No ventilation holes on the right or left sides make tight fitting installation possible, since contact can be made with other equipment or walls.Cooling method: water-cooled refrigeration, Circulation fluid: clear water, deionized water, Main tank capacity: approximately 15 , Circulating fluid recovery tank: approximately 16, cable with CN3 HRZ010-WS-A1-x005, REFRIGERATED THERMO-COOLER

Use in combination with the AF series to meet your clean room filtration requirements., AFM 3/8INCH MODULAR (NPT), AIRLINE EQUIPMENT, AFM MASS PRO, EC, AFM 3/8INCH MODULAR (NPT), 0.539 lb, ModelStandard specificationsOptional specifications Bracket mountWith auto drain PABCDEGJMNQRSTUVBAFM30-A/AFD30-A1/4, 3/853115.11/426.7305026.74140236.58532.330156.8

Model: 520 (2.0 to 16.0 L/min), Thread Type: N (NPT), Port Size: 04 (1/2), I/O Specifications: A1 (IN1: 1-5 VDC, IN2: External Control Input, OUT1: 1-5 VDC), Lead Wire: C (Lead Wire with M12 connector, 3m, Bracket: N (None), Operation Manual: Z (with Operation Manual)

Input/Output: A1 (IN1: Common for NPN and PNP / INA: Analogue 1 to 5 V / OUT1: NPN / OUTA: Analogue 1 to 5 V)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A1 (Bracket A, Vertical Mounting

Rated Vacuum Range: -101 to 0 kPa, Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A1 (Bracket A, Vertical Mounting)

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: IO-Link/Switch: 1 Output (PNP or NPN), Switching Type for Switch Output, Unit Specification: M (SI Unit Only), Piping Specification: C01 (Rc1/8), Piping Direction: Rear Ported, Lead Wire: w/o Lead Wire, Bracket: A1 (Bracket A)

Accuracy: H (High-precision Type), Size: 63, Motor Type: S3 [AC Servo Motor (Incremental Encoder) 200W], Lead (mm): A (20), Stroke (mm): 790, Motor Option: B (w/Lock), Cable Type: S (Standard Cable), Cable Length: A (10m), Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse Input)

Size: 25, Bearing Type: M (Sliding Bearing), Motor Mounting Position: Top Mounting, Motor Type: S2 (AC Servo Motor, Incremental Encoder, Output 100W), Lead: A (LEY25 12mm; LEY32 16mm; LEY32 Top Mount 20mm), Stroke: 50mm, Motor Option: w/o Option, Guide Option: w/o Guide, Cable Type: R (Robotic Cable - Flexible Cable), Cable Length: 5 (5m), Driver Type: A1 (LECSA1-S, 100~120V, Incremental,

Size: 25, Bearing Type: L (Ball Bushing Bearing), Motor Mounting Position: D (In-line), Motor Type: S2 (AC Servo Motor, Incremental Encoder, Output 100W), Lead: A (LEY25 12mm; LEY32 16mm; LEY32 Top Mount 20mm), Stroke: 200mm, Motor Option: B (with Lock), Guide Option: w/o Guide, Cable Type: R (Robotic Cable - Flexible Cable), Cable Length: 2 (2m), Driver Type: A1 (LECSA1-S, 100~120V, Incremental

Size: 32, Bearing Type: M (Sliding Bearing), Motor Mounting Position: D (In-line), Motor Type: S3 (AC Servo Motor, Incremental Encoder, Output 200W), Lead: C (LEY25 3mm; LEY32 4mm; LEY32 Top Mount 5mm), Stroke: 50mm, Motor Option: B (with Lock), Guide Option: F (with Grease Holding Function), Cable Type: R (Robotic Cable - Flexible Cable), Cable Length: 5 (5m), Driver Type: A1 (LECSA1-S,

Size: 25, Bearing Type: M (Sliding Bearing), Motor Mounting Position: Top Mounting, Motor Type: S2 (AC Servo Motor, Incremental Encoder, Output 100W), Lead: C (LEY25 3mm; LEY32 4mm; LEY32 Top Mount 5mm), Stroke: 100mm, Motor Option: B (with Lock), Guide Option: F (with Grease Holding Function), Cable Type: S (Standard Cable), Cable Length: 2 (2m), Driver Type: A1 (LECSA1-S, 100~120V, Incremental

