SMC Corporation of America
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VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

Instruction to perform the Return to Origin operation 4 01 05 001A FF00 01 05 001A FF00 sent. 5 01 02 004B 0001 01 02 01 Acquires the INP signal information.

Rated voltage Voltage symbol Part number 24 VDC 24 V SY100-61-3-05 12 VDC 12 V SY100-61-3-06 100 VAC 100 V SY100-61-2-01 200 VAC 200 V SY100-61-2-02 110 VAC 110 V SY100-61-2-03 220 VAC 220 V SY100-61-2-04 Circuit Diagram with Light AC circuit DC circuit Caution When making connections, take note that using other than the supported size (3.5 to 7) heavy-duty cord will not satisfy IP65 (enclosure

type A port: Rc 1/8 V100 S070 Common SUP/Individual EXH VQD How to Order Type 21: Body ported (A port top ported) Applicable solenoid valve VK332--M5(-Q) VK332--01(-Q) VV3K3 05 21 VQD-V A port: Rc 1/8, M5 x 0.8 VK VK Applicable blanking plate assembly VK300-42-1A Valve stations P, R port thread type 01 1 station VT Nil Rc G NPT NPTF CE-compliant 20 20 stations 00F 00N 00T Q CE-compliant

R K05 Omron D2VW-5, 3 A 250 V AC, 0.4 A 125 V DC, 5 A 30 V DC. Temperature range: -40 to +85 C / -40 to +185 F. Not applicable to 6. sign "X", "X7", "Z", "U" and "E4". Omron D2VW-01, gold plated contacts, 100 mA 30 V DC / 125 V AC. Temperature range: -40 to +85 C / -40 to +185 F. Not applicable to 6. sign "X", "X7", "Z", "U" and "E4".

wire 24 V Connector Diagnostic indication (2-color indication) 20B59W Grommet H7A1 H7A2 H7B H7C H7NW H7PW H7BW G59 G5P K59 G59W G5PW K59W 3-wire (NPN) 3-wire (PNP) IC circuit Data 5 V, 12 V Grommet 2-wire 12 V Connector 3-wire (NPN) 3-wire (PNP) IC circuit Relay, PLC Diagnostic indication (2-color indication) 5 V, 12 V 24 V 12 V Grommet 2-wire Water resistant (2-color indication)

SYJ71 R 2 4 SYJ72 R 2 4 Standard With power saving circuit 0.35 (With light: 0.4 (DIN terminal with light: 0.45)) Power consumption (W) DC (A) 2 (A) 2 0.1 (With light only) X X 1.4 (With light: 1.5) 100 V 110 V [115 V] 200 V 1.6 (With light: 1.7) [1.7 (With light: 1.8)] 1 (P) 3 (R) 1 (P) 3 (R) Apparent power (VA) AC 2.3 (With light: 2.4) 2.5 (With light: 2.6) [2.7 (With light: 2.8)] 220

AW20P-270AS AR20P-260S G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD27 AR30P-270AS AR30P-260S G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD38N Note) AR40P-270AS AR40P-260S G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48N Note) Set nut Round 1.0MPa Note 2) Note 3) Pressure gauge Square embedded type Round 0.2MPa Note 3) Square embedded type N.O. N.C.

8 P port: Rc 1/8 F N T G S070 1 8 NPT 01 Rc C6 6 cassette B port: Rc 1/8 A port: Rc 1/8 NPTF Note) Applicable only for DIN terminal type VQD VQD-V Common SUP/Common EXH Type 21: Body ported (A, B port top ported) How to Order Applicable solenoid valve VK3120--M5(-Q) VK3120--01(-Q) VK332--M5(-Q) VK332--01(-Q) VK VK A port: Rc 1/8, M5 x 0.8 A, B port: Rc 1/8, M5 x 0.8 VV5K3 21 05 VT VK3120

Setting range: MT.01 to MT.05 (Initial value: MT.01) Contact output signal 3 Select function 21. Press the [] key. Displays screen for setting the function of the Contact output signal 3.

50/60 Hz 110 V 50/60 Hz 200 V 50/60 Hz 220 V 50/60 Hz M plug connector Sonic conductance C [dm3/(sbar)] L plug connector 24 V Series M8 Connector Pressure center 12 V DIN terminal Closed center Exhaust center 6 V Grommet { } 4/25/3 (A/BEA/EB) Double 5 V Single 3 V P.1 SY3 20 0.65 Body ported Base mounted Body ported Base mounted SY5 20 2.4 SY7 20 3.3 SY9 20 8.6 P.19 SY3 40 1.1 SY5 40 2.8

Applicable Connection Model H (Width D L1 L2 M Effective Tube OD mm Thread Across Flats) Orifice (mm 2) Uni Thread Nylon 4 1/8 KQF04-01 14 10 27 11 16 5.6 4 1/4 KQF04-02 17 10 31 14 16 5.6 6 1/8 KQF06-01 14 12 27.5 11 17 13.1 6 1/4 KQF06-02 17 12 31 13 17 13.1 6 3/8 KQF06-03 19 12 33.5 15 17 13.1 8 1/8 KQF08-01 14 14 29 11 18.5 26.1 8 1/4 KQF08-02 17 14 32.5 13 18.5 26.1 8 3/8 KQF08-03 19

) V V CC-LINK V D side U side 1 2 3 Stations SI Unit Part No.

AR425 to 935 ARX q Body size 1 2 3 Symbol Description AMR w Set pressure range 0 0.005 to 0.2 MPa V V 0.01 to 0.2 MPa V 1 0.01 to 0.4 MPa V V V 2 0.01 to 0.8 MPa V V V + ARM ARP IR-A IR-A e Exhaust direction 0 Bottom exhaust V V V 1 Front exhaust V 2 Rear exhaust V + IR IRV r Pipe thread type Nil Rc V V V N NPT V V V F G V V V + VEX 01 1/8 V 02 1/4 V V 03 3/8 V 04 1/2 V + SRH

0.35 (With light: 0.4 (DIN terminal with light: 0.45)) 1 (P) 3 (R) 1 (P) 3 (R) Power consumption (W) DC 0.1 (With light only) External pilot 1.4 (With light: 1.5) 100 V 110 V [115 V] 200 V SYJ51 R 2 4 SYJ52 R 2 4 1.6 (With light: 1.7) [1.7 (With light: 1.8)] (A) 2 (A) 2 Apparent power (VA) AC X X 2.3 (With light: 2.4) 2.5 (With light: 2.6) [2.7 (With light: 2.8)] 220 V [230 V] 1 (P) 3 (R

L plug connector Closed center: VFR2310-LExhaust center: VFR2410-LPressure center: VFR2510-LM plug connector Closed center: VFR2310-MExhaust center: VFR2410-MPressure center: VFR2510-MDIN terminal Closed center: VFR2310Exhaust center: VFR2410Pressure center: VFR251001 02 01 02 01 02 01 02 01 02 01 02 01 02 D Y 01 02 D Y 01 02 D Y Applicable cable O.D. 6 to 8 [4.5 to 7] Light/Surge voltage

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

V IC circuit 12 V 5 V, 12 V 5 V IC circuit IC circuit IC circuit MQ With diagnostic output (2-color indication) A96V A93V A90V 100 V 100 V or less 100 V, 200 V 200 V or less 24 V or less 3-wire (NPN equivalent) Yes RHC No Yes No Yes No Grommet 12 V Relay, PLC RZQ Connector 24 V 2-wire IC circuit PLC 12 V Terminal conduit Yes 100 V, 200 V Relay, PLC DIN terminal Grommet Diagnostic