VN-OMP0001

) 12(P1) 12(P1) 12(P1) 10(P2) 10(P2) 10(P2) 10(P2) 12(P1)10(P2) Air operated Solenoid Port VNC02 12 (P1) External pilot Bleed port External pilot 10 (P2) Bleed port External pilot Pilot exhaust Ass Ass Ass Ass y y y y VNH VNH VNH VNH () 3 3 3 3 (VNH (VNH (VNH (VNH ) ) ) ) VNH13 3 5MPa 7 VN-OMP0001 VNC VNC VNC VNC VNH VNH VNH VNH / / / / (VNC (VNC (VNC (VNC ) ) ) ) /30m /30m 0.49MPa

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

1 Q=226S P(P2+0.1013) Sonic flow : P1+0.1013 1.89(P2+0.1013) Do not use in an explosive environment. 2 Q=113S(P1+0.1013) Q : Flow rate [ /min(ANR)] S : Effective area (mm2) P : Differential pressure (P1-P2) [MPa] P1 : Upstream pressure [MPa] P2 : Downstream pressure [MPa] Do not use in locations subject to heavy vibration and/or shock.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Both of these become slower as the operating pressure is increased. 14 Technical Data 5 He leakage 8 Exhaust time (low/medium vacuum) The time (t) required to exhaust a chamber at low vacuum with volume V (l), from pressure P1 to P2, using a pump with pumping speed S (l/sec) is t=2.3(V/S)log(P1/P2).

Vacuum

Analog Output Characteristics Hysteresia mode when the values of P1 and P2 are equal or when P1>P2 but within 3 digits, the hysteresis will be automatically set to 3 digits tor the set value ot P1. Window comparator mods The hysteresis is automatically set to 3 digits, so separate P1 trom P2 by 7 digils or more when programming.

VQ5000

How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 + 0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q: Air flow rate [l/min (ANR)] S: Effective area (mm) P: Differential pressure (P1P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Correction for different air temperatures

Vacuum

Analog Output Characteristics Hysteresia mode when the values of P1 and P2 are equal or when P1>P2 but within 3 digits, the hysteresis will be automatically set to 3 digits tor the set value ot P1. Window comparator mods The hysteresis is automatically set to 3 digits, so separate P1 trom P2 by 7 digils or more when programming.

Adsorption Plate

A B ZCUK AMJ Rc 1/8 Rc 1/8 AFJ AMV P1 P1 ZH -X185 P1 P2 P3 Base part no. Adsorption surface size SP1130 SP1230 SP1330 SP1430 SP1530 SP1630 50 x 50 55 40 10 Related Products 100 x 100 95 50 10 P2 P3 P2 P3 150 x 150 120 75 10 200 x 200 145 100 10 Rc 1/8 Rc 1/8 P3 P3 250 x 250 170 125 10 300 x 300 195 150 10 Square Rc 1/8 Rc 1/8 P1 P2 Base part no.

CY1

CY1H25 (Nm) 64 56 50 40 30 20 50 40 30 20 Model CY1H10 CY1H15 CY1H20 M2 2.5 16 16 M3 1.5 10 13 Model CY1H25 CY1HT25 CY1HT32 M2 26 85 96 M3 28 56 64 M1 1.5 10 13 M1 28 56 64 28 16 26 CY1H20 CY1H15 13 10 10 Moment Nm Moment Nm 2 3 4 5 22.5 3 4 5 CY1H10 M3 CY1H10 1.5 1 1 0.5 0.5 70 100 300 500 1000 70 100 300 500 1000 M1 M2 Piston speed mm/s Piston speed mm/s Static moment

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com m M3 m max Model 1 CYP15 5 CYP32 (Nm) M1 M2 Model CYP15 CYP32 M1 0.3 3 M2 0.6 4 M3 0.3 3 m m Static Moment Moment generated by the workpiece weight even when the cylinder is stopped Pich moment M1 = m x g x (L + B) x 103 Yaw moment M3 = m x g x (L +

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (kg) m M3 m max Model CYV15 1 CYV32 5 (Nm) M1 M2 Model CYV15 CYV32 M1 0.3 3 M2 0.6 4 M3 0.3 3 m m Static Moment Moment generated by the workpiece weight even when the cylinder is stopped Pitch moment M1 = m x g x (L + B) x 103 Yaw moment M3 = m x g

