Profile Design ISO/VDMA Air Cylinder Series CP95

ball joint A B C D EN ER F G E L M N P H R (mm) 0.2 maxi JS15H7 -0.1 maxi H11 H13 H13 0.5 0.5 0.5 32 32.5 10.5 22 10 14 15 30 10 6.6 45 10.5 5.5 5 40 38 12 25 12 16 18 35 10 6.6 55 11 5.5 5 50 46.5 15 27 16 21 20 40 10 9 65 15 6.5 5 51 19 63 56.5 15 32 16 21 23 45 12 9 75 15 6.5 5 80 72 18 36 20 25 27 45 14 11 95 18 10 5 100 89 18 41 20 25 30 55 16 11 115 18 10 5 1.8-11 Series

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

70astamb1

32 38 46 56 72 89 50 162 Up to 700 53 132 55 170 Up to 800 59 In the case of w/o air cushion, it comes with rubber bumper.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(same side) D-F9NW/F9PW/F9BW 55 5 5 4.5 D-M9N/M9P/M9B 1 or 2 pcs. (different sides) D-F9BAL 15 5 6 5 2 pcs. (same side) The operating range for the MGZP series is under examination. 55 Solid state switch D-F9NW/F9PW/F9BW 1 or 2 pcs. (different sides) 15 2 pcs. (same side) 70 Bore size (mm) D-F9BAL Auto switch model 1 or 2 pcs.

mb1

32 38 46 56 72 89 50 162 Up to 700 53 132 55 170 Up to 800 59 In the case of w/o air cushion, it comes with rubber bumper.

VQZ1000/2000/3000

Foot bracket For bracket assembly modes, refer to page 2-7-28. 5 1 3 2-2.2 die-cast hole (For manifold gasket positioning) PE port L plug connector (L): VQZ1120 1-L-C3/C4/C6/M5 M plug connector (M): VQZ1120 1-M-C3/C4/C6/M5 Cross section 0.23 mm2 Cover diameter 1.5 300 (Lead wire length) 83 (Single metal) 300 77 (Single metal) (Lead wire length) 81 (Single rubber) 75 (Single rubber) 61 55

Shock Absorbers and Rate Controls

.63 (l.R)0tl{l l.l 5x2 8.54 8.74 174-t2lJNF .38 l . t 3 1.20 5.43 t.l0 .55 .21 l . t 2 .63 (LR)OIl{ll.25r I 5.92 6.12 r%-r2 UNF .38 t . t 3 1.20 3.81 t.l0 .55 .2t 1.25 .0J (LR)Otlll|.25r2 8.54 8.7 4 r%-r2 UNF .38 t . t 3 1,20 5.43 t . t 0 .55 .21 t.25 .63 ^otesr 1 Alrshdk absorbrs wr]] ldnclro. satistiiCof,t dt 5% of the r narimum raied ener4y per c!

Square Tube Type Air Cylinder Series MB1

3.2 3.6 4.5 4.5 32 38 46 56 72 89 53 59 50 162 132 55 170 72.5 148 70 190 When there is no air cushion, the unit is equipped with rubber bumpers.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(Pitch) VT L1 4 L2 VT VP VG Manual override (Non-locking) VP 48.5 [55] 36.1 29.5 VQ 20 VQZ [ ] for AC VZ L plug connector (L) M plug connector (M) VS 12 12 8.5 8.5 17.5 1 1.5 17.5 11.5 P R 53.2 [54.5] P R 36 36 49.2 62.8 (Lead wire length) 4-Rc(PT)1/8 4-Rc(PT)1/8 48.5 [55] 300 (P/R port) (P/R port) 300 59.6 [66.1] (Lead wire length) 36.1 48.5 [55] [ ] for AC Other dimensions are the same

2/3 Port Valve

) Air/Water=1 4.2-6 VNA Port size 6A, 8A, 10A VX VN VQ Main Port Rc(PT) Model 1 8 1 4 3 8 VNA1-6A VNA1-8A VNA1-10A EZ, TZ, DZ: 9mm longer 4.2-7 VNA 10A, 15A, 20A, 25A Port size EZ, TZ, DZ: 9mm longer Main Port Rc(PT) A H I J K R F G L M B S N C T P D U Q E Model 3 8 1 2 3 4 VNA2-10A VNA2-15A VNA3-20A VNA4-25A 72.5 80.5 74.5 79.5 82.5 125.5 142.5 24.3 63 124 2.3 52 42 25 26 28 34 4.5 14 55

7

CKP1 series (mm) Bore size (mm) CKP1 Shortened dimensions Current model 40 50 63 7 2 2 58 56 56 65 58 58 CKG1 series (mm) Bore size (mm) CKG1 Shortened dimensions Current model 40 50 63 2 2 2 53 56 56 55 58 58 Total tube length reduced Total tube length reduced Mounting dimension Mounting dimension With air cushion Unclamped side (Head end)Standard Air cushion on both endsMade to Order (-

IDG

5 to 50 5 to 55 Ambient temperature (C) 5 to 50 Standard perfor mance Outlet airatmospheric pressuredew point (C) 15 Inlet air flow rate (l/min(ANR))(2) 28 56 665 111 222 335 560 830 1110 Outlet air flow rate (l/min(ANR)) 25 50 100 200 300 500 600 750 1000 Purge air flow rate (l/min(ANR))(3) 3 6 11 22 35 60 65 80 110 Bracket Assembly (Accessory) Part No.

