0.4

4 VVQC1000-T0-1 Terminal block box housing assembly T kit VVQC1000-L25-0-1 L kit with 0.6 m lead wire !5 VVQC1000-L25-1-1 Lead wire housing assembly L kit with 1.5 m lead wire VVQC1000-L25-2-1 L kit with 3.0 m lead wire !6 VVQC1000-M26-1 Circular connector housing assembly M kit, 26 pins 586 VQC1000/2000 Series Plug-in Unit Base Mounted Manifold Assembly Part No.

EX120/121/122

Output unit How to Order EX510-FC 10 10.16 0.40 Cable length (L) 01 02 05 10 20 60 1 m 2 m 5 m 10 m 20 m 60 m Brown: +24 V Black: Communications + White: Communications Blue: 0 V L Note) (Reference: AWG18) Note) Branch cable length is a maximum of 20 m. Use the cable by cutting it into lengths of 20 m or shorter. w Branch connector (Unit 1 pc.)

ZP

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa : l @ l ., and for the L type it is 33 kPa :' l @' l .'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa ; l = l B, and for the L type it is 47 kPa ;' l =' l B'.

AC Servo Motor Driver (Network card type ）

-L MR-PWS1CBL M-A1-H MR-PWS2CBL03M-A1-L LE-CSM-SA LE-CSM-SB 1) Driver Servo amplifier Servo motor HF-MP HF-KP or LE-MR-PWS1CBL M-A2-L MR-PWS1CBL M-A2-H MR-PWS2CBL03M-A2-L LE-CSM-RA LE-CSM-RB CNP3 connector supplied with servo amplifier 1) driver Servo Motor LE-Servo motor HF-MP HF-KP CNP3 Cable model 1) For motor power supply connector LE-CSM-SA Connector: JN4FT04SJ1-R Signal layout Hood,

VZS

DOZ is not available. 2 9 Other Option Electrical entry 3 position closed center G: Grommet Lead wire length: 300 mm L: L plug connector With lead wire LN: L plug connector Without lead wire LO: L plug connector Without connector D: DIN terminal 3 3 position exhaust center 4 M: M plug connector With lead wire MN: M plug connector Without lead wire MO: M plug connector Without connector

Vacuum Pad

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa : l @ l ., and for the L type it is 33 kPa :' l @' l .'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa ; l = l B, and for the L type it is 47 kPa ;' l =' l B'.

Compact Cylinder

The length of wiring to the load is 5 m or more. 3. The load voltage is 100 VAC. The contact life may be shortened. (Due to permanent energizing conditions.) L D-M9P (Example) Nil Lead wire length 0.5 m 3 m L 5 m Z Note 1) Applicable auto switch with 5 m lead wire Z Solid state switch: Manufactured upon receipt of order as standard.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Lead wire length symbols: 0.5 m Nil (Example) A93 3 m L (Example) Y59BL 5 m Z (Example) F9NWZ Since there are other applicable auto switches than listed, refer to page 8-15-44 for details.

ZX

Nil Grommet (0.6 m) L Grommet (3 m) Nil Y M5 x 0.8 M6 x 1 (Option) C Connector (0.6 m) Filter case CL Connector (3 m) Caution 1. The case is made of polycarbonate.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

-L MR-PWS1CBL M-A1-H MR-PWS2CBL03M-A1-L LE-CSM-SA LE-CSM-SB 1) Driver Servo amplifier Servo motor HF-MP HF-KP or LE-MR-PWS1CBL M-A2-L MR-PWS1CBL M-A2-H MR-PWS2CBL03M-A2-L LE-CSM-RA LE-CSM-RB CNP3 connector supplied with servo amplifier 1) driver Servo Motor LE-Servo motor HF-MP HF-KP CNP3 Cable model 1) For motor power supply connector LE-CSM-SA Connector: JN4FT04SJ1-R Signal layout Hood,

XL

Flange type Electrical entry Symbol Type Applicable flange size Nil 16, 25, 40, 50, 63, 80 63, 80 Grommet (lead wire length 300mm) Grommet (lead wire length 600mm) L type plug connector M type plug connector G H L M D KF(NW) K(DN) Solenoid valve direction Left flange surface K L Solenoid valve action Rear flange surface Right flange surface Nil 2 position single 2 position double M W Note

SQ1000/2000

L RUN SERIAL UNIT L ERR.