CYV

M2 Model CYV15 CYV32 M1 0.3 3 M2 0.6 4 M3 0.3 3 m m Static Moment Moment generated by the work piece weight even when the cylinder is stopped Pitch moment M1 = m x g x (L + B) x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYV15 CYV32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m: Load mass [kg] L: Distance to load center of

CYP

M2 Model CYP15 CYP32 M1 0.3 3 M2 0.6 4 M3 0.3 3 m m Static moment Moment generated by the work piece weight even when the cylinder is stopped Pich moment M1 = m x g x (L + B) x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m : Load mass [kg] L : Distance to load center

CYPSeries

M2 M1 0.3 3 M2 0.6 4 M3 0.3 3 Model CYP15 CYP32 m m Static moment Moment generated by the work piece weight even when the cylinder is stopped M Pich moment M1 = m x g x (L + B) x 103 M Yaw moment M3 = m x g x (L + A) x 103 M Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m : Load mass [kg] L : Distance to load center

CYPSeries

M2 M1 0.3 3 M2 0.6 4 M3 0.3 3 Model CYP15 CYP32 m m Static moment Moment generated by the work piece weight even when the cylinder is stopped M Pich moment M1 = m x g x (L + B) x 103 M Yaw moment M3 = m x g x (L + A) x 103 M Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m : Load mass [kg] L : Distance to load center

Rodless Cylinder for Vacuum Series CYV ø15, ø32

M2 Model CYV15 CYV32 M1 0.3 3 M2 0.6 4 M3 0.3 3 m m Static Moment Moment generated by the work piece weight even when the cylinder is stopped Pitch moment M1 = m x g x (L + B) x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYV15 CYV32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m: Load mass [kg] L: Distance to load center of

Slider Type/Ball Bushing Bearing

CY1H25 (Nm) 64 56 50 40 30 50 40 M1 1.5 10 13 M2 2.5 16 16 M3 1.5 10 13 M1 28 56 64 M2 26 85 96 M3 28 56 64 Model CY1H25 CY1HT25 CY1HT32 Model CY1H10 CY1H15 CY1H20 30 28 26 20 20 CY1H20 CY1H15 16 13 Moment Nm Moment Nm 10 10 2 2.5 3 4 5 3 4 5 CY1H10 M3 2 CY1H10 1.5 1 1 0.5 0.5 70 100 300 500 100 300 500 1000 1000 70 M1 M2 Piston speed mm/s Piston speed mm/s Graph (3) Graph (2) Moment generated

Compact Cylinder Series NCQ8

M2 bolt circle M1 W I dia.

Microprocessor-Controlled Electro-Pneumatic Regulator ITV2000 EASY PROGRAMMING GUIDE

Maximum load current: 30mA The NPN and PNP digital monitor outputs can be set to function in one of three different ways: comparator mode hysteresis mode self-diagnostic mode when P1P1>=P2 when P1=P2=0 The output is on whenever the outlet pressure is greater than P1 but less than P2. The output comes on once the outlet pressure reaches P1.

JXCx-OMT0001CN

LED LED OFF IP NS EtherNet/IP IP OFF MS EtherNet/IP LED 10Mbps P2-100 EtherNet/IP 100Mbps / P2-L/A / / / 10Mbps P1-100 EtherNet/IP 100Mbps / P1-L/A / / / -29No.JXC-OMT0001CN-C 4.4. 1 2DIN -30No.JXC-OMT0001CN-C 4.5 (1) DIN (A) (M5 4 ) (M5)X4 () (b) DIN (DIN ) DIN M5X8DIN 2 4 (:3.0[Nm]) M5X8 (M5X14)1 DIN 2 2 :3.0[Nm] DIN () A DIN B M5X14 M5X14) DIN (:

A

How to Find the Flow Rate (at air temperature of 20C) Choke flow: when (P2 + 0.1)/(P1 + 0.1) 0.5 293 273 + t Q = 120 x S x (P1 + 0.1) x Subsonic flow: when (P2 + 0.1)/(P1 + 0.1) > 0.5 Q = 240 x S x (P1 P2)(P2 + 0.1) x 293 273 + t Q : Air flow rate [l/min (ANR)] S : Effective area (mm) P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] t : Air temperature Note) Formulas above apply