Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS 1F-D Series R 3/8 R 1/2 10-32 UNF NPT 1/8 0 1 Meter-out Meter-in Be sure to read this before handling the products.
Port size Type Symbol Cylinder side In the side of solenoid valve M5 01 02 03 04 F01 F02 F03 F04 U10/32 N01 N02 N03 N04 Elbow 2 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 G 1/8 G 1/4 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Control 0 1 Meter-out Meter-in 15-9-89 16 Construction AS2200
22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and
PSE56-C01 24 B PSE56-A2 A B Model 8.2 12 9.2 12.2 15.5 9.5 A PSE56-01 PSE56-02 PSE56-N01 PSE56-N02 PSE56-C01 PSE56-A2 PSE56-B2 R 1/8 R 1/4 NPT 1/8 NPT 1/4 Rc 1/8 URJ 1/4 TSJ 1/4 24 B PSE56-B2 A 24 B 16-3-28 7 Series PSE Specific Product Precautions 1 Be sure to read before handling. Pressure Sensor Handling Air Supply Warning Warning ZSE ISE 1.
22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction None Nil TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.
22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.
D L2 L1 A2 KBL1-R1S KBL2-R1S KBL2-R2S KBL2-R3S KBL3-R2S KBL3-R3S KBL3-R4S KBL4-R3S KBL4-R4S 13.6 27.0 30.5 31.5 26.5 37.5 32.5 31.0 41.5 18 38.0 15.0 14.8 23.2 27.3 26.5 32.6 29.3 47.6 57.6 48.8 R(PT)1 8 43.5 46.5 42.0 56.0 R(PT)1 4 R(PT) 3 8 R(PT)1 4 R(PT) 3 8 R(PT)1 2 R(PT) 3 8 R(PT) 1 2 17 17.6 15.5 19 19 25.2 22 18.0 51.5 22 61.5 57.5 19.5 36.0 24 27.0 24 Reference dimensions after R
L2 A1 A2 D L1 KBL1-R1S KBL2-R1S KBL2-R2S KBL2-R3S KBL3-R2S KBL3-R3S KBL3-R4S KBL4-R3S KBL4-R4S 18 38.0 27.0 30.5 31.5 26.5 37.5 32.5 31.0 41.5 15.0 14.8 23.2 27.3 26.5 32.6 29.3 47.6 57.6 48.8 13.6 R(PT)1 8 43.5 46.5 42.0 56.0 R(PT)1 4 R(PT)3 8 R(PT)1 4 R(PT) 3 8 R(PT)1 2 R(PT) 3 8 R(PT)1 2 15.5 17 19 17.6 19 22 25.2 18.0 51.5 22 61.5 57.5 19.5 36.0 24 24 27.0 Reference dimensions after R
Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Mounting Position: R (Right Side Parallel), Motor Type: S4 (400W Output, Incremental Encoder), Lead: A (LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 250mm, Motor Option: B (w/Lock), Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Cable Type: R (Robotic Cable,
Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: 01 (R 1/8), Lead Wire: w/o Lead Wire, Bracket: A2 (Bracket B, Horizontal Mounting)
Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A2 (Bracket B, Horizontal Mounting)
Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: 01 (R 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A2 (Bracket B, Horizontal Mounting)
Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: 01 (R 1/8), Lead Wire: w/o Lead Wire, Bracket: A2 (Bracket B, Horizontal Mounting)
Size: 32, Motor Mounting: R (Right Side Parallel Type), Motor Type: S3 [AC Servo Motor, (Incremental Encoder), Output 200W], Lead: C [LEY25, 3mm; LEY32, 4(5)mm], Stroke: 200mm, Motor Option: B (w/Lock), Rod End: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: Ends Tapped (Standard), Actuator Cable Type: R (Robot Cable, Flexible Cable), Cable Length: 5 (5m), Controller Type: A2
Accuracy: Basic, Motor Mounting Position: R (Right Side Parallel), Motor Type: S4 [AC Servo Motor, (Incremental Encoder), 400W], Lead: C (5mm), Stroke: 100mm, Dust/Drip Proof: IP5x (Dust Proof Specification), Motor Option: B (w/Lock), Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut is Included), Mounting: Ends Tapped/Body Bottom Tapped (Standard), Cable Type: R (Robotic Cable, Flexible
Accuracy: H (High Precision), Motor Mounting Position: R (Right Side Parallel), Motor Type: S4 [AC Servo Motor, (Incremental Encoder), 400W], Lead: A (20mm), Stroke: 400mm, Dust/Drip Proof: IP5x (Dust Proof Specification), Motor Option: B (w/Lock), Rod End Thread: Rod End Female Thread, Mounting: F (Rod Flange), Cable Type: R (Robotic Cable, Flexible Cable), Cable Length: A (10m), Driver
Accuracy: Basic, Motor Mounting Position: R (Right Side Parallel), Motor Type: S4 [AC Servo Motor, (Incremental Encoder), 400W], Lead: B (10mm), Stroke: 800mm, Dust/Drip Proof: IP5x (Dust Proof Specification), Motor Option: B (w/Lock), Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut is Included), Mounting: Ends Tapped/Body Bottom Tapped (Standard), Cable Type: R (Robotic Cable, Flexible
Accuracy: Basic, Motor Mounting Position: R (Right Side Parallel), Motor Type: S4 [AC Servo Motor, (Incremental Encoder), 400W], Lead: L (2.86mm), Stroke: 400mm, Dust/Drip Proof: IP5x (Dust Proof Specification), Motor Option: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped/Body Bottom Tapped (Standard), Cable Type: R (Robotic Cable, Flexible Cable), Cable Length: 5m
Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Mounting Position: R (Right Side Parallel), Motor Type: S4 (400W Output, Incremental Encoder), Lead: A (LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 700mm, Motor Option: B (w/Lock), Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Cable Type: R (Robotic Cable,
Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Mounting Position: R (Right Side Parallel), Motor Type: S4 (400W Output, Incremental Encoder), Lead: A (LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 650mm, Motor Option: w/o Option, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Cable Type: R (Robotic Cable,