * When the driver type is selected, the cable is included. Select cable type and cable length.

MXS

Model H G A B C J* K E D F 16.5 MXS-AT6 5 MXS 6 7 21 19 8 5 10.5 2.5 M2.5 X 8 M5 X 0.8 * MXS6, MXS8 26.5 MXS-AT6-X11 15 D 16.5 MXS-AT8 5 E E H MXS 8 M3 X 10 M6 X 1 8 25 9 6 12.5 3 22.5 26.5 MXS-AT8-X11 15 36.5 MXS-AT8-X12 25 5 G 20 MXS-AT12 MXS12 12 32 13 8 18.5 4 31 M4 X 8 M8 X 1 30 MXS-AT12-X11 15 B C 40 MXS-AT12-X12 25 24.5 MXS-AT16 5 F K K F A J MXS16 M5 X 10 M10 X 1 14 40 15 10 23 5

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Fittings & Tubing Air Cylinders Rotary Actuators Z 0.5 46.5 50 37 M 5H9 ( ) depth 5 +0.030 0 5H9 ( ) depth 5 +0.030 0 2 x M6 x 1 thread depth 13 5 (With stroke adjuster at retraction end) N 1 x F 2 51 (With stroke adjuster at extension end) 25 F 30 30 FF 58 76 46 73 22.5 6 x M5 x 0.8 thread depth 8 6 2 N x M5 x 0.8 thread depth 10 Stroke adjuster at retraction end 6 18 46.5 (With stroke

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

-01 12.7 20.4 27.5 4 9.3 1/8" 16 20.4 27.5 17 9.3 12.7 AS221FG-01-06 AS221FG-N01-03 13.5 20.4 13.4 27.5 6 11.6 5/32" 14.2 13.4 27.1 30.2 35.2 12 32.1 NPT 1/8 R 1/8 17 AS221FG-01-08 AS221FG-N01-05 23.1 12.7 30.2 19 18.5 35.2 25.3 32.1 30.2 32.4 8 15.2 3/16" 11.4 27.1 16.5 14.2 AS221FG-01-10 AS221FG-N01-07 23.9 31 21 21 32.1 14.1 39.2 10 18.5 1/4" 13.2 17 19 AS221FG-02-04 AS221FG-N01-09 14.1

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

1 G 02 F With bracket For type 30 manifold Not installed when delivered.

AFF

6 6 7 7 9 9 9 11 N 35 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110 110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 AM AFF2B 1 8 1 4 3 8 166 187 187 218 218 241 241 277 334 24 27 27 32 32 37 37 39 55 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253