Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

MTS Air pressure supplied from A operates on both surfaces q and w. (Extension) MY q w A B Piping is concentrated in the head cover. CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX Air pressure supplied from B operates on surfaces e.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

8 q y !0 !4 !9 r !1 @0 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com @2 @5 o @4 @3 !2 Component Parts No. Description Spring pin Seal ring Bearing Inner wiper No.

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

(Light ON) One auto switch One position, any of q, w Detection combinations and e can be detected. Two auto switches Two positions of A Pattern B q, w and e can C be detected. Step 1) Fully close the fingers. Step 1) Position fingers for gripping a workpiece. Step 1) Fully open the fingers.

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

0.5 depth 3 +0.030 0 0.05 D B 9.5 1 3.5 20 14 13 18 C 6 +0.030 0 depth 2.5 2.5 Width across flats 6 E 5 6 5 Prepared hole diameter 3.3 2-M4 x 0.7 Piping port 2-M3 x 0.5 (Plug: M-3P) F 6 QL 13.5 17 0.05 Stroke: S M 2 M4 x 0.7 Mounting base side B D 7 5 2-M3 x 0.5 Piping port Y J 3 M3 x 0.5 Vacuum suction port Z Max. 9.5 (Rubber stopper) 2.4 depth 2 2.5 3.5 +0.030 0 7 +0.030 0 depth 2 2.5 Q

Compact Type

1 e q !3 y !1 q @7 CXSJM20 to 32 CXSJL20 to 32 @5 i u !7 o !5 t !6 r !9 !8 @2 r !9 !8 @2 !6 o i u !7 !5 t #0 Rod cover Head cover Rod cover Head cover Parts List: Standard Piping No. Description Material No.

Magnetically Coupled Rodless Cylinder

2 y r i q !9 !8 @2 @0 @3 @5 @8 @7 o u !7 t CY3R15, 20 CY3R15 Parts list No. Description No.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

w e q w VQC SQ VQ0 4 (B) 2 4 (B) 2 (A) (A) VQ4151 VQ4150 VQ4 VQ5 1 (P) (R1) (R2) 3 5 1 (P) (R1) (R2) 3 5 VQZ e q w e q w VQD 4 (B) 2 4 (B) 2 (A) (A) VQ4250 VQ4251 1 (P) (R1) (R2) 3 5 1 (P) (R1) (R2) 3 5 e q w r e q w r 4 (B) 2 4 (B) 2 (A) (A) VQ4351 VQ4350 1 (P) (R1) (R2) 3 5 1 (P) (R1) (R2) 3 5 4 (B) 2 (A) 4 (B) 2 (A) VQ4451 VQ4450 1 (P) (R1) (R2) 3 5 1 (P) (R1) (R2) 3 5 4 (B) 2 (A) 4 (B

CJ2X/CUX/CQSX/CQ2X/CM2X

CQSX/CQ2X/CM2X 10 to 16 10 to 32 12 to 25 32 to 100 20 to 40 RE A B Air Cylinder Series CJ2X Page Minimum operating piston speed (mm/s) Bore size (mm) Minimum operating pressure (MPa) REC 10, 16 0.06 1 CX 10-3-6 CY MQQ M Free Mount Cylinder Series CUX Bore size (mm) Minimum operating pressure (MPa) Minimum operating piston speed (mm/s) RHC 10, 16 0.06 1 MK(2) 10-3-8 20, 25, 32 0.05 0.5 RS Q

Vacuum Module Series ZX

Ordering example) ZX1051-K15LOZ-EC(-Q) 1 pc. VJ10-20-4A-6 2 pcs. ZY 6 4A 20 VJ10 6 10 15 20 25 30 0.6 m 5A 20 ZS ZF For ZSE3 1 m (For 100 VAC) 1.5 m Note) If ordering a vacuum switch with 3 m lead wire, specify both the vacuum unit switch and the 3 m lead wire with connector part numbers. Ordering example) ZX1051-K15LOECN(-Q) 1 pc. VJ10-20-4A-6 2 pcs.

VQC

How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 + 0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q: Air flow rate [l/min (ANR)] S: Effective area [mm] P: Pressure drop rate (P1P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Correction for different air temperatures

17

BQ6-032S Auto switch mounting bracket fitting parts lineup/Weight q Hexagon socket head cap screw (M2.5 x 6 L) w Auto switch mounting bracket (nut) Weight: 5 g Surfaces with auto switch mounting slot Surfaces with auto switch mounting slot Auto switch mounting surfaces q Insert the protrusion on the bottom of the auto switch into the mating part of the auto switch mounting bracket and fix

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

L n Dimensions 9 288 477 8 263 452 L1 L2 10 313 502 7 238 427 11 338 527 6 213 402 12 363 552 5 188 377 13 388 577 4 163 352 14 413 602 3 138 327 15 438 627 2 113 302 16 463 652 2-5-29 Series VQ4000 Construction Plug-in Unit e q w e q w Metal seal type Rubber seal type (A) 4 (B) 2 42 (A)(B) VQ4101 VQ4100 1 (P) 5 (R1) (R2) 3 1 (P) 5 (R1) (R2) 3 e q w e q w (B) (A) 42 4 (B) 2 (A) VQ4200 VQ4201

Compact Type Dual-Rod Cylinder Series CXSJ

1 e q !3 y !1 q @7 CXSJM20 to 32 CXSJL20 to 32 @5 i u !7 o !5 t !6 r !9 !8 @2 r !9 !8 @2 !6 o i u !7 !5 t #0 Rod cover Head cover Rod cover Head cover Parts List: Standard Piping No. Description Material No.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

2 y r i q !9 !8 @2 @0 @3 @5 @8 @7 o u !7 t CY3R15, 20 CY3R15 Parts list No. Description No.

Low Maintenance Filter Series FN1

q A (43) OUT IN e e 150 r B t 120 327 188 (519) w w 84 OUT 2-R 1 r IN 53 DRAIN G 1/4 Note Parts list Dimensions (mm) A B No.

Booster Relay Series IL100

9 q q !7 !7 IN OUT IN1 OUT1 !0 !6 !3 o !3 q !8 !6 IN2 OUT2 !8 !7 !6 o IL220 !3 r e !2 w u y i !9 !5 @1 OUT IN1 !1 q @2 @0 IN2 !4 q Component Parts Replacement Parts No. Description Material Note 1 Body Aluminum alloy Silver baking finish Model Order no. Contents IL201 KT-IL201 Set of left nos. u, i, o, !2, !3, !6, !7, !8, !9 IL211 KT-IL211 Set of left nos. u, i, o, !0, !2, !3, !6, !7, !

Gun Type Ionizer

and replacement of emitters 5 q Removal of nozzle w Removal of emitter q Turn counterclockwise. w Pull forward to remove. q Turn counterclockwise. w Pull forward to remove. 6 Bypass nozzle (Option) OSHA1910.242b compliant Even if the nozzle is obstructed, the main orifice pressure cannot exceed 30 psi (210 kPa). * Supply pressure: 0.5 MPa or less 180 Gun Type Ionizer IZG10 Series Application

Solid State Auto Switches

CE marking Precautions Caution D-A44C Relay, PLC 100 VAC 5 to 25 mA q Built-in 2.4 V or less (Up to 20 mA)/3.5 V or less (Up to 50 mA) Red LED illuminates when turned ON. CE marking 24 VDC (3) 5 to 50 mA 200 VAC 5 to 12.5 mA 1. Use cable whose O.D. is within the size in the figure to maintain water resistant performance. 2.

CJ2X/CUX/CQSX/CQ2X/CM2X

CQSX/CQ2X/CM2X 10 to 16 10 to 32 12 to 25 32 to 100 20 to 40 RE A B Air Cylinder Series CJ2X Page Minimum operating piston speed (mm/s) Bore size (mm) Minimum operating pressure (MPa) REC 10, 16 0.06 1 CX 10-3-6 CY MQQ M Free Mount Cylinder Series CUX Bore size (mm) Minimum operating pressure (MPa) Minimum operating piston speed (mm/s) RHC 10, 16 0.06 1 MK(2) 10-3-8 20, 25, 32 0.05 0.5 RS Q

NAAMS Standards Compliant

B) In the state of A), attach the upper hard stop and adjust shim q so that there is a space of about 0 mm between the upper hard stop and the hard stop. During this step, theoretically, there is no clamping force applied to the hard stop. C) In order to generate a clamping force from the state described in step B), insert an additional shim.