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[January 2022] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2016-2022 SMC Corporation All Rights Reserved. No.PS-OMU0012-C

[November 2022] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018-2022 SMC Corporation All Rights Reserved No.PF-OMV0006-B

AC200-230V 50/60Hz 1Ph 16A REFRIGERANT R410A(HFC) 0.77kg (GWP:2088) The type and quantity of refrigerant (REFRIGERANT) WEIGHT 69kg (Net Weight) HRX-OM-X026 HRX-OM-X027 MANUAL 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, Japan Front G MADE IN JAPAN (It is an example of model "HRS050-A-20-R".) THERMO CHILLER HRS030-A-20-R POWER SUPPLY SERIAL No.

The motor was rotated while the initial data of the encoder was communicating (101) C Input RESET Turn the RESET ON when the actuator is stopped. This alarm occurs when an abnormality in communication with the encoder is detected when the power supply is turned on.

Input 102 Input 14 110 Output 111 Output 112 Output 12 113 Output 4IO Input Assembly Instance Byte Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0 0 OUT5 OUT4 OUT3 OUT2 OUT1 OUT0 1 ALARM ESTOP WAREA AREA INP SETON SVRE BUSY 100 2 ALM FG READY 3 0 OUT 1 ALARM ESTOP WAREA AREA INP SETON SVRE BUSY 2 ALM FG READY 101 3 4-7 4byte 8-9 2byte 0 OUT5 OUT4 OUT3 OUT2 OUT1 OUT0 1 ALARM

5 . 8 6 . 9 7 . 9 3 . 10 31 . 10 32 . 12 33 . 13 1LECGPR1 . 13 2DIN LECGPR1D . 13 34 . 14 1 . 14 2 . 14 4 . 15 41 ADDRESS,B RATE . 15 42 CN2SW . 16 43 LEC . 17 44 SIEMENS PLC S7 . 19 5 . 21 51 CN4: . 21 52 CN3: . 21 53 CN1:CONT . 21 54 CN2:PC/TB . 22 1 - 6CN . 23 61 . 23 62 . 23 63 . 24 . 25 7CN3: . 26 8CN1:IF CONT . 27 81 . 27 82 . 29 9CN2:TB/PC . 30 91 . 30 10LED . 31 101

[July 2018] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2010-2018 SMC Corporation All Rights Reserved No.PS-OMG0004-D

Signal Meaning 1 D0 Digit of 10-2 Bit0 19 D12 Digit of 101 Bit0 2 D1 Digit of 10-2 Bit1 20 D13 Digit of 101 Bit1 3 D2 Digit of 10-2 Bit2 21 D14 Digit of 101 Bit2 4 D3 Digit of 10-2 Bit3 22 D15 Digit of 101 Bit3 5 D4 Digit of 10Bit0 23 D16 Digit of 102 Bit0 6 D5 Digit of 10Bit1 24 D17 Digit of 102 Bit1 7 D6 Digit of 10Bit2 25 D18 Digit of 102 Bit2 8 D7 Digit of 10Bit3 26 D19 Digit of 102 Bit3

Basic With rear lock: CBM2B Bore size A-HN Stroke 20 Manual release non-locking style (Suffix: N) With air cushion (mm) S ZZ Double lock 137 141 141 167 Bore size (mm) 20 25 32 40 WB WA Double lock 83 83 83 101 Rear lock 72 72 72 93 Rear lock 126 130 130 159 Front lock 73 73 75 96 Front lock 127 131 133 162 8.5 10 11.5 15 11.5 11.5 11.5 14.5 -H -R -W N L Axial foot: CBM2L Bore size Stroke

Function ZQ Solenoid valve (Double, Single)/Air operated valve Operation 3, 5, 6, 12, 24 VDC, 100, 110 VAC (50/60Hz) Power supply voltage ZH Pressure switch for vacuum ZSE2-0R-15 ZSE30A-00---X505 101 to 0 kPa/101 to 10 kPa Set pressure range ZU 3% or less/variable Hysteresis ZL 12 to 24 VDC (Ripple 10% or less ) Operating voltage ZY Suction filter unit ZR1-F Operating pressure range Vacuum

