ISO Standards C85 Series ø 8, ø 10, ø 12, ø 16, ø 20, ø 25 Air Cylinder: Standard Double Acting, Single Rod C85 C85W C85 C85K C85K C85R C75 C75W C75 C75K C75K C75R Single Acting, Spring Return/Extend Single Acting, Spring Return/Extend Single Acting, Spr

wire (PNP) M9PAV*1 M9PA*1 M9PAV*1 M9PA*1 v v V v v 2-wire 12 V M9BAV*1 M9BA*1 M9BAV*1 M9BA*1 v v V v v Grommet Water resistant (2-color indicator) With diagnostic output (2-color indicator) 4-wire (NPN) 5 V, 12 V H7NF F79F V V v v IC circuit 3-wire (NPN equivalent) 5 V A96V A96 A96V A96 V V IC circuit Reed auto switch Yes 200 V A72 A72H V V Grommet 100 V A93V*2 A93 A93V*2 A93

Parallel Style Air Gripper Series MHZ

1/4 1 1/4 to 1 1/2 1 3/4 to 2 2 to 2 1/4 MHS MHC MHT MHY Impact load Clearance MHW -X 3.

Slide Unit Series CX2/CXWM/CXWL

A73H A80H E76A E73A E80A 3-wire (NPN equivalent) A72 A73 A80 A73C A80C 5 V 12 V 200 V 100 V IC circuit 10 16 20 25 32 16 20 25 32 Grommet CXS Relay, PLC 5 V, 12 V 12 V 100 V or less IC circuit 2-wire 24 V Connector 5 V, 12 V 5 V 12 V 24 V or less 100 V IC circuit 10 3-wire (NPN equivalent) DGrommet Relay, PLC 24 V 2-wire 5 V, 12 V 100 V or less IC circuit -X Solid state auto switches

Slide Unit Series CX2/CXWM/CXWL

A73H A80H E76A E73A E80A 3-wire (NPN equivalent) A72 A73 A80 A73C A80C 5 V 12 V 200 V 100 V IC circuit 10 16 20 25 32 16 20 25 32 Grommet CXS Relay, PLC 5 V, 12 V 12 V 100 V or less IC circuit 2-wire 24 V Connector 5 V, 12 V 5 V 12 V 24 V or less 100 V IC circuit 10 3-wire (NPN equivalent) DGrommet Relay, PLC 24 V 2-wire 5 V, 12 V 100 V or less IC circuit -X Solid state auto switches

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators Note 1) Actuation Voltage Electrical entry Light/surge voltage suppressor Sonic conductance C [dm3/(sbar)] 2 position 3 position DC AC 100 V 50/60 Hz 110 V 50/60 Hz 200 V 50/60 Hz 220 V 50/60 Hz M plug connector L plug connector 24 V Note 4) Series M8 connector Pressure center 12 V DIN terminal { } 4/25/3 (A/BEA/EB) Closed center Exhaust center

CRB2/CRBU2/CRB1

D-T991: Right-hand type D-T992: Left-hand type D-S99(V)1, D-S99(V)2 DC (+) Brown [Red] Main circuit of switch Main circuit of switch Main circuit of switch OUT Black [White] DC () Blue [Black] D-S99V1: Right-hand type D-S9PV1: D-S99V2: Left-hand type D-S9PV2: D-S9P(V)1, D-S9P(V)2 DC (+) Brown [Red] OUT Black [White] DC () Blue [Black] D-T99(V)1, D-T99(V)2 D-T99V1: Right-hand type D-T99V2:

EXxx-OMW0014CN

IO 1(XF1)MDI M12(4 ,,D code)PROFINET IO 1(XF2)MDI-X . 3-5 FE /(EX245-SPN3A) 17 No.EX-OMW0014CN-A 3.2.1. / SI 2 XD1/XD22 PROFINET XF1/XF2 /US1/US2SI US1 US2 1 IP65/ EX245-SPN1A SCRJ SCRJ SI XD1/XD2 EX245-SPN1A CLASS1 1 24 V(US1) 2 0 V(US1) 3 24 V(US2) 4 0 V(US2) 5 FE (XD1/XD2) .3-6 EX245-SPN1A/SPN2A (24 V) 1 0 V(US2) 2 0 V(US1) 3 FE 4 24 V(US1) 5 24 V(US2) 7/8 (5 ,) (XD1) 7/8 (

Compact Cylinder with Solenoid Valve/

Brown Brown Load Load Auto switch 1 Auto switch 1 Blue Blue Brown Brown Auto switch 2 Auto switch 2 Blue Blue Load voltage at ON = Power supply voltage Residual voltage x 2 pcs. = 24 V 4 V x 2 pcs. = 16 V Load voltage at OFF = Leakage current x 2 pcs. x Load impedance = 1 mA x 2 pcs. x 3 k = 6 V Example: Load impedance is 3 k. Leakage current from auto switch is 1 mA.

