Pad Diameter: 06 (Flat + Bellows), Pad Styles: U (Flat Style), Material: N (NBR), Rotating or Non-rotating: K (Non-rotating), Stroke: 6mm, Vacuum Entry: B3 (Female Thread M3X0.5), Mounting Thread: A8 (M8X1)

Pad Diameter: 08 (Flat + Bellows), Pad Styles: U (Flat Style), Material: U (Urethane Rubber), Rotating or Non-rotating: K (Non-rotating), Stroke: 6mm, Vacuum Entry: B3 (Female Thread M3X0.5), Mounting Thread: A8 (M8X1)

.: ø4, Double-sided Tape: D (w/Double-sided Tape), Pad Material: GE (Conductive EPDM Sponge), Mounting: B3 (M3 x 0.5, Female Thread)

CLA

::;Hs 1(0) 1(0) 5(1.5 8 4 0(6.5) 71.5 76.5 84.0 92.5 \02.5 D-A4 A 0(0) 0(0) 0(2.5) 2(6 4(75) [).Q3 B 1(0) 1(0) 5(1.5) 8(4) 10(6. 5) D-K3 ~ H, B3 88 95.5 10. 114 A 0(0) 0(0) 0(3 2.56.5 4.5 8 D-G5, [)'B5 1.5(0 1.5(0) 5.5(2) 8.5 4.5 10.5(7) ~.D-K5 ~ , 38 43.5 SO.5 59 69.5 A 0(0) 0(0) O{4.S 3 8) (9.5) D-I'S B 3(0) 3(0) 7(3.5) 10{6 12(8.5) , , D-JS 40 43.5 49 55.5 83 ~ Ht 31 42 35 so 51.5 _A 0

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

B1 Bore size (mm) 32 40 50 63 80 100 125 l2 E B2 B3 L1 TG1 T FL d1 d2 d3 CN R 45 14 34 3.3 11.5 32.5 3 5 5.5 22 10 30 10.5 6.6 10 11 17 55 16 40 4.3 12 38 4 5 5.5 25 10 35 11 6.6 12 13 20 65 21 45 4.3 14 46.5 4 5 6.5 27 12 40 15 9 16 18 22 75 21 51 4.3 14 56.5 4 5 6.5 32 12 45 15 9 16 18 25 95 25 65 4.3 16 72 4 5 10 36 16 45 18 11 20 22 30 115 25 75 6.3 16 89 4 5 10 41 16 55 18 11 20 22 32

•

(mm ) . 100 125 150 I 50 75 100 125 150 75 ~ 50 I 75 50 100 125 150 107 40 70 B3 83 97 11 5 128 128 194 52 62 204 212 225 225 1 83 107 50 70 83 ! 97 115 128 I 128 52 62 204 19' 212 2.?

CP95

22 10 14 15 30 5 32.5 10.5 6.6 45 10.5 5.5 40 38 12 25 12 16 18 35 5 6.6 55 11 5.5 50 46.5 15 27 16 21 20 40 5 51 9 65 15 6.5 63 56.5 15 32 16 21 23 45 5 9 75 15 6.5 80 72 18 36 20 25 27 45 5 11 95 18 10 100 89 18 41 20 25 30 55 11 115 18 10 5 6-13-11 11 Series CP95 Dimensions: Cylinder Mounting Accessory DS and ES [First angle projection] Mounting style (DS) Bore size (mm) E B1 B2 B3

Cylinder with Lock

B1 B2 B3 CN d1 d2 d3 E FL H (Max.) L1 l1 (Min.) l2 R SR (Max.)

0.4

(Except double wiring) With name plate External pilot Direct EXH outlet with built-in silencer C3 C4 C6 M5 CM L3 L4 L6 L5 B3 B4 B6 B5 LM With 3.2 One-touch fitting With 4 One-touch fitting With 6 One-touch fitting M5 thread Mixed sizes and with port plug Top ported elbow with 3.2 One-touch fitting Top ported elbow with 4 One-touch fitting Top ported elbow with 6 One-touch fitting M5 thread

•

buffer stroke 6mm (for jS2 8) '13 J1D With buffer stroke 10mm(for"10"50) 13 " D-Deeptype S-Siliconrubber B Bellows type K6 Non-rotation type with buffer stroke 6mm (for ofJ2 8) List8 Vacuum Entry-Mounting 16 ~16 FU~ FUlreth.ane rUber K10 Non-rotation type with buffer stroke 10mm (for 10 .pSO) 20 1>20 uonne ru er 25-"25 ' GN~Electric NBR(2416) 32-132 "GS-Electric silicon rubber 40-.40 (2416) B3

CRB2/CRBU2/CRB1

(mm) C2 F2 D1 G C3 A1 A2 B1 B2 B3 C1 D2 E1 E2 F1 R Model (size) CVRB1BW 50 CVRB1BW 63 CVRB1BW 80 CVRB1BW100 120 (136.5) 104 (120.5) 12 25 60 (61) 78 67 18 36 2.8 82.5 24 11.5 30 52 (53) 1/8 102 (136.5) 104 (120.5) 16 27.5 60 (61) 98 82 18 36 2.8 82.5 24 11.5 30 52 (53) 1/8 140 (155) 124 (139) 17 36 70 (71) 110 95 22 48 4 100 29 14 38 62 (63) 1/8 140 (155) 124 (139) 23.5 42.5 70 (71) 140 125

C95

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bore size (mm) E B1 B2 B3 TG1 T I1 (min) I2 FL H d1 d2 d3 CN SR (max) R 32 14 34 3.3 3 5 22 10 30 10 45 32.5 5.5 10.5 6.6 11 17 40 16 40 4.3 4 5 25 10 35 12 55 38 5.5 11 6.6 13 20 50 21 45 4.3 4 5 27 10 40 16 65 46.5 6.5 15 9 18 22 63 21 51 4.3 4 5 32

CP95

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bore size (mm) E B1 B2 B3 TG1 T I2 FL d2 d3 CN R H SR (max) d1 I1 (min) 32 5 5.5 30 10.5 6.6 11 14 34 3.3 3 22 10 17 45 10 32.5 40 5 5.5 35 11 6.6 13 16 40 4.3 4 25 12 20 55 10 38 50 5 6.5 40 15 9 18 21 45 4.3 4 27 16 22 65 10 46.5 63 5 6.5 45 15 9 18

0.5

B1 B5 B3 Yellowish green Ionizer stop signal IN Signal input to turn ON/OFF the ventilation with fan and ion generation. NPN type: To stop fan and ion generation, connect to 0 V. (It operates when disconnected) PNP type: To stop fan and ion generation, connect to +24 VDC.

25

AWG28 B3 Light green Discharge stop signal IN A4 Gray Maintenance detection signal IN Input signal when determining the necessity of electrode needle maintenance. B4 Yellow Maintenance detection signal OUT(Contact point A) Turns ON when electrode needs cleaning. Turns OFF when power supply failure, ion discharge error, connected sensor failure, or CPU operation failure.

Fieldbus System

Cylinder port size C3 C4 C6 M5 CM L3 L4 L6 L5 B3 B4 B6 B5 LM With 3.2 One-touch fitting With 4 One-touch fitting With 6 One-touch fitting M5 thread Mixed sizes and with port plug Top ported elbow with 3.2 One-touch fitting Top ported elbow with 4 One-touch fitting Top ported elbow with 6 One-touch fitting M5 thread Bottom ported elbow with 3.2 One-touch fitting Bottom ported elbow with 4

Modular Design with Uniform Body Style

30 40 60 20 30 40 60 V w With backflow function Nil Without backflow function V V V V V V V V K1 With backflow function V V V V V V V V + V e Pipe thread type Nil Rc V V V V V V V V N NPT V V V V V V V V F G V V V V V V V V + 01 1/8 V V 02 1/4 V V V V V V 03 3/8 V V V V 04 1/2 V V 06 3/4 V V V V 10 1 V V + V r Port size a Mounting Nil Without mounting option V V V V V V V V B3

AR20-B to AR60-B

Example) AR10-M5BG-NR-A-X406 Symbol Description Body size 10 a Mounting Nil Without mounting option B3 With bracket H With set nut (for panel mount) + Option 2 Nq b Pressure gauge 4 Nil Without pressure gauge G Round type pressure gauge (without limit indicator) + c Exhaust mechanism Nil Relieving type N Non-relieving type + d Flow direction Nil Flow direction: Left to right R Flow

CEx-OMI0064

CR ,, (EE ) 2ROM E 2ROM (100 ,E ), 2ROM E (3) : # : ASCII ,, 30H ) # 0 0 V R 23H 30H 30H 56H 52H 23H+30H+30H+56H+52H=12BH 2B ,30H 32H 3BH : # 0 0 V R 2 ; [CR] 23H 30H 30H 56H 52H 32H 3BH 0DH )ASCII ASCII 09 A B C D E F ASCII 30H39H 41H 42H 43H 44H 45H 46H 30H39H 3AH 3BH 3CH 3DH 3EH 3FH 27 - (4) 1bit () bit (ON 1) b7 b6 b5 b4 b3 b2 b1 1 0 () ON () (5) VR # 0 0 V R [CR] No. #

LEC-T1_C

OUT mon 1 Output pin0 [ ] Output pin1 [ ] OFF Output pin2 [ ] ON (6-3-4-2) CN5 Output pin LECP,LECA LECPA Output pin0 Output pin0 B1 12 keykey Output pin1 B2 13 Output pin1 Output pin2 B3 14 Output pin3 B4 15 Output pin4 B5 16 Output pin5 B6 17 Output pin6 B7 18 Last output pin Output pin7 B8 19 Output pin8 B9 20 Output pin9 B10 Output pin10 B11 Output pin11 B12 Output pin12 B13 (6