Rated Pressure Range: -0.1 to 2 MPa, Piping: NPT1/4, M5 Female, Bottom Ported, Input/Output: PNP Open Collector 2 Outputs, Analog Voltage Output, Auto-Shift, Option 1: -, Option 2: -, Option 3: -, X Options: -

Rated Pressure Range: -0.1 to 1 MPa, Piping: NPT1/4, M5 Female, Bottom Ported, Input/Output: PNP Open Collector 2 Outputs, Analog Voltage Output, Auto-Shift, Option 1: -, Option 2: -, Option 3: -, X Options: -

Rated Pressure Range: -0.1 to 2 MPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: Bottom Ported, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: Bottom Ported, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Pressure Range: H (-0.1 to 2 MPa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported)

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported)

Rated Pressure Range: -100 to 100 kPa, Piping: NPT1/4, M5 Female, Bottom Ported, Input/Output: PNP Open Collector 2 Outputs, Analog Voltage Output, Auto-Shift, Option 1: -, Option 2: -, Option 3: -, X Options: -

Rated Pressure Range: 1 to -101 kPa, Piping: NPT1/4, M5 Female, Bottom Ported, Input/Output: PNP Open Collector 2 Outputs, Analog Voltage Output, Auto-Shift, Option 1: -, Option 2: -, Option 3: -, X Options: -

ZP

-A22 ZPT125 50-(B/N/T)01-A22 ZPT125 75-(B/N/T)01-A22 ZPT125 100-(B/N/T)01-A22 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T3 25-(B/N/T)01 ZPB-T3 50-(B/N/T)01 ZPB-T3 75-(B/N/T)01 ZPB-T3 100-(B

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

HB HT HC N X A W K 2-plug H HA CB T 4-counterbore dia.

ISO Cylinder

W1 H Symbol: A19 Symbol: A18 Symbol: A17 Symbol: A16 DA AL MM 30 MM 30 MM 30 MM 30 H A H A H A A C H Symbol: A23 Symbol: A22 Symbol: A21 Symbol: A20 DA 30 30 L RD MM MM 30 DA MM 30 DB DB T A H A T C B A H A L K H W H Symbol: A27 Symbol: A26 Symbol: A25 Symbol: A24 DA 30 MM DA 30 MM MM MM AL H LB K A L A H AL H AL L K H Symbol: A30 Symbol: A29 Symbol: A28 DA 30 30 MM 30 MM L W W A L H

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Combination of [B] and [K] is not possible.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Combination of [B] and [K] is not possible.

Modular F.R.L. Unit

Unit AC10B to 60B Dimensions A AC10B, 20B Pressure gauge port size F P E K Q N B C G G OUT IN T T K H Pressure gauge (Option) J L Square embedded type pressure gauge (Option) Port size M Min. clearance for maintenance Regulator Air filter Drain D AC25B, 30B, 40B, 50B, 55B, 60B A Pressure gauge port size F P E K N Q G G B C IN OUT K Pressure gauge (Option) J L Square embedded type pressure

rep-modular-e

(AR20(K)/25(K)/30(K)/40(K)) AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR20(K)/25(K)/30(K)/40(K) Hook spanner Nominal Tightening torque 2.0 0.2 Nm 2.5 0.2 Nm 3.5 0.3 Nm 4.0 0.4 Nm AR20(K) AR25(K) AR30(K) AR40(K) AR20(K) AR25(K) AR30(K) AR40(K) 34/38 40/42 52/55 52/55 Assembly (Bracket assembly) 1) Mount the bracket to the product.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

(AR20(K)/25(K)/30(K)/40(K)) AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR20(K)/25(K)/30(K)/40(K) Hook spanner Nominal Tightening torque 2.0 0.2 Nm 2.5 0.2 Nm 3.5 0.3 Nm 4.0 0.4 Nm AR20(K) AR25(K) AR30(K) AR40(K) AR20(K) AR25(K) AR30(K) AR40(K) 34/38 40/42 52/55 52/55 Assembly (Bracket assembly) 1) Mount the bracket to the product.

XL

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

0.4

) P kit Flat ribbon cable connector (26P) J/G kit T kit Terminal block (VQ1000, 24 terminals) T kit Terminal block (VQ2000) M kit Stations L kit (VQ1000/2000): 3.

Tie-rod Type Hydraulic Cylinder

T 2 x Rc P Cushion adjustment screw 4 x J GA Air release GA V V Width across flats G Width across flats G MM MM R (max.) d W W D d E E D M MA a a M MA F NA NA F K A A K C H + Stroke S + Stroke H B ZZ + 2 strokes (mm) Bore size (mm) B C A a d E D F G GA J K M MA MM NA P R S T V W H ZZ 0 0.018 0 0.021 0 0.021 0 0.021 0 0.025 0 0.025 0 0.025 0 0.062 0 0.062 0 0.074 0 0.074 0 0.074 0 0.074 0

Single Axis Electric Actuator Series LJ1H

Nil W Axial Right Left Top Bottom F R L T B Cable length Motor specification 2m 3m 4m 5m 2 3 4 5 Motor output Standard motor Matsushita Electric Industrial Co., Ltd.