VND Series

Warning Caution Connection thread Proper tightening torque ( ( ( (N m) Rc1/8 7 to 9 Rc1/4 12 to 14 Rc3/8 22 to 24 Rc1/2 28 to 30 Rc3/4 28 to 30 Rc1 36 to 38 Rc1 1/4 40 to 42 Rc1 1/2 48 to 50 Rc2 48 to 50 5. Connection of piping to products When connecting piping to a product, refer to its operation manual to avoid mistakes regarding the supply port, etc. 6.

CEx-OMP0016

1 Hard anodized 37 Parallel pin Stainless steel 4 3 Head cover WL Aluminum alloy 1 Hard anodized 38 Tension plate Carbon steel 4 Nickel plated 4 Piston yoke Aluminum alloy 1 Anodized 39 Side cover L Aluminum alloy 1 Hard anodized 5 Piston Aluminum alloy 2 Hard anodized 40 Side cover R Aluminum alloy 1 Hard anodized 6 End cover Special resin 2 41 O-ring NBR 2 7 Wear ring Special resin 2 42

EXxx-OMU0020EN

LED indicators 42 7.6. Block diagram 43 8. Digital Output Module EX245-DY1 44 8.1. Parts and description 44 8.2. Specifications 45 8.3. Wiring 46 8.4. Process data 46 8.5. LED indicators 47 8.6. Block diagram 48 -2No.EX##-OMU0020-A 9. End Plate EX245-EA2-1/2 49 9.1. Parts and description 49 9.2. Specifications 50 10. Accessories 51 10.1. Markers 51 10.2. Y Connector 52 10.3.

Electric Actuator / Guide rod Slider

Deceleration(mm/s2) 3,000 Positioning repeatability (mm) 0.08 Lost motion [mm]Note 3 0.1 or less Lead equivalent (mm) 48 Impact resistance/ vibration resistance (m/s2) Note 3) 50 / 20 Drive method Belt Guide type Slide bearing Ball bushing bearing Allowable external force(N) Note 4) 5 Operating temperature range () 5 to 40 Operating humidity range (%RH) 90 or less (No condensation) Motor size 42

HRX-OM-K003

Table 8-7 Compliance EMC Directive 2004/108/EC Low Voltage Directive 2006/95/EC CE Marking Machinery Directive 2006/42/EC SEMATECH S2-93, S8-95 SEMI S2-0703, S8-0701, F47-0200 UL E229305 / UL1995 8.7 Compliance HRW Series 8-14 HRX-OM-K003 Chapter 8 Appendix 8.8 Thermo Chiller Daily Inspection Sheet Serial No. Model: Judgment Circulating fluid supply port cap Looseness IN press.

Vacuum Unit Ejector / Vacuum Pump System

Replacement Procedure 42 9. Specifications 47 10. Port Layout 52 11. Exhaust/Flow Rate Characteristics 62 11.1. Ejector Exhaust Characteristics/Flow Rate Characteristics 62 11.2. Vacuum Pump Flow Rate Characteristics 64 11.3. Vacuum Release Flow Rate Characteristics 64 12. Limitations of Use 66 13. Troubleshooting 67 -1No.

Fieldbus system PROFINET compatible SI Unit

LED indicator during energy saving mode for PROFIenergy Table. 6-8 LED indicator during energy saving mode for PROFIenergy LED Indicator LINK/ACT OFF FO OFF SF OFF BF OFF US1 0.5 sec ON 3 sec OFF US2 OFF NOTE For module parameter of PROFIenergy, refer to Section 4.2.2. 42 No.EX-OMW0011-B 6.5. Block diagram The following figure shows the block diagram of each SI Unit.

Solenoid Valve

No.SQ1000V-OMQ0002-B 26 No.SQ1000V-OMQ0002-B 27 No.SQ1000V-OMQ0002-B 28 No.SQ1000V-OMQ0002-B 29 No.SQ1000V-OMQ0002-B 30 No.SQ1000V-OMQ0002-B 31 No.SQ1000V-OMQ0002-B 32 No.SQ1000V-OMQ0002-B 33 No.SQ1000V-OMQ0002-B 34 No.SQ1000V-OMQ0002-B 35 No.SQ1000V-OMQ0002-B 36 No.SQ1000V-OMQ0002-B 37 No.SQ1000V-OMQ0002-B 38 No.SQ1000V-OMQ0002-B 39 No.SQ1000V-OMQ0002-B 40 No.SQ1000V-OMQ0002-B 41 No.SQ1000V-OMQ0002-B 42

VNA Series

Warning Caution Rc1/8 7 to 9 Rc1/4 12 to 14 Rc3/8 22 to 24 Rc1/2 28 to 30 Rc3/4 28 to 30 Rc1 36 to 38 Rc1 1/4 40 to 42 Operating Precautions 1. Valves will reach high temperatures from high temperature fluids. Use caution, as there is a danger of being burned if a valve is touched directly. 2.

High Vacuum L Type Valve

Model Starting Holding Power(W) Current(A) Power(W) Current(A) *G/C/D/T , P5G 36 1.5 4.8 0.38 P1G 50Hz 30.5 0.47 14.8 0.35 XLS-1660Hz 10 0.27 P2G 50Hz 30 0.24 4.9 0.11 60Hz 2.3 0.10 *G/C/D/T , P5G 47 2.0 5.3 0.5 P1G 50Hz 42 0.62 20 0.46 XLS-2560Hz 13.5 0.36 P2G 50Hz 45 0.35 6.7 0.15 60Hz 3.0 0.12 7 XL*-OMI0013-B 4.

rep-modular-e

(AR20(K)/25(K)/30(K)/40(K)) AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR20(K)/25(K)/30(K)/40(K) Hook spanner Nominal Tightening torque 2.0 0.2 Nm 2.5 0.2 Nm 3.5 0.3 Nm 4.0 0.4 Nm AR20(K) AR25(K) AR30(K) AR40(K) AR20(K) AR25(K) AR30(K) AR40(K) 34/38 40/42 52/55 52/55 Assembly (Bracket assembly) 1) Mount the bracket to the product.

Title not found

/8 1 5/64 5 8 Hex 3/8 1 3/32 1 7/16 5/8 7/8 11/16 40 1/8 T2 1/2 1/8 T2 1/8 T4 1/8 T6 1/8 T3 1/8 T1 1/8 T5 1/8 T8 1/8 T4-90 1 1/16 Note: Reducing Tees available with other barb combinations #1 7/8 17 32 7 16 7 16 Hex Typ. 27 32 #3 1 3/32 3/4 3/8 Typ. 7/8 9 16 7 16 #2 #4 27/32 3/4 41 1/8 T2 x 3 1/8 RT3 x 1 1/8 T3 x 3 1/8 T1 x 3 1/8 T4 x 3 1/8 RT4 x 2 7/16 7/16 17/32 9/16 19/32 7/16 42

MHC2

10-4 x (202 + 32)/12} x 10-6 = 2.21 x 10-8 (kg.m2) = 2.21 x 10-8 + 6.48 x 10-4 x 16.42 x 10-6 = 0.20 x 10-6 (kg.m2) IA Inertial moment around Z axis IA =IZ1 + m1r12 x 10-6 z f2 z2 B part r2 = 23.5(mm) Weight calculation m2 = d x e x f x Relative density m2 = 4 x 5 + 6 x 2.7 x 10-6 = 3.24 x 10-4 (kg) Inertial moment around Z2 axis IZ2 = {m2 (d2 x e2) / 12} x 10-6 IZ2 = {3.24 x 10-4 x (42

MHK2

M5 x 0.8 (Finger opening port) 22.5 2.3 12-6-13 13 Series MHK2 Dimensions MHK2-20: Standard type 18.6 20 2-M5 x 0.8 thread depth 8 (Mounting thread) 4H9 depth 4 +0.030 0 21H9 depth 1.5 +0.052 0 2-M5 x 0.8 thread depth 10 (Mounting thread) 24-M5 x 0.8 thread depth 10 (Mounting thread) Bottom hole 4.3 through (Mounting hole) 0 0.1 8 Open 26 +1.2 0 5 16 0.02 13.5 42 30 60 58 32 0 0.2 29 Closed

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 x 0.8 M6 x 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120 53.5 28 40 242 36.5 30 6.8 6.6 12 16 M6 x 1 M8 x 1.25 14 372 354 186 190 124 158 118 116.5 73 106 144 140 64 30.5 43 286 40.5 35 8.6 8.5 14 15 M8 x 1.25 M10 x 1.5 Model FF II NN AA BB CC DD EE GG JJ KK LL MM WW XX ML1C25 ML1C32 ML1C40 1/8 5 5 5 5 7 28 26 14 44 20 16 12.5 120 42

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

L), M plug connector (M), DIN terminal (D) Electrical entry 100, 200, 24, 48, 110, 220 AC50/60Hz Coil rated voltage (V) 24, 6, 12, 48 DC 15 to 10% of the rated voltage Allowable voltage (%) Power consumption (W) [Current: mA] (2) DC 1.8 (With indicator light: 2.1) [24 VDC: 75 (With light: 87.5)] Made to Order Specifications (For details, refer to pages 1843 and 1847.) 100 VAC: 45/50 Hz, 42

Clean Exhaust Filter

ejectors In the case of ejectors, the exhaust flow rate is the total of the suction flow rate and the air consumption. 3) Exhaust from other equipment Use the air consumption specified for each piece of equipment as a standard. 839 Clean Exhaust Filter SFE Series RoHS How to Order SFE 11 Size/Port size Male thread type Plug-in type Symbol Port size Max. flow capacity L/min (ANR) 11 M5 x 0.8 3 42

CJ1

Refer to p.0-39 to 0-42 for Safety Instructions and common precautions. Standard stroke (mm) Model CJ1B2 CJ1B4 Bore size (mm) 5, 10 2.5 5, 10, 15, 20 4 Applicable Tubing Piping Caution Size O.D. Tubing Material Model No. I.D.

CM2

#5 SCM225A, #12, #5, #19 CM2G32SCM232A, #12 SCM232A, #12, #5 SCM232A, #12, #5, #19 CM2G40SCM240A, #12 SCM240A, #12, #5 SCM240A, #12, #5, #19 Spring extend CM2G20SCM220A, #11 SCM220A, #11, #5 SCM220A, #11, #5, #19 CM2G25SCM225A, #11 SCM225A, #11, #5 SCM225A, #11, #5, #19 CM2G32SCM232A, #11 SCM232A, #11, #5 SCM232A, #11, #5, #19 CM2G40SCM240A, #11 SCM240A, #11, #5 SCM240A, #11, #5, #19 1.4-42

Copper-free Actuators

cylinder Series C(D)A1 Standard 1.9-2 20-CA1nN Double rod 1.9-16 20-CA1WnN SCA1l Non-rotating rod 1.9-22 20-CA1Kn Non-rotating double rod 1.9-28 20-CA1KWn Air cylinder Series C(D)G1 Standard 1.6-2 20-CG1nn SCG1l Non-rotating rod 1.6-26 20-CG1K Direct mount 1.6-35 20-CG1R Air cylinder Series C(D)J2 1.3-2 20-CJ2 Standard 1.3-13 20-CJ2W Double rod SCJ2l 1.3-30 20-CJ2K Non-rotating piston rod 1.3-42