Thermo-chiller/Rack Mount Type

prevents leaked fluid from pooling at the bottom of the product. p. 36 Water leakage sensor * Not included for Option Z Drain pan Discharge of the circulating fluid Drain port (Rc1/4) Handle (Accessory) * Not included for Option Z and the HRR010 Cap Replacement particle filter element Cleaning of the dustproof filter Optional Accessories p. 36 Space saving Footprint can be reduced by 53%

Slider Type Ball Screw Drive/11-LEFS Series

LEC Y Motorless Overhang Displacement Due to Table Clearance (Reference Value) LAT Basic type High precision type LZ 0.12 0.25 LC3F2 LEF16 LEF16 0.1 0.2 Displacement [mm] Displacement [mm] 0.08 LEF25 LEF25 0.15 0.06 0.1 0.04 LEF40 LEF40 0.05 0.02 LEF32 LEF32 0 0 0 100 200 300 0 100 200 300 Overhang distance [mm] Overhang distance [mm] 53 Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric

Series 12-REA Sine rodless cylinder

137 92 80 70 M5 x 0.8 x 8 M6 x 1.0 x8 M6 x 1.0 x10 12REA 50/63 0 -0.2 L NA 33 2-Rc, NPT, G 1/4 14 14 E(h8) E(h8) X D I 4-TC 14 14 Effective thread depth R 23 22 K W 23 25 2 4-M8 x 1.25 25 8-Q 14.5 C 0.1 + Effective thread depth 12 Effective thread depth R B S + Stroke 2 ZZ + Stroke Q x R S TC x R Model L 122 110 K 38 32 C 70 60 X ZZ NA E D B 72.2 58.2 I 70 60 W 12-REA63 12-REA50 100 86 66 53

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

106.5 25 30 97.5 116.5 35 40 107.5 126.5 35 21-/2210-/11-/12CXS15-20 CXS15-30 CXS15-40 CXS15-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 117.5 136.5 45 21-/2210-/11-/12856 Dual Rod Cylinder CXSL 1221CXS / 10-/1122Basic: CXS20, CXSL20 10-/11221221ZZ S 12 12 SS 25 Z 2 x 5.5 through 6 30 1 M8 x 1.25 x 6 L (Hexagon socket set screw) 2 x 9.5 counterbore depth 5.3 23 1 500.2 500.2 28 62 53

Series AK1000

0.28 140 0.97 35 0.24 120 0.83 Delivery pressure (MPa) Delivery pressure (MPa) Delivery pressure (psig) Delivery pressure (psig) 30 0.21 100 0.69 25 0.17 80 0.55 20 0.14 60 0.41 15 0.10 40 0.28 10 0.07 20 0.14 5 0.03 0 0.00 0 0.00 0 100 200 300 400 500 600 700 Flow rate (slpm, N2) 0 200 400 600 800 1000 1200 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International. 53

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

Weight (g) d T H D1 D2 D3 L1 L2 L3 Model 4 ASD230FM-M5-04 9.3 12.9 17.5 29.4 12 29.6 33.8 28.8 34.6 9.6 10 7.8 11.7 M5 x 0.8 8 30.1 25.1 6 ASD230FM-M5-06 11.6 13.7 20.6 32.5 13 34.6 6 ASD330FM-01-06S 39.6 14 11.6 13.7 29 22.9 38.5 35.2 30.2 14.2 11.8 10.6 R 1/8 12 32.1 27.1 15.8 33.9 8 ASD330FM-01-08S 38.9 15.2 18.5 31 28.2 44.8 6 ASD430FM-02-06S 12.8 17 53 25.2 43.5 18 8 ASD430FM-02-08S

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

19.5 21.6 191. 6 39 37.5 39 36 211. 38 241. 3 5.2 241. 11 M6 x 1 x 8 12-CY3R20 18.5 19.5 26.4 18.5 6 44 42.5 44 41 23.5 43 23.5 3 5.2 23.5 15 M6 x 1 x 8 12-CY3R25 10.5 111. 33.6 10.5 7 55 53.5 55 52 291. 54 291. 3 6.5 291. 13 M8 x 1.25 x 10 12-CY3R32 101. 111. 41.6 131. 7 65 63.5 67 62 361. 66 361. 5 6.5 361. 15 M8 x 1.25 x 10 12-CY3R40 L Model LD M MM N PW Q QW T TC W WP X Y Z 12-CY3R15 53

