3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000 Cylinder ports (1) N1 N3 N7 N9 N11 M5 01 02 Symbol NM External pilot port 3/8 1/8 5/32 1/4 5/16 Mix Applicable tube O.D.(Inch) M5 1/8 1/4 M5x0.8 VQZ1000 V V V V V Cylinder port VQZ2000 V V V V V VQZ3000 V V V V V Note 1) Mixing One-touch fittings and thread types is impossible.
SS5YJ310-SYJ333 M5 x 0.8 M3 x 0.5 0.9 Type 10-SS5YJ3-32-M5 0.25 0.25 0.25 0.24 0.32 0.32 0.33 0.32 0.20 0.21 0.20 0.22 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 0.19 0.18 0.26 0.21 0.25 0.28 0.29 0.27 0.25 0.27 0.25 0.34 0.060 0.059 0.060 0.057 0.081 0.079 0.082 0.079 0.048 0.050 0.048 0.057 0.32 0.30 0.29 0.27 0.33 0.35 0.34 0.34 0.10 0.21 0.19 0.10 0.25 0.27
12 V IC circuit 3-wire (PNP) Solid state switch Relay, PLC 2-wire 24 V Grommet Yes 12 V 3-wire (NPN) 5 V, 12 V IC circuit 3-wire (PNP) Diagnosis (2-color indicator) 2-wire 12V Note 2) Add -61 at the end of the part number for the flexible lead wire.
12 V IC circuit 3-wire (PNP) Solid state switch Relay, PLC 2-wire 24 V Grommet Yes 12 V 3-wire (NPN) 5 V, 12 V IC circuit 3-wire (PNP) Diagnosis (2-color indicator) 2-wire 12V Note 2) Add -61 at the end of the part number for the flexible lead wire.
V A93 M9N M9P M9B F9NW F9PW F9BW F9BA A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV 3-wire (NPN) 2-wire Relay, PLC 5 V, 12 V IC circuit 3-wire (PNP) 12 V 2-wire Relay, PLC Grommet 24 V 3-wire (NPN) 3-wire (PNP) Diagnostic indication (2-color indication) 5 V, 12 V IC circuit 12 V 2-wire Water resistant (2-color indication) Lead wire length symbols: 0.5 mNil (Example) A93 3 mL (Example) A93L
Series MY1MW/CW Dimensions/Centralized Piping Type 16, 20 1 in = 25.4 mm MY1 M C W G Bore size Stroke 8.5 G Cushion needle For 16 Unavailable port 2-M5 x 0.8 2-M5 x 0.8 (Hexagon socket head plug) M5 x 0.8 QQ QQ RR SS RR SS NC Cushion needle TT UU G G TT UU 2-M5 x 0.8 PP PP (Hexagon socket head plug) GB WW XX WW XX 2-ZZ (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) VV
For further details, refer to mounting positions under Replacement Heaters on page 465. 452 B XLD/XLDV Series Aluminum High Vacuum Angle Valve Dimensions XLDV-25/With solenoid valve 88.5 74 48 (KF flange) (For DC) (For AC) L A V V E 57.6 M 55.4 U 40 48 U C A V H H I G (38.5) 8.5 2.2 7.5 max. 49.4 21 Initial exhaust solenoid valve 41.5 3.5 123 26 M5 Port 3(R) (EXH) (Exhaust port) M5 Port 1
A73C A72H A73H E76A E73A F79 F7P J79 F79W 200 V Relay, PLC 2-wire 100 V 12 V Yes 24 V Connector 3-wire (NPN equivalent) IC circuit 10 5 V Grommet 2-wire 24 V Relay, PLC 100 V 12 V F7NV F7PV F7BV J79C F7NWV F7BWV F7BAV 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 10 16 20 25 32 3-wire (NPN) 3-wire (PNP) 24 V IC circuit 16 20 25 32 5 V, 12 V Diagnostic
F7BWV F7BAV 200 V 100 V 12 V Relay, PLC 2-wire 24 V Connector 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC circuit Grommet 2-wire 12 V Connector Relay, PLC 3-wire (NPN) 3-wire (PNP) Yes 24 V Diagnostic indication (2-color indication) 5 V, 12 V IC circuit Grommet 2-wire Water resistant (2-color indication) 12 V 4-wire (NPN) With diagnostic output (2-color indication) 5 V, 12 V IC circuit
