Diaphragm Valve for Ultra High Purity

Select compatible materials of construction for the gas Vacuum to 125 psig (0.9 MPa) 200 psig (1.4 MPa) 375 pisg (2.7 MPa) -10 to 71C (No freezing) S 316L SS Electropolish + Passivation Ni-Co Alloy PCTFE (Option: Polyimide) AZ4542 0.29 0.5 Inboard leakage Outboard leakage 2 x 10-11 Pam3/s 2 x 10-10 Pam3/s 1) 4 x 10-9 Pam3/s 1) Ra 10in. (0.25 m) Face seal, Tube weld 60 to 110 psig (0.4 to

AS-X785

AS 01 X785 Pilot port Port size Body size Thread type Seal method 2 1/8, 1/4 3 3/8 4 1/2 Nil R, Rc G G Nil Without sealant (for G) S With sealant (for R) Cylinder side 01 1/8 02 1/4 03 3/8 04 1/2 * R thread type: With sealant G thread type: Without sealant Valve side Cylinder side 04 F 10 S AS4201 X785 Pilot port Thread type Seal method Nil R, Rc G G Nil Without sealant (for G) S With sealant

ACG

Mounting angle view (-R specification) MPa OUT IN K P C U O S L H to 2

Mechanically Jointed Rodless Cylinder with Protective Cover Slide Bearing Guide Type, Cam Follower Guide Type MY1  W Series ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

Note 2) The piston speed is 100 to 1000 mm/s for centralized piping. Note 3) Use at a speed within the absorption capacity range. Refer to page 1346.

MVGQ

For types S, Z and T with an energy saving circuit, the voltage will drop due to the internal circuit. Allowable voltage fluctuation must be in the range below. Types S, Z 24 VDC: 7 to +10 %, 12 VDC: 4 to +10 % Type T 24 VDC: 8 to +10 %, 12 VDC: 6 to +10 % Note 1) Impact resistance: Made to Order Specifications (For details, refer to pages 1847.)

Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked

155

0 Light / surge voltage suppressor Nil: Non-locking push type D: Push-turn locking lever type Nil: Without bracket B1: Bracket on the left side B2: Bracket on the right side Nil None With surge voltage suppressor S With light / surge voltage suppressor Z Left Right Left Right Note) Refer to Table (1) below for combinations with electrical entry. DOS, DOZ are not available.

Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked

Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked

Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked

Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked

Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked

Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked

Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked

Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked

Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked

Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked

Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked

Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked

Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked