Battery-less

x M5 x 0.8 thread depth 10 5 +0.03 +0.01 depth 5 Auto switch mounting groove (2 locations)5 17 5 +0.03 +0.01 depth 5 6 7.5 A 53.4 46 45 44 29 45 24 A 32 C 22.5 51.7 0.3 46 (D/21) x C 65 51 Table operating range1 2 [2] Origin2 21 E D x M5 x 0.84 [Stroke end] 6.54 9 Stroke end [Origin]3 26 A-A G 116 + Stroke 23.5 Stroke F 4H9 ( +0.030 0 ) depth 4 41 29 5 4H9 ( +0.030 0 ) depth 4 42 6 x M5 x

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

One-touch fitting) A port M3 x 0.5 M3 x 0.5 Flow Rate Characteristics Flow rate characteristics Effective area (mm2) Port size 12 (PA) 23 (AR) Manifold C [dm3/(sbar)] 1(P), 3(R) Port 2(A) Port b Cv C [dm3/(sbar)] b Cv Body ported for internal pilot 0.9 M3 x 0.5 Type 10-SS3YJ3-20 10-SYJ32M M5 x 0.8 Type 10-SS3YJ341 S41 10-SYJ34M M5 x 0.8 1.5 M3 x 0.5 Type 10-SS3YJ3-42-M5 Type 10-SS3YJ3-42-

Air Slide Table Series MXQ

Retraction End E1 D E H H F G B C J A K MXQ-BT 8 (L) MXQ-BT12 (L) MXQ-BT16 (L) MXQ-BT20 (L) MXQ-BT25 (L) Stroke adjustment range (mm) Applicable size A B C E1 G H J K 1) E D F Model M8 x 1 MXQ 8 (L) M3 x 8 MXQ-BT 8 (L) 5 40.8 14 12.5 24.5 20 23 8 12 1.4 M8 x 1 MXQ12 (L) M4 x 10 6 40.8 16 16 29 18 28 10 12 1.4 MXQ-BT12 (L) MXQ16 (L) M10 x 1 M5 x 12 7 46.7 17 20 35.5 22 33.5 12 14 1.4 MXQ-BT16

Dual Rod Cylinder Series CXSJ/CXS

x 0.8 thread depth 4 (Piping port) OUT IN Steel balls 556 Series CXSJ Dual Rod Cylinder Compact Type Dimensions: 15 to 32 Standard Piping U Q R T ZZ + Stroke Stroke J K SS + Stroke 1 D B M L Z I 1 G 0.2 (G) A H E F (Through) N N (I ) (L) (Z) (G) C CX2 NN CXW A B ZZ C D E M F G H I J K L N 2 x M4 x 0.7 with thread depth 6 2 x M4 x 0.7 with thread depth 6 2 x M5 x 0.8 with thread depth 7.5

MXQ

Retraction End E1 D E H H F G B J C A K MXQ-BT20(L) MXQ-BT25(L) MXQ-BT8(L) MXQ-BT12(L) MXQ-BT16(L) (mm) Stroke adjustment range (mm) Applicable size A B C E1 G H J K 1) E D F Model MXQ8(L) MXQ-BT8(L) M8 x 1 M3 x 8 5 40.8 14 12.5 1.4 24.5 12 20 23 8 MXQ12(L) MXQ-BT12(L) M8 x 1 M4 x 10 6 40.8 16 16 1.4 29 12 18 28 10 MXQ16(L) MXQ-BT16(L) M10 x 1 M5 x 12 7 46.7 17 20 1.4 35.5 14 22 33.5 12 MXQ20

0.55

(Coil temperature: 20C, at rated voltage) 2 Series VP300/500/700 Flow Characteristics/Weight C [dm 3/(sbar)] b Cv Grommet DIN terminal 1 2 (P A) 2 3 (A R) C [dm 3/(sbar)] b Cv Weight (g) Note) Port size Model 1/8 1/4 1/4 3/8 3/8 1/2 3.5 4.2 7.9 8.9 11.9 15.1 0.26 0.22 0.21 0.16 0.21 0.21 0.8 1.0 1.8 2.2 2.7 3.6 3.6 4.2 7.2 8.9 11.8 15.3 0.26 0.23 0.27 0.20 0.20 0.22 0.9 1.0 1.8 2.1 2.7 3.7

Aluminum High Vacuum Angle Valve

(P) (Pressure port) 50 Main exhaust solenoid valve 50 XLDV-40 to 160/With solenoid valve C (KF flange) (K flange) Fd Fn C XLA XL XL M M5 Port 3(R) (Exhaust port) Auto switch (Option) XLQ K XM XY Initial exhaust solenoid valve N 5.5 DXSA B G Main exhaust solenoid valve XVD M5 Port 1(P) (Pressure port) A XGT CYV 8.5 8.5 A (mm) Model A B C Fn G M N Fd K XLDV-40 XLDV-50 XLDV-63 XLDV-80 XLDV-100

Modular Design with Uniform Body Style

C B V2 V1 Q2 Q1 Q1 K K OUT OUT IN IN U U P2 G Clearance for maintenance (Pressure gauge port size) Drain P2 E G Clearance for maintenance (Pressure gauge port size) Drain AC40-D to AC40-06-D A N F S M J R V1 V2 Q2 Q1 Q1 B C OUT IN 2 x P1 (Port size) U P2 E G Clearance for maintenance (Pressure gauge port size) Drain AC50-D to AC60-D A N F S J M R V1 V2 Q2 Q1 Q1 B C OUT IN 2 x P1 (Port size

Series VQ Metal Seal/Rubber Seal Body Ported

M5 thread Coil voltage VQ0 2 position single Note) See Options" on p.1.10-67 for inch size One-touch fittings. 1 2 3 4 5 6 100V AC (50/60Hz) G: Grommet C kit single only.

MHZ

Flat Type Fingers [3] D4-MM thread depth L (Thread for mounting attachment) 20K J A A D G B D B K J F C S W O (mm) Model Open Closed Weight (g) F G MM L J K C D B A W MHZ2-63 (1) 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +1.2 0.8 2H9 2.5H9 3H9 4H9 5H9 6H9 +0.2 0 26 55 115 235 420 4.45 5.8 7.45 8.9 14.8 17.7 M2 x 0.4 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 3 5 6 8

MHZ

D4-MM thread depth L (Thread for mounting attachment) 20K K J J B A A D G D B F C S W O (mm) Model A B C D F G Open Closed Double acting Single acting J K L Weight (g) MM W MHZL2-103 MHZL2-163 MHZL2-203 MHZL2-253 +2.2 0 2H9 2.5H9 3H9 4H9 0 0.2 0 0.2 0 0.2 0 0.2 +0.025 0 5 8 10 12 0 0.05 0 0.05 0 0.05 0 0.05 70 145 290 505 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 5 6 8 10 60 135 270 460 7 9

Air Slide Table

Retraction stroke end E E1 H H G B F (C) A E E1 H H G B MXQR-BT8 MXQR-JT8 A F Stroke adjustment range (mm) A B C F G H J K 1) E E1 Applicable size Model MXQR 6 M2.5 x 9 M6 x 0.75 1 4 8 6 28.5 8.5 19 18 12 MXQR-BT6 1.4 MXQR-BT8 MXQR 8 M3 x 11 M8 x 1 5 12 40.8 8 10 24.5 24 20 7 MXQR-JT8 1.4 6 MXQR-BT12 MXQR12 M4 x 14 M8 x 1 12 40.8 10 14 29 28 18 7 5 MXQR-JT12 1.4 7 46.7 MXQR-BT16 MXQR16 M5

Valve Single Unit

(Mounting hole) M5 x 0.8 M5 x 0.8 (External pilot port) (Pilot EXH port) (Light/Surge voltage suppressor) (Lead wire length) G: 300 H: 600 (Piping port) 5-Rc 3/8, 1/4 02 03 02 03 L plug connector (L): SX7140(R)-LM plug connector (M): SX7140(R)-MManual override (Press and turn for the locking type.)

15

NZ M5 x 0.8 9 70 50 4 44 89.8 85 M3 x 12 M5 x 45 14 NY M4 x 0.7 8 70 50 4 44 89.8 85 M3 x 12 M5 x 45 14 NX M5 x 0.8 9 63 50 5 47.2 89.8 85 M4 x 12 M5 x 45 9 NW M5 x 0.8 9 70 50 5 45 89.8 85 M4 x 12 M5 x 45 9 NV M4 x 0.7 8 63 50 5 47.2 89.8 85 M4 x 12 M5 x 45 9 NU M5 x 0.8 9 70 50 5 45 89.8 85 M4 x 12 M5 x 45 11 NT M5 x 0.8 9 70 50 4 44 89.8 85 M3 x 12 M5 x 45 12 NM2 M4 x 0.7

Electric Grippers

9 5.7 7 9 12 14 17 5.7 7 9 12 14 17 2 2.5 4 5 6 7 2.9 3.4 4.5 5.5 6.6 9 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 Flat Fingers (C) F C W J K D G 4 x MM, thread length L Thread for attachment mounting A B [mm] G Weight (g) Model J K MM A B C D F When opened When closed L W LEHZ10K2-4C LEHZ10LK2-4C LEHZ16K2-6C LEHZ16LK2-6C LEHZ20K2-10C LEHZ20LK2-10C LEHZ25K2-14C LEHZ25LK2-14C

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

Note 2) TF (G thread) for 20 indicates M5 x 0.8.

Possible to transfer a workpiece at low-speed.

Thread type Size 10, 15 Port type Nil Nil TF TN TT Combination 4 Types Combination of Applicable Chart How to order model with auto switches M5 Rc 1/8 G 1/8 NPT 1/8 NPTF 1/8 C 8 -X 6 -X 6 C 7 C10 C11 A 2 A24 C 7 A 1 A 2 A14 Chart 1, 2, 5 Chart 1, 2 Chart 2, 5 Rotating angle Refer to page 308 for How to Orderproducts with auto switch. 20, 30, 40 90 180 80 to 100 170 to 190 Combination is

0.4

For details about the PC wiring system, refer to the PCW series catalog (CAT.E02-20) separately. 77 Plug Lead Unit Series SQ1000 Plug -in Plug Lead SQ 1000 SQ 2000 Indicator light 27 41.6 P=11.5 L1 L2 L3 EX510 M5: External pilot port 25 37 45.4 5 23.9 Manual override F 9.6 (94.1) 10 B A C B A C B A C B A C B A C B A C B A C B A C kit 34.3 47.1 67.9 94.1(Single) 98.6 (Double, Dual 3 port valve

Free Mount Cylinder

(g) Stroke (mm) Model 15 10 5 C(D)U6-S,T C(D)U10-S,T C(D)U16-S,T C(D)U20-S,T C(D)U25-S,T C(D)U32-S,T 28(38) 25(35) 22(27) 48(58) 40(50) 36(41) 71(101) 56(86) 50(75) 133(170) 106(143) 95(128) 235(294) 193(252) 176(230) 347(425) 286(364) 262(335) For the weight of auto switch, refer to page 68 to 72.

Electric Actuator with Integrated Guide

Yasukawa Electric Corporation M4 x 0.7 8 4 75 C (Thread size) M5 x 0.8 10 4 70 When mounting a coupling on the motor, mount it within the dimensional range shown on the left.