212 Description Material Note 1 Body PFA 2 Housing PVDF 3 Diaphragm FKM 4 Plate PVDF 5 Diaphragm PTFE 6 Housing PVDF 7 Diaphragm PTFE 8 Guide PPS 9 End plate PVDF 10 Spring Stainless steel Fluorine coated 11 Nut PFA y r t !1 q u !0 o i Integral ttings/LQ1 w e Component Parts No.
1 r #5 @3 @8 #6 y u t !5 #7 #8 @6 w !6 e &0 q &0 #4 #3 $8 $0 %9 ^0 #9 $6 $7 %9 !2 #1 !3 $9 %0 %1 !0 @2 @1 #2 ^2 ^5 $5 %2 @5 ^8 $4 ^1 @4 %4 %5 ^7 $3 #0 $2 %6 @7 ^4 o %7 ^9 ^6 @9 %8 ML2BS $1 %3 ^3 !
NO m: Refer to "Operating Conditions (Allowable eccentric load)" on page 12. m < Wo NO mo Wo m Wo mo < Wo YES mo Wo YES m Wo Model selected Allowable rotational torque Non-rotating accuracy T T (Nm) Non-rotating accuracy Bore size (mm) Stroke (mm) Bore size (mm) 40 0.08 100 75 50 30 63 40 0.06 3 4 5 7 100 63 0.05 10 12 16 22 100 13 17 22 30 Note) The value given for the non-rotating
9 e r t y u q !3 @9 #0 #1 #2 #3 #4 #5 #6 !4 !5 w !2 @0 @8 o !0 !1 i Manual release non-lock type: Suffix N @4 @5@6@7 Manual release lock type: Suffix L Parts List No.
190 12 TBR-4 240 Spare Parts W (Dimension) Part no.
DC 0.35 W DC 0.1 W DC (at holding) with power saving circuit Note 1) VZ VS VFN Note 1) With the 0.1 W DC specification, keep the vibration/impact within10/50 m/s2. 0.35 W DC at inrush (20 ms) and 0.1 W DC at holding.
Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ None N (Example) H7CN Since there are other applicable auto switches than listed, refer to page 1581 for details. For details about auto switches with pre-wired connector, refer to pages 1784 and 1785.
filtration 074 105 149 74 m 105 m 149 m Port size (Outlet side) 04 06 08 10 12 16 20 24 28 32 1/2B 3/4B M Micromesh Element Differential pressure indication 1B 0 4 5 None Differential pressure indicator Differential pressure indication switch Note) 1 1/4B 1 1/2B 2B Hydraulic fluid 2 1/2B Note) N.C. and N.O. common 0 1 2 N W V Petroleum Water-glycol, Emulsion Phosphoric ester 3B Relief valve
W With exhaust interference prevention valve Note 23, 24, 25) Note 17) When more than one option is selected, list the option symbols in an alphabetical order. Example) BJ Note 18) Use One-touch fitting (M-3AU-4) or barb fitting for piping. (O.D.: within 5.8) Note 19) Use One-touch fitting (M-3AU-4) or barb fitting for piping.
N)02~(F,N)04(-B,S)(-K,M,R,Z)-D VHS40W-(F,N)06(-B,S)(-K,M,R,Z)-D VHS50W-(F,N)06~(F,N)10(-B,S)(-K,M,R,Z)-D Contents Page 1.
M Standard (1 W for DC) Note) Nil Y DC low wattage type (0.5 W) Note) Note) O-ring and round head combination screws (M2 x 12) are attached to the supply adapter (M). Note) Avoid energizing the solenoid valve for long periods of time. (Refer to Design and Selection on Specific Product Precautions 1.) Pressure sensor specifications Power supply voltage (Refer to Table (1).)
Press the knob to lock the setting. t Trigger Switch to turn on and off static neutralization y One-touch fitting Supply port of compressed air t i u Power supply connector Connector for power supply, F.G., and external switch inputs i Lighting LED Illuminate the object during static neutralization * Inside of the slide cover y u Description of LED Indicators LED Indicators w q e No.
/W valve for vacuum applications.
single flat (Size: 40) M Grommet / Lead wire: 1 m W L Grommet / Lead wire: 3 m CN Connector / Without lead wire C Connector / Lead wire: 0.5 m Rotation angele Number of auto switches CL Connector / Lead wire: 3 m 90 90 Nil 2 Z* Grommet / Lead wire: 5 m 180 180 S 1 * The 5m lead wire is produced upon receipt of order. * Connectors are only available for the R73, R80, and 270 270 T79. **
drain port (Rc3/8 w/ valve and plug) switch Level Sub tank switch Sub tank drain port (Rc3/8 w/ valve and plug) Refrigerant pressure gauge Water regulating (high) valve Facility water outlet (Rc1/2 w/ plug) * The water regulating valve is used for each channel.
Note Platinum silver Platinum silver Black Black Material Aluminum die-casted q Description Sub-plate Body Thread Type Aluminum die-casted Stainless steel w e Spool/Sleeve Adapter plate Nil Standard Rc r Resin NPT N T t Resin End plate Option NPTF y Resin Piston G F Replacement Parts Part no. No.
83 99 106 X 47 48 51 Y 47 58 67 V 102 114 123 S 39 41 44 T 59 62 64 U 92 95 97 Q 23 25 28 L 6 9 9 M 45.5 50.5 50.5 N 20 23 25.5 K 36 46 46 F 33 34 34 H 24 25 25 J 30 40 40 D 22 24 24 A 40 44 44 B 20 22 22 C 9 10 10 Model VVX31 VVX32 VVX33 TI/ TIL PA PAX PB 17-3-91
(page 84) 5 R/W 5th letter U8 0 Y 2420 0x0974 6 R/W 6th letter U8 0 Y 7 R/W 7th letter U8 0 Y 8 R/W 8th letter U8 0 Y 9 R/W 9th letter (right end) U8 0 Y 1 st dot (left end) U8 0 Y 1 R/W 2 R/W 2nd dot U8 0 Y 3 R/W 3rd dot U8 0 Y Line name dot 4 R/W 4th dot U8 0 Y 0: oFF (dot OFF) 1: on (dot ON) 5 R/W 5th dot U8 0 Y 2430 0x097E 6 R/W 6th dot U8 0 Y 7 R/W 7th dot U8 0 Y 8 R/W 8th dot U8 0 Y
Cor|duit, DIN connector (Note) Gauge port RC(PT)1/8, Pre6sur g6uge, 14{1.0}, 28{2.0}, 72{5.1), 100{7.1}, 145{10.2) How to Order Model t x#l r*m ? Electrlcal connectlon ?
ZS-22-B Response frequency 200Hz 200Hz 200Hz 200Hz 200Hz 200Hz (5ms) (5ms) (5ms) (Sms) (Sms) (5ms) (With two M4 mounting thread) Noj. l) Hysteresis Adjustable AdjlJSlable A~uslable Adjustable A~US1ab' A~lJstabte mode m;1 Cf rm: (}i jl t(rml t~,~I~IIm] Cldj.t;,' II"mI l~j~Cf nn'e:, 1: &ij. orm::fe,1 Hysl21 esls Wmdow Fixed Fi xed Fixed Fixed Fixed Fixed co6:rearator m e (3digit) (3digit)