1 0 1 101 101 102 103 104 104 104 105 8 BAS|C CIBCUITS lntroduction Flow Amplilication Signal Inversion Selec{ion Memory Function Time tunctions Delayed switching on Delayed switching otf Pulse on switching on Pulse on releasing a valve Cylinder Control Manual Control Single Acting Cylinder Direct Operation and Sped Control Intedock AND Function Inverse ODeration: NOT Function Double acting

to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 Bore (mm) 20 25 32 40 81 93 106 131 156 12.5 25 37.5 50 75 100 35 17 68 85 97 110 135 160 185 12.5 25 37.5 50 75 100 125 35 17 72 12.5 85 97 110 135 160 185 25 37.5 50 75 100 125 72 35 17 90 102 115 140 165 190 12.5 25 37.5 50 75 100 125 19 77 46 Refer to

CXS Theoretical Output Symbol Specifications XB11 Long stroke type (N) XB13 Low speed cylinder (5 to 50 mm/s) DOperating pressure (MPa) Model Rod size (mm) Piston area (mm 2) X146 Hollow piston rod 0.9 0.8 0.7 0.6 0.5 0.4 0.3 0.2 X138 Adjustable stroke -X CX2N10 CX215 CX225 91 81 71 61 51 40 30 6 101 20 X168 CX helical insert thread 186 166 145 124 104 83 62 8 207 41 X169 Individual -X 2

collector 2 outputs, with suction filter Fixed SI unit Note 7) 0 to 101 kPa/NPN open collector 1 output + analog voltage, with suction filter With unit switching function Note 6) (Initial value psi) 0 to 101 kPa/PNP open collector 1 output + analog voltage, with suction filter P 100 to 100 kPa/NPN open collector 2 outputs, with suction filter Note 6) Under the New Measurement Law, sales

. . . . . . . . . . . . . . . . . 99 SERIES 30 COIL CHART . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .100 SERIES 50 COIL CHART . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 101

TQ1230001-OM103-A grip success: default output DO[101] grip failure: default output DO[102] workpiece drop detection: default output DO[103] * Digital output port can be selected within DO[101] DO[112] * If you select the same digital output port for different status signals, a warning message will be displayed. 3.2.

IDF Series 10-1 Safety instructions 101 IDX-OM-W010 Air Dryer 10 Specification for Option L 10-3 Installation of heavy duty auto drain 1) Hold the hexagon-head part (width across flats: 32) at port Rc1/2 of the air dryer with spanner. Then install nipple, ball valve (width across flats: 25). Note 1) Put up the seal tape or the sealant to the nipple.

[June 2022] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. DeviceNet is registered trademark of ODVA, Inc. 2010-2022 SMC Corporation All Rights Reserved No.EX-OMN0013-I

1 0 1 101 101 102 103 104 104 104 105 8 BAS|C CIBCUITS lntroduction Flow Amplilication Signal Inversion Selec{ion Memory Function Time tunctions Delayed switching on Delayed switching otf Pulse on switching on Pulse on releasing a valve Cylinder Control Manual Control Single Acting Cylinder Direct Operation and Sped Control Intedock AND Function Inverse ODeration: NOT Function Double acting

5H9 4 deep +0.030 0 Cross section AA Cross section BB HA GA (mm) Model F 35 35 35 40 30 55 65 70 GA 16 16 16 16 51 61 109 159 KA NA 2 2 2 2 2 4 4 4 HA 40 40 40 50 30 70 70 70 N 4 4 4 4 6 6 6 8 G 16 16 16 16 21 26 39 19 H 40 40 40 50 30 35 35 35 NN 2 2 2 2 3 4 5 7 I 10 10 10 10 15 40 55 68 J 40 40 40 50 60 85 118 155 K 29 39 49 59 69 94 119 144 Z 75 75 75 85 100 150 198 248 M 76 76 76 86 101