High Power Cylinder:

56 Eff. thread length 15.5 19.5 19.5 21 JC 43 39 36 32 H1 5 6 6 8 LH 25 28 30 35 H 44 48 51 54.5 LD 7 7 7 9 K 5 5.5 5.5 7.5 JD 30.5 25.5 28.5 23 H2 8 8 9 11 Bore (mm) 20 25 32 40 NN M22 X 1.5 M24 X 1.5 M30 X 1.5 M33 X 2.0 ND 15.0 19.6 19.6 25.4 MM M8 X 1.25 M10 X 1.25 M10 X 1.25 M14 X 1.5 NF 13 17 17 22 LZ 55 55 60 75 NE 33.5 37 43.5 52.5 LY 41 46.5 53 62 ZZ 265 270 278 292 NB 30 36.9 43.9

F

22 57.4 5/16 3/8 KQU09-U02 17.46 15.2 51.5 15.2 45.5 18.5 6 12 38 KQU12-U03 22 20.9 61 20.9 55 22 57.4 3/8 1/4 KQU11-U02 19.05 17.9 56.5 17.9 50.5 21 7 12 12 KQU12-U04 22 20.9 62.5 20.9 54.5 22 57.4 3/8 3/8 KQU11-U03 19.05 17.9 56.5 17.9 50.5 21 7 3/8 1/2 KQU11-U04 22.23 17.9 59 17.9 51 21 7 1/2 1/4 KQU13-U02 22.23 21.7 61 21.7 55 22 9.6 1/2 3/8 KQU13-U03 22.23 21.7 61 21.7 55 22 9.6 1/2

Round Type Low Pressure Hydraulic Cylinder Series CH
M

M8 x 1.25 13 26 19 15 15.5 25 to 800 22 17 32 12 16 12 8 46 6 8 32 5.5 7 28 121 5.5 40 55 M10 x 1.25 13 28 19 15 19.5 32 to 800 24 22 38 16 19 12 8 53 8 9 40 7.5 7 30 133 6 45 60 M14 x 1.5 13 36 19 15 21 40 to 800 24 24 41 18 21 14 11 54 10 11 48 7.5 9 35 158 6 55 75 M16 x 1.5 19 44 24 21 21 (mm) Foot bracket plate thickness is dimension LT + 1mm.

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

M8 x 1.25 17 15 1/8 81 9.5 4.5 6.5 20 9 151 7 25 28 121 5.5 40 55 M10 x 1.25 17 15 1/8 81 11 3.5 5.5 20 9 156 7 32 30 133 6 45 60 M14 x 1.5 18 15 1/8 87 13 3 4 23 9 172 7 40 35 158 6 55 75 M16 x 1.5 22 21 1/4 108 16 5 0 25 11 198 9 6 Series CHN Dimensions Front flange type: CHNF Width across flats B2 Rc P Rc P GA2 Cushion valve GB1 NN GB2 T V Rc P MM Width across flats B1 H2 GA1 Cushion

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Refer to page 100 for part numbers. 55 Non-standard Motor Series LJ1H20 High Rigidity Direct Acting Guide Rolled Ball Screw Motor Output 100W 15mm/20mm lead Horizontal Mount How to Order Stroke 2 LJ1H20 F W X10 NC 1 G Cable entry direction Top entry Cable entry direction Motor specification Power supply voltage Switch None Matsushita Electric Industrial Co., Ltd.

CG5-S

M26 x 1.5 24 31 79 24 40 72 55 64 24 31 IY-G10SUS Not applicable for -X165US option Not applicable for -X165US option Knuckle joint pin Trunnion bracket Material: SUS440 (pin) SUS304 (bracket, snap ring) Material: SUS440 (pin) SUS304 (snap ring) LL CDd9 (CX) LY d Dd9 t m t LH l m L LT (LX) LG LF 4-LD (LV) LP LE (mm) (mm) Part no.

CJ5-S

M26 x 1.5 24 31 79 24 40 72 55 64 24 31 M26 x 1.5 IY-G10SUS Knuckle Joint Pin Pivot Bracket Material: Stainless steel 440 (Pin) Stainless steel 304 (Bracket, Snap ring) Material: Stainless steel 440 (Pin) Stainless steel 304 (Snap ring) LL CDd9 (CX) LY Dd9 d t m t LH l m L LT (LX) LG LF 4-LD (LV) LP LE Part no.

SMC Pneumatic Clean Series

55 60 60 10 12 11 14 5 5 6 6 40 45 55 65 22 22 28.5 30 11 13 14 16 5 5 5 7 66 82 100 120 86 106 125 150 70.5 82.5 101 121 Other dimensions are the same as basic style.