Rodless Cylinder for Vacuum Series CYV ø15, ø32

the cylinder tube Lubrication Weight (kg) Standard stroke (mm) Model 700 600 500 450 400 350 300 250 200 150 100 CYV15 3.2 2.8 2.5 2.4 2.2 2.0 1.9 1.7 1.6 1.4 1.2 CYV32 9.1 8.3 7.5 7.1 6.7 6.3 5.9 5.5 5.0 4.6 4.2 Magnetic Holding Force Theoretical Output (N) Magnetic holding force (N) Operating pressure (MPa) Bore size (mm) Bore size (mm) Piston area (mm2) 15 0.1 0.2 0.3 59 15 32 18 35 53

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

03-3 AS2001F-06-3 44.8 6.3 21.8 49.1 43.6 13.5 5/32" 9.3 40.7 5.2 20.7 48 42.5 12.7 11.6 6 AS2001F-05-3 AS2051F-06-3 12.5 53.2 6.7 25.7 53.5 48.1 17 3/16" 11.4 50 6.2 21.6 48.9 43.4 16.5 12.8 6 14 10 3.5 17 15.5 13 3.5 AS2001F-07-3 AS2051F-08-3 59.8 8.1 27 54.8 49.4 18 1/4" 13.2 52.2 7.1 22.5 49.8 44.3 17 8 15.2 AS2051F-05-3 AS3001F-06-3 59 7.4 31.3 60.1 54.7 17 3/16" 11.4 52.2 6.2 25.2 53

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

03-3 44.8 6.3 21.8 49.1 43.6 9.3 40.7 13.5 12.7 20.7 48 42.5 5/32" 5.2 29 28 6 11.6 AS2051F-06-3 AS2001F-05-3 53.2 6.7 25.7 53.5 48.1 11.4 50 17 16.5 21.6 48.9 43.4 3/16" 6.2 49 34 14 10 3.5 12.5 6 12.8 17 13 15.5 3.5 AS2051F-08-3 AS2001F-07-3 59.8 8.1 27 54.8 49.4 13.2 52.2 18 17 22.5 49.8 44.3 7.1 1/4" 54 37 8 15.2 AS3001F-06-3 AS2051F-05-3 59 7.4 31.3 60.1 54.7 11.4 52.2 17 16.5 25.2 53

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

Min. d T H D1 D2 D3 L1 L2 L3 Model AK 4 ASD230FG-M5-04 17.5 12.9 12 29.4 9.3 28.3 25.5 28.6 25.8 9.6 10 11.7 8 M5 x 0.8 25 22.2 7.8 6 ASD230FG-M5-06 20.6 13.7 13 32.5 11.6 VCHC 39.6 34.6 14 6 ASD330FG-01-06S 22.9 13.7 29 38.5 11.6 35.2 30.2 14.2 11.8 12 R 1/8 32.1 27.1 10.6 38.9 33.9 15.8 8 ASD330FG-01-08S 28.2 18.5 31 44.8 15.2 ASR ASQ 6 ASD430FG-02-06S 25.2 17 53 43.5 12.8 18 41.7 36.7

D-F6N/D-F6P/D-F6B

Weight (g) Auto switch model D-F6N D-F6P D-F6B 20 0.5 m (Nil) 19 3 m (L) Lead wire length 53 50 5 m (Z) 80 75 Dimensions (mm) D-F6 D-F6B 8.5 (22) 3.2 Indicator light (24) 16 Most sensitive position 7 2.7 10.6 7 29 D-F6N/F6P DD(22) 3.2 Most sensitive position 7 1609 Auto Switches Precautions 1 Be sure to read this before handling.

