KS/KX

T VMG Applicable tubing Connection thread (With seal) Male Elbow: KXL (High speed) H (width across flats) Applicable tubing O.D.

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

The voltage drop will occur due to the internal circuit of S, Z and T types (with energy saving circuits). Allowable voltage fluctuations should be within the range below.

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

1 SRH MPa e SRP SMC t q SRF OUT IN ITV MC cartridge element u IC i Seperation element Flow hole A ITVH y Auto-drain type w ITVX !0 PVQ o r VY1 VBA VBAT AP100 Drain Port size 1 4 Drain Component Parts Replacement Parts No. Description AMR3000 AMR4000 AMR5000 AMR6000 Model Material Qty Part no. Description No.

AMR3000 to 6000

If it does not locked easily, turn the handle s l i g h t l y c l o c k w i s e o r counterclockwise; then, push it until the orange colored line is no longer visible.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

VEA 0.50 0.25 VY1 0.45 VBA VBAT 0.40 Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point AP100 0.30 0.20 0.25 0.20 0.15 0.10 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600 700 800 900 Flow rate (L/min (ANR)) Inlet pressure (MPa) 705 Series ARP20/30/40 Construction ARP20(K)/30(K)/40(K) ARP20K/30K/40K (With backflow function) r q 1 I N e A 2 OUT A IN OUT t

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

VBA VBAT Rc 1/2 0.50 0.25 AP100 0.45 0.40 Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point 0.30 0.20 0.25 0.20 0.15 0.10 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600 700 800 900 Flow rate (L/min (ANR)) Inlet pressure (MPa) 763 ARP20/30/40 Series Construction ARP20(K)/30(K)/40(K) ARP20K/30K/40K (With backflow function) r q 1 I N e A 2 OUT A IN OUT t

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

D F J K ARP20(K) ARP30(K) ARP40(K) 28.5 Note 2) 1/8, 1/4 1/8 40 98 27 28.5 M28 x 1 2 1/4, 3/8 1/8 53 117 29 29.5 M38 x 1.5 29.5 2.5 1/4, 3/8, 1/2 1/4 70 148 41 34 M42 x 1.5 34 1 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

T 4-J x E 0 -0.1 L Cylinder tube outer circumference: TC Hard chrome plated + special treatment WP X F GW GP 4-LD D QW PW 2 x 4-MM thread depth M W K G G Q + Stroke Z + Stroke (mm) Model B C CB D F G GP GW H HA HC HP HB HT K J x E A 10.5 181. 16.6 181. 5 33 31.5 32 30 171. 31 171. 2 4.2 171. 14 M5 x 0.8 x 7 12-CY3R15 19.5 19.5 21.6 191. 6 39 37.5 39 36 211. 38 241. 3 5.2 241. 11 M6 x 1 x

Flame Resistant

Dimensions L5 D4 Applicable tubing O.D. d H (Width across flats) A L4 D1 L3 D3 L1 M D2 T L2 [mm] Model T H D1 D2 D3 D4 L1 L2 L3 L4 L5 A M Weight [g] AS221F-G01-06W2D G1/8 12 13.2 14.2 14 7.2 23 31 17.6 39.2 1.2 34.7 17 26 AS221F-G01-08W2D 15.2 25.3 32.4 18.5 28 AS221F-G01-10W2D 18.5 32.1 39.2 21 30 AS221F-G02-06W2D G1/4 17 13.2 18.5 17 7.2 25.2 34.4 20.2 42.8 1.2 36.8 17 46 AS221F-G02-08W2D

7

9 t q @1 w e @0!4 @3 y !6 o u !7 @2 CK1C (Clevis width 12.5) @4 i !2 !0 !1 !3 !5 Component Parts MK No.

Shot Pin Cylinder

L CKZP 57 T 25 TF TF T 25 CKZP 71 Switch output display Bore size Retracted Extended Nil Yellow Red 71 71 mm R Red Yellow Port thread types TF G TN NPT Proximity switch T TURCK P P&F Stroke 25 25 mm 50 50 mm Proximity Switch Specifications Specifications Bore size 57 71 Manufacturer TURCK P&F Power supply voltage 10 to 30 VDC 10 to 30 VDC Fluid Air Output N.O., PNP N.O., PNP Maximum operating

SMC Pneumatic Clean Series

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

Series 10-MGF ø40, ø63, ø100 Guide Table

Fittings & Tubing Air Cylinders Rotary Actuators V D C D C E F H A + Stroke B + Stroke GB GA T X PP (Rc, NPT, G): Relief port 2 x P (Rc, NPT, G) Port for extension Port for retraction When the cylinder is extended KA: T-slot for hexagon bolt 4 x M K KB KC 6-K (6 positions) 10 10 M12 x 1.75 M10 x 1.5 M8 x 1.25 M Bore size Standard stroke (mm) GB D A 170 140 10 10 38 38 36.5 E B F KC 11 11

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

r cl cl en nt er er e tm e m nt nt is us u t u w C 0 us o 90 k o c lo o C l dj C C 19 dj se c Cl 1 A k A A wi e w oc ge dj k A is oc k ng dj u wi e Cl an st us se ro ra m r ta t ot m r d at ti n e n io on e n e on nt e nt tio nd r r a a ti n n g ta e 5 9 g ta e 9 ro 5 ro m m u im u im ax M ax M Note) The drawing shows the rotation range of the positioning pin hole.

SMC Pneumatic Clean Series

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

SMC

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

Compact Cylinder with Solenoid Valve/

Unit: Nm T Bore size (mm) Non-rotating accuracy 32 to 63 0.1 T Cylinder stroke (mm) Bore size (mm) + 15 20 25 30 35 40 45 50 75 100 5 10 32 40 50 63 0.66 1.06 0.59 0.96 1.70 3.90 0.53 0.88 1.56 3.62 0.49 0.81 1.45 3.37 0.45 0.75 1.35 3.15 0.42 0.70 1.26 2.96 0.39 0.65 1.19 2.80 0.36 0.61 1.12 2.65 0.34 0.58 1.06 2.51 0.32 0.55 1.01 2.39 0.25 0.43 0.80 1.92 0.20 0.36 0.67 1.61 3 Series

VK300

F Thread type Rc G NPT NPTF Nil F N T Option Part No. Description Part no.

Manifold Specifications

(However, there are no levers between t and q. They can be disconnected by merely pulling them apart.) Fig. (1) Black White 1 station (11 stations) A side coil B side coil (b) Lever Black White 2 station (12 stations) A side coil D-sub connector Connector terminal no.

VZM400

2 t Component Parts Aluminum alloy NBR Note No. !0 Description Material No. PBT ADC Material Note q Description Black zinc chromated Metallic plated Pilot body Body Piston guide B Valve Metallic plated !1 !2 w e Return spring Cushion Cushion Valve spring Return spring Piston B Head cover r Stainless steel Spool/sleeve Stainless steel ZDC !3 Rubber t POM End cover !