Clean Regulator

Note that the products used for the port size A2 or A3 are not available at SMC.

SI unit for EtherNet/IP TM

IP address setting The IP address is set either using the manual setting of the IP address X/Y switch, or by remote control (with the IP address X switch set to "000"). When setting the IP address by remote control, first obtain the IP address through the BOOTP/DHCP Server, then select the Disable DHCP button to hold the IP address. 2.

ZSE F/ISE

ZSM PF2 IF Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Data Special fitting types are used in semiconductor production equipment (Metal gasket seal fittings) Leak rate: 1 x 10 10 Pa.m3/s ZSE/ISE60(F)-A2 ZSE/ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (Metal gasket seal fittings

Series AS-FM/AS-M/ASD-FM

H (width across flats) D3 D3 L5 A1 L5 A1 A2 D1 D1 A2 T T Inch sizes L4 L5 A1 A2 M1 Max.

AS-FG/ASD-FG

A1 D1 L5 D1 A2 T T Metric size L4 L5 A1 A2 M1 Max.

F/ISE

Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations

PSE540/560

Y, Z directions, for 2 hours each (De-energized) 500 m/s2 in X, Y, Z directions, 3 times each (De-energized) Impact resistance Temperature characteristics 2% F.S. or less (0 to 50C, based on 25C), 3% F.S. or less (10 to 60C, based on 25C) Piping Specifications Model 01 02 N01 N02 C01 A2 B2 R 1/8 R 1/4 NPT 1/8 NPT 1/4 Port size M5 x 0.8 Rc 1/8 URJ 1/4 TSJ 1/4 M5 x 0.8 M5 x 0.8 M5 x 0.8 Case

Digital Flow Switch

A2 Bracket B (Horizontal mounting) Part no. Option Note ZS-28-CA-4 Sensor connector For PF3A7H ZS-46-A1 Bracket A Tapping screw: Nominal size 3 x 8 L (2 pcs.) ZS-46-A2 Bracket B Tapping screw: Nominal size 3 x 8 L (2 pcs.)

PFG3x.eng

Troubleshooting Danger: Self tapping screws: Nominal size 3 x 8L Self tapping screws: Nominal size 3 x 8L When the products with a units selection 1 DC(+) Error indication function Brown DC(+) Operator When other than [USEr] is selected, press the button to move on to the display unit setting.

ZSE30A(F)/ISE30A

n pcs. + 3.5 x (n pcs. 1) 31 0 0.4 31 0 0.4 4 x R2 or less 4 x R2 or less 24 or more Multiple (2 pcs. or more) vertical mounting 31 0 0.4 24 or more 31 x n pcs. + 3.5 x (n pcs. 1) 4 x R2 or less 40 ZSE30A(F)/ISE30A Series 2-Color Display High-Precision Digital Pressure Switch The F in ( ) shows the function code number.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

With gasket is provided as standard. 1/8, 1/4 standard 3/8 standard 1/2 standard Port size Symbol Cylinder side In the side of solenoid valve M5 01 M5 x 0.8 R 1/8 M5 x 0.8 Rc 1/8 Rc 1/4 Note 1) Elbow 02 R 1/4 Rc 3/8 Note 2) 03 04 F01 Rc 3/8 Rc 1/2 G 1/8 G 1/4 Note 1) R 3/8 R 1/2 R 1/8 F02 R 1/4 G 3/8 Note 2) Caution Control F03 F04 U10/32 N01 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 Note 1)

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Seal NBR O-ring NBR 15-9-86 13 Dual Speed Controller Adjustable by Flat Head Screwdriver With One-touch Fitting Dimensions Metric size L2 L3 Applicable tubing O.D. d D1 M1 L6 D2 L1 D4 L4 AS H ASP (Hexagon width across flats) ASN D3 AQ D4 ASV A1 L5 AK A2 L6 ASS ASR ASF T Metric Size A1 A2 L4 L5 L6 L3 D2 D3 D4 L1 Model H L2 D1 d T M1 ASD230F-M5-04D 17.5 29.4 9.3 4 12.9 30.7 31 0.7 9.6 10

CEx-OMQ0011

ML2B32 15N Va 0.25m/s 0.5MPa L1 0.05m L2 0.05m W W 1 L L1 W W W M We M3 V M1 V <> W max=60N( Va P 19) a1= W = 15 =0.25 W max 60 M 2 max=2Nm( Va P 19) a2= M = 0.75 =0.375 M max 2 <> We=1.410VaW=1.4100.2515=52.2N M max=3.5Nm( V=1.4Va) M 3 WeL 1 =52.50.05 1 =0.88Nm 3 3 a3= M 3 = 0.88 =0.25 M 3max 3.5 M max=12Nm( V=1.4Va) M 1 WeL 1 1 =52.50.05 1 =0.88Nm 3 3 a4= M 1 =

KB

0.8 M6 X 1 M5 X 0.8 M6 X 1 H (Hex.)

This is a legacy product, and replaced byISE20C-T-A2-W-X502, SWITCH ASSEMBLY, INSTRUMENTATION, ISE40/50/60 PRESSURE SWITCH, DX, ISE40/50/60 1/4 (MISC.

This is a legacy product, and replaced byZSE20CF-T-A2-W, SWITCH ASSEMBLY, VACUUM SERIES, ZSE40/50/60 VACUUM SWITCH, KX, ZSE40/50/60 1/4 PORTED, .31027 lb, ModelRated pressure rangeSet pressure rangeWithstand pressureWetted parts materialApplicable fluidPort sizePower supply voltageCurrent consumption--Switch outputRepeatabilityHysteresisAnalog outputAuto-shift inputDisplayDisplay

This is a legacy product, and replaced byZSE20CF-R-A2-W, SWITCH ASSEMBLY, VACUUM SERIES, ZSE40/50/60 VACUUM SWITCH, KX, ZSE40/50/60 1/4 PORTED, .37538 lb, ModelRated pressure rangeSet pressure rangeWithstand pressureWetted parts materialApplicable fluidPort sizePower supply voltageCurrent consumption--Switch outputRepeatabilityHysteresisAnalog outputAuto-shift inputDisplayDisplay

Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A2 (Bracket B, Horizontal Mounting), Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A2 (Bracket B, Horizontal Mounting), Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate)