SMC Corporation of America
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Search Results "ISE10-M5-B-K"

Symbol Specifications Grade Symbol Unit: MPa Nil M With M5 (Female thread) 0.2 0.4 0.7 1.0 2 4 7 10 Symbol Component parts polishing, Assembly environment Note) Use M5 female thread when panel-mounting for piping.

(mm) MHF2-DR Body Option Dimension B Model A D C A B 25 MHF2-8DR 5.5 37 M3 x 0.5 11 MHF2-8D1R 61 MHF2-8D2R C 38 MHF2-12DR 7 54 M5 x 0.8 14.8 MHF2-12D1R 90 MHF2-12D2R 54 MHF2-16DR D D 9 M5 x 0.8 19 76 MHF2-16D1R ( Finger closing port) ( Finger opening port) 124 MHF2-16D2R 66 MHF2-20DR For dimensions not given above, please refer to the table of dimensions on pages 12-3-12 to 12-3-23. 10 M5

(mm) MHF2-DR Body Option Dimension B Model A D C A B 25 MHF2-8DR 5.5 37 M3 x 0.5 11 MHF2-8D1R 61 MHF2-8D2R C 38 MHF2-12DR 7 54 M5 x 0.8 14.8 MHF2-12D1R 90 MHF2-12D2R 54 MHF2-16DR D D 9 M5 x 0.8 19 76 MHF2-16D1R ( Finger closing port) ( Finger opening port) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area:

Port size Port size Rc, NPT, TSJ, UOJ Female thread 1/4 M5 02 M5 Symbol Connection Bracket is included as a standard.

M5 X 0.8 (Finger opening port) Auto switch mounting groove (4 locations) 4-M5 X 0.8 44 (Piston rod and rack screw) 5.5 H M5 X 0.8 18.2 (Finger closing port) 12.4 0.5 9 8 8.4 16.8 15 31 Width across 12.5 A flats 8 (4 locations) (46) 20 15 15 7 Closed 7 7 34 20 10 10 Open G 4-M4 X 0.7 through (Thread for mounting attachment) Model MHL2-10D MHL2-10D1 MHL2-10D2 J 80 108 146 A B C D E F G H 38

U C S O H L 1 Series IRV Dimensions IRV1000 IRV2000 53 55 41 30 50 SMC 35 P K U C SMC S O H L P K U C S O H L 40 34 8 x 6.5 15.4 x 5.4 Approx. 106 Approx. 50.6 18 Approx. 79 Atmosphere Atmosphere 45.5 13 SET VAC SET G SET G 30 SET VAC 43 Pad side Vacuum pump side Pad side Vacuum pump side Approx. 43 35 2-Rc 1/8 Connection port 2-Rc 1/8 Vacuum gauge port 2-Rc 1/4 Connection port Approx. 60

hole Anchor bolt mounting hole AT150C/220C AT55C to 125C Cleaning hole blank flange Gauge port socket Gauge port socket K (Safety valve port) Air outlet Air outlet K (Safety valve port) Manhole Air inlet Inspection hole Air inlet socket Drain Drain Anchor bolt mounting hole Anchor bolt mounting hole Model Air connection Socket Flange A B C D E F G H J K L Anchor bolt 406.4 609 609 609 962

Stations: 04 (Stations), Wiring: L (Individual Wiring or None), Manifold Options: B (with DIN Rail Mounting Bracket), Exhaust: H (High Noise Reduction Silencer Exhaust), Pressure Switch for Vacuum/Pressure Sensor: R (Pressure Switch for Vacuum w/Energy Saving Function, -100 to 100, PNP 2 Outputs, with Unit Selection Function), Leadwire: W (Energy Saving), Unit Options: K (Vacuum Break Flow

A B d H Model H A SN-015A M14 x 1 19 21.9 5 ZPNA-M16 M16 x 1.5 22 25.4 6 ZPNA-M18 M18 x 1.5 27 31.2 9 ZPNA-M22 M22 x 1.5 30 34.6 8 Bolts (Hexagonal Socket Head Cap Screw) Dimensions d B (mm) A B d L 8 11 5.5 M3 x 0.5 L 8 12 7 M4 x 0.7 A 10 15 8.5 M5 x 0.8 13-11-96

-P-M5 M5 x 0.8 0.13 0.35 0.52 0.15 0.43 0.60 N.C.

SYJ72R is only for manifold use. 35 Series SYJ700 Construction c f a e b d N.C. N.O. c f a e b d (A) 2 (A) 2 (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) h h 3 (R) 1 (P) 3 (R) 1 (P) g g Component parts Replacement parts Description Body Piston plate End cover Piston Spool valve assembly Spool spring No.

Without bracket (Bottom view) Bracket thickness is approx. 1.6mm Model Piping port size A B C D E F G H I J K L LFE13(Z) 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14(Z) 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26(Z) 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 LFE38(Z) 1 120 90 55 32 73 100 106 41 6 1.6 115 106 Model M N O P Q R S T U Bracket weight LFE13(Z) 48 39 4.6 12 11.5 52 28

K Operation start D status setting Sets operation start status. Select with [] or [] keys pump/fan operation disabled) 2: Start up in the RUN mode after the power is turned on.

I K SV C L D E A Display/Operation panel G Main power switch B Reservoir Cap H Power supply connector C Level gauge I Communication connector 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2021 SMC

0 e New PFA q Body New PFA w Sensor Super PFA e Tube PPS r Housing A PPS t Housing B PPS y Housing C POM u Bushing PPS i Cap FKM o Gasket FKM !0 O-ring Stainless steel 304 !1 Thread PVC !2 Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

-B 40 W 50 L/min 1000 Hz 0.55 0.4 High speed response required for both ON and OFF -E 80 W 100 L/min 650 Hz 0.55 0.55 -F 40 W 100 L/min 550 Hz 0.7 0.55 -J 80 W 150 L/min 600 Hz 0.6 0.75 -K 40 W 150 L/min 500 Hz 0.8 0.75 * Current needs to be limited.

Example: -D09 Note 2) When -B is selected, a back pressure check valve is included in all stations of the manifold. If the back pressure check valve is used only for the station that need it, then specify the station location in the manifold specification. (-B is not necessary) Note 3) Specify -K for wiring specification for cases below.

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For