Size: 25, Bearing Type: M (Sliding Bearing), Motor Mounting Position: D (In-line), Motor Type: S2 (AC Servo Motor, Incremental Encoder, Output 100W), Lead: B (LEY25 6mm; LEY32 8mm; LEY32 Top Mount 10mm), Stroke: 50mm, Motor Option: w/o Option, Guide Option: F (with Grease Holding Function), Cable Type: S (Standard Cable), Cable Length: 5 (5m), Driver Type: A1 (LECSA1-S, 100~120V, Incremental

Size: 25, Bearing Type: L (Ball Bushing Bearing), Motor Mounting Position: Top Mounting, Motor Type: S2 (AC Servo Motor, Incremental Encoder, Output 100W), Lead: C (LEY25 3mm; LEY32 4mm; LEY32 Top Mount 5mm), Stroke: 100mm, Motor Option: w/o Option, Guide Option: w/o Guide, Cable Type: S (Standard Cable), Cable Length: 2 (2m), Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse Input)

Size: 25, Bearing Type: L (Ball Bushing Bearing), Motor Mounting Position: Top Mounting, Motor Type: S2 (AC Servo Motor, Incremental Encoder, Output 100W), Lead: A (LEY25 12mm; LEY32 16mm; LEY32 Top Mount 20mm), Stroke: 200mm, Motor Option: w/o Option, Guide Option: w/o Guide, Cable Type: S (Standard Cable), Cable Length: 5 (5m), Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse Input

Size: 25, Bearing Type: M (Sliding Bearing), Motor Mounting Position: Top Mounting, Motor Type: S2 (AC Servo Motor, Incremental Encoder, Output 100W), Lead: B (LEY25 6mm; LEY32 8mm; LEY32 Top Mount 10mm), Stroke: 300mm, Motor Option: w/o Option, Guide Option: F (with Grease Holding Function), Cable Type: R (Robotic Cable - Flexible Cable), Cable Length: 2 (2m), Driver Type: A1 (LECSA1-S,

Size: 32, Bearing Type: M (Sliding Bearing), Motor Mounting Position: D (In-line), Motor Type: S3 (AC Servo Motor, Incremental Encoder, Output 200W), Lead: A (LEY25 12mm; LEY32 16mm; LEY32 Top Mount 20mm), Stroke: 300mm, Motor Option: w/o Option, Guide Option: w/o Guide, Cable Type: S (Standard Cable), Cable Length: 2 (2m), Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse Input)

Size: 32, Bearing Type: M (Sliding Bearing), Motor Mounting Position: Top Mounting, Motor Type: S3 (AC Servo Motor, Incremental Encoder, Output 200W), Lead: B (LEY25 6mm; LEY32 8mm; LEY32 Top Mount 10mm), Stroke: 200mm, Motor Option: w/o Option, Guide Option: w/o Guide, Cable Type: S (Standard Cable), Cable Length: 2 (2m), Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse Input), I/

Size: 32, Bearing Type: L (Ball Bushing Bearing), Motor Mounting Position: D (In-line), Motor Type: S3 (AC Servo Motor, Incremental Encoder, Output 200W), Lead: C (LEY25 3mm; LEY32 4mm; LEY32 Top Mount 5mm), Stroke: 30mm, Motor Option: w/o Option, Guide Option: w/o Guide, Cable Type: S (Standard Cable), Cable Length: 5 (5m), Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse Input),

Size: 32, Bearing Type: L (Ball Bushing Bearing), Motor Mounting Position: D (In-line), Motor Type: S3 (AC Servo Motor, Incremental Encoder, Output 200W), Lead: C (LEY25 3mm; LEY32 4mm; LEY32 Top Mount 5mm), Stroke: 300mm, Motor Option: w/o Option, Guide Option: w/o Guide, Cable Type: S (Standard Cable), Cable Length: 5 (5m), Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse Input),