F7BWV F7BAV 200 V 100 V 12 V Relay, PLC 2-wire 24 V Connector 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC circuit Grommet 2-wire 12 V Connector Relay, PLC 3-wire (NPN) 3-wire (PNP) Yes 24 V Diagnostic indication (2-color indication) 5 V, 12 V IC circuit Grommet 2-wire Water resistant (2-color indication) 12 V 4-wire (NPN) With diagnostic output (2-color indication) 5 V, 12 V IC circuit
V V V V V KQ2H06-M5G1 V KQ2H06-01GS1 V V KQ2H08-01GS V V Male connector Stainless steel One-touch fittings KQ2S04-M5G1 V V V V V V V KQ2S06-M5G1 V V V KQ2S06-01GS1 V V KQ2S08-01GS V V Hexagon socket head male connector Male connector KQG2H04-M5 V V V KQG2H06-01S V V KQG2H08-01S V V One-touch fittings/ Stainless steel 316 KQG2S04-M5 V v V V V V V KQG2S06
Air operated Nil M6 x 1 (Option) M5 x 0.8 PV/V port size Applicable to only plug connector.
Note 2) Drain guide: G1/4 (applicable to AC25 to 60) AW + [S] + AFM AC20D to 40D AC10: M5 x 0.8 AC20: 1/8 AC25: 1/4 AC30: 1/4 AC40: 3/8 AC50: 3/8 AC55: 1/2 AC60: 1/2 AC10 to 60 AF + [T] + AR + AL T T-interface AC10B to 60B AF + [T] + AR Port size M5 01 02 03 04 06 10 M5 x 0.8 1/8 1/4 3/8 1/2 3/4 1 AC20C to 40C AF + AFM + [T] + AR AC20 to 40 AF + AR + AL + [V] AC20A to 40A AW + AL + [V] 3-
AC10 AC20 AC25 AC30 AC40 AC50 AC55 AC60 : M5 x 0.8 : 1/8 : 1/4 : 1/4 : 3/8 : 3/8 : 1/2 : 1/2 AC10 to 60 AF + [T] + AR + AL T T-interface AC10B to 60B AF + [T] + AR AC20C to 40C AF + AFM + [T] + AR AC20 to 50 AF + AR + AL + [V] AC20A to 40A AW + AL + [V] 3-port valve for V residual pressure AC20B to 50B AF + AR + [V] release AC20C to 40C AF + AFM + AR + [V] Accessories AC20D to 40D AW + AFM
Port size M5 x 0.8 Rc 1/8 Rc 1/4 Series Assembly part no.
L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time T = T1 + T2 + T3 + T4 [s] [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.
Combination of Options v: Possible X: Not possible Functional option F R P FR FP Adjuster option v v v v v v v (3) v (3) v (3) AS v v v X X X X AT v v v (3) X X X X A v X X X BS v v v X X X X BT v v X X X X X B v Note 3) For combination of buffer mechanism style and stroke adjuster at extension end style, the buffer stroke is shortened by the adjusted length with the stroke adjuster at extension
pressure exhaust 3 port valve 1/8 1/4 3/8 1/2 3/4 AW + AL + V V AF + AR + V AF + AFM + AR + V AW + AFM + V Note 1) If indicating more than one symbol, place the desired symbols in alphabetical order.
Symbol Size Tubing connection 001 Same diameter tubing Symbol Model Oval type Round type H Male connector v v S Hexagon socket head male connector v v F Female connector v v L Male elbow v v LU Branch male elbow v V Universal male elbow v v W Extended male elbow v v T Male branch tee v v Y Male run tee v v D Male delta union v v U Branch Y v UD Double branch Y v M5 M5 x 0.8 01 R1/8, Rc1