C76

rod end fR (N) Foot: L Rod side flange: F Head side flange: G 0.3 58 54 10.0 L C7640 44 0.5 40 W W W F 36 0.7 33 C7632 24 0.3 23 G 17 0.5 16 1.0 13 0.7 13 Clevis: C, D Rod side trunnion: U 0.3 C 0.5 W W D 0.7 0.1 (100) (100) 0.3 600 500 400 300 1000 1100 900 800 700 200 100 0 Cylinder stroke (mm) U 92 85 0.5 Center trunnion: O Head side trunnion: U 77 71 0.7 Series CS1 only W W 57 53

C95Series

Bore size (mm)' '.' . 32 40 I ' so '" 63 8Ii 100' ; Basic 1.36 2.07 3.39 i 4.6 7.92 10.30 Fool 1.72 2.51 4.22 5.61 9.88 12.69 Basic weight Flange 1.80 2.57 4.42 5.87 10.78 14.28 ;' " ~itional All mounting bracket 0.33 0 .53 0.75 o.n 1.34 1,85 Trunnion 1.56 2.42 3.81 5.46 9.35 13.09 Calculation example: C95SB32-100W (BasIC,fJ 32,loost) Basic weight.. . 1.36 (Basic, %32) eAdditional weight

CE

Dimensions: 20 Direct mounting, rod side tapped style: CEP1B20 Stroke (Positioning pin hole) 4 depth 4 Cable end + 0.05 + 0.02 18 40 4 depth 4 + 0.05 + 0.02 Without connector (Positioning pin hole) 4 45 4-M6 x 1.0 Thread depth 12 6 Metal connector M14 x 1 4-M6 x 1.0 depth 6.5 (Bottom 5.3 through-hole) 9.5 counterbore depth 5.5 (500 or 3000) 25 70 1.5 5 Width across flats 13 7 5 10 22f8 10f7 6 53

Brake mechanism added

Component parts Note Description Material Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Free-cutting steel Aluminum alloy Carbon steel Carbon steel Carbon steel Carbon steel Special friction material Material Carbon steel No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 No. 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53

Stroke Reading Cylinder and Counter

rod side tapped type: CEP1B20 Stroke + 0.05 + 0.02 4 depth 4 (Positioning pin hole) CEP1 CEP1 CE1 Cable end CE2 18 40 + 0.05 + 0.02 4 depth 4 (Positioning pin hole) Without connector ML2B 4 45 4 x M6 x 1.0 Thread depth 12 6 Metal connector M14 x 1 4 x M6 x 1.0 depth 6.5 (Bottom 5.3 through-hole) 9.5 counterbore depth 5.5 (500 or 3000) 25 70 1.5 5 Width across flats 13 7 5 10 22f8 10f7 6 53

•

Unit 'k,gf Bore(mm) 40 50 53 IBasic weight 0.74 0.96 1.23 Cylinder ~ II / E E I Add itional weight per 25 stroke 0.10 0. 11 0.13 <100 // Single knuckle jOint 0.2 J> "V Double knuckle joint(With pin) 0.28 ~ ~ ~ 300 Limit switch mount 0.22 /~/ c E m Cam 0.12 Ii: 200 Special bracket 0.2 ~V Calculation method _ BaSIC weight . . ... . . 0.74 (40) 100 W :/ Example : CKI ()40-IOOY _ Additional

Power Clamp Cylinder

Clamp Arm Tightening Torque Switch bracket kit Bore size (mm) Tightening torque Ibfin Nm 53 to 80 106 to 133 133 to 177 159 to 212 40 50 63 80 6 to 9 12 to 15 15 to 20 18 to 24 Stopper bolt kit Top cover kit 207

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

15 M10 x 1.5 x 15 B 6.5 8 9.5 9.5 11 11 14 14 GP 20 27 33 39 44 55 65 83 95 HB 10.5 14 17 21 23.5 29 36 45 51 C 3.2 4.2 5.2 5.2 6.5 6.5 8.2 8.2 GW 18.5 25.5 31.5 37.5 42.5 53.5 63.5 81.5 93.5 CB 2 2 2 3 3 3 5 5 5 H 19 26 32 39 44 55 67 85 97 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 Model 12-CY3R6 12-CY3R10 12-CY3R15 12-CY3R20 12-CY3R25 12-CY3R32 12-CY3R40 12-CY3R50 12-CY3R63 L 34 38 53