2 Phase Stepper Motor/Without Motor Brake Series LXS

Allowable Moment (Nm) Allowable static moment Allowable dynamic moment 15.7 7.84 Pitching Yawing LXS Model Load movement direction 1000 m : Transfer load (kg) L : Overhang to work piece center of gravity (mm) a : Work piece acceleration (mm/sec) Me: Dynamic moment L1 (mm) L3 (mm) a = 1000 to 3000 Pitching a m 500 Mep L1 5 9 0 Transfer load m (kg) 1000 a = 1000 to 3000 Yawing 500 m Mey a L3

High Vacuum Angle Valve, XL Series

Flange type Electrical entry Symbol Type Applicable flange size Nil 16, 25, 40, 50, 63, 80 63, 80 Grommet (lead wire length 300mm) Grommet (lead wire length 600mm) L type plug connector M type plug connector G H L M D KF(NW) K(DN) Solenoid valve direction Left flange surface K L Solenoid valve action Rear flange surface Right flange surface Nil 2 position single 2 position double M W Note

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

plug connector (L) (A) 4 (B) 2 VQZ3000 (standard) 12V DC 24V DC 5 (R1) 1 (P) 3 (R2) Base Mounted Non-locking push style (Flush) 3 Position pressure center 0.9 1.2 (A) 4 (B) 2 L plug connector (L) (Option) 100V AC 200V AC 110V AC 220V AC 5 (R1) M plug connector (M) 1 (P) 3 (R2) VQZ1000 M plug connector (M) 0.2 0.35 (A) 4 1 (P) 5 (R) DIN connector (Y) DIN connector (YZ) VQZ2000 N.C.

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

For open collector method, it is 2 m or less. 103 Series LECSA Series LECSB Options Motor cable, Lock cable, Encoder cable LE-CSM-: Motor cable LE CS M S 5 A (13.7) Direction of connector Motor type (30) L A B S Axis side AC servo motor Counter axis side LE-CSB-: Lock cable Cable length (L) [m] Cable contents 2 5 M B E 2 5 Motor cable (11.8) Lock cable A 10 Encoder cable L (29.6) Cable type

7

b a OUT IN 18 2 x P Port size d e (D) L K f J F I f 2 x P Port size d e Grommet (with surge voltage suppressor) C 300 U E A B T OUT IN M I J F 2 x P Port size L K (D) DIN terminal U V E Cable 6 to 12 30 G1/2 (44) 31.5 T A B IN OUT M 2 x P Port size (D) L K I F J (mm) Electrical entry M Model Grommet Grommet (with surge C37, Port size P A B C E F I J K L D voltage suppressor) DIN terminal

VFR

Cable length VVFS2000-30A-1 VVFS2000-30A-2 VVFS2000-30A-3 VVFS2000-30A-4 VVFS2000-30A-5 VVFS2000-30A-6 VVFS2000-30A-7 1.5 m 3 m 5 m 7 m 10 m 15 m 20 m 1.5 m 3 m 5 m 8 m 10 m 15 m 30 m VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 VVZS3000-21A-5 VVZS3000-21A-6 VVZS3000-21A-7 Plug 206837-1 1 pc. Cable clamp 206138-1 1 pc. Socket 66101-2 24 pcs.

Digital Flow Switches Series PF2A

How to Order Integrated Display Type M PF2A7 10 01 27 Flow rate range 1 to 10 l/min 5 to 50 l/min 10 to 100 l/min 20 to 200 l/min 50 to 500 l/min 10 50 11 21 51 Thread type Unit specification Nil M With unit switching function Fixed SI unit Note) Nil N F Lead wire (Refer to page 35.)

Series IDG

50M IDG30HM, 50HM IDG30LM, 50LM (B) K (D) C L H F 37 J IN OUT M (E) (G) M5 female threads Drain discharge With drain guide With float type auto drain (P) (N) N.C.: Gray N.O.: Black Thread size: 1/4 (without valve mechanism) Applicable tube O.D.: 10 (NPT threads: 3/8 inch) Width across flats 19 With float type auto drain With drain guide Port size A B C D E F G H J K L M N Model P 150 146