SX

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

Pressure Switch/Reed Switch Type

IS10E-4004 IS10E-4006 + 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 3/4 AC20m AR20m, AW20m AWM20, AWD20 Nil Set pressure 0.1 to 0.4 MPa 0.1 to 0.6 MPa V V V V V V 30 66 52 28 16 a 6 Note 2) range + AC25m, AC30m AR25m, AR30m, AW30m AWM30, AWD30 Nil 0.5 m V V V V V V V V V Semi-standard Lead wire 32 73 56 30 13 L Z b 3 m 5 m length r V + Note 2) AC40m AR40m, AW40m AWM40, AWD40 Nil Scale plate MPa

Brake mechanism added

V V V V V V Clevis pin V Single knuckle joint V V V V V V V Double knuckle joint (with pin) V V V V V V V Option With rod boot V V V V V V V * Refer to page 690 for dimensions and part numbers of the option.

CHKD/CHKG

Auto switch models Bore size (mm) 32 to 100 BMG2-012 D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-A9/A9V CHQ BMG2-012 CHK CHK Note 1) D-A9/A9V models cannot be mounted on 50. CHN CHM Examples of D-A9(V), M9(V), M9W(V), M9A(V) models mounted on CHKD.

48

V V V v v IC circuit 3-wire (PNP) M9PWV M9PW V V V v v Relay, PLC Diagnostic indication (2-color indicator) Grommet Yes 24 V 2-wire 12 V M9BWV M9BW V V V v v 3-wire (NPN) 5 V, 12 V M9NAV1 M9NA1 v v V v v IC circuit 3-wire (PNP) M9PAV1 M9PA1 v v V v v Water resistant (2-color indicator) 2-wire 12 V M9BAV1 M9BA1 v v V v v 1 Water-resistant type auto switches can be mounted on the above models

0.55

Residual Voltage Applied voltage DC 24 24 V Surge voltage suppressor AC 12 Approx. 1 V S, Z R, U Approx. 47 V Approx. 1 V Approx. 32 V 0 V Countermeasure for Surge Voltage Intrusion Caution Standard 1.55 W With non-polar type solenoid valves, at times of sudden interruption of the loading power supply, such as emergency shutdown, surge voltage

Cylinder with Lock Series CNS

5 V, 12 V IC circuit A96 5 V Yes A93 A90 A54 A59W A33 A34 A44 12 V 100 V Relay, PLC No IC circuit 5 V, 12 V 100 V or less 100 V, 200 V PLC Terminal conduit 2-wire 24 V 12 V Yes Relay, PLC 100 V, 200 V DIN terminal Grommet Diagnostic indication (2-color indication) Solid state auto switches marked with are produced upon receipt of order.

Compact Vacuum Ejector Series ZA

V V V V ZA1 B M 1 J1 ZA1 FB M 1 Q1 N2 ZA1 1 Q2 N2 ZA1 FP M 1 K1 M P Circuit diagram Dimensions of the vacuum (V) and air pressure supply (P) port fittings after installation Dimensions after the fittings are installed on the vacuum (V) port, air pressure supply (P) port of a single unit, and the common air pressure supply (P) port of a manifold are shown below.

Flow Sensor Series PFMV

IF Analog Output 1 to 5 VDC 4 to 20 mADC 5 20 Analog output [mA] Analog output [V] 1 4 0 0 0 5.00 1.00 5.00 0 1.00 Monitor display Monitor display 957 Series PFMV3 Internal Circuits PFMV300 NPN open collector output: 2 outputs Max. 30 V, 80 mA, residual voltage 1 V or less Analog output: 1 to 5 V Output impedance: Approx. 1 k PFMV303 PNP open collector output: 2 outputs Max. 80 mA, residual

7.4

V Rc1/8 V V 2 V 1(P), 3(R) 4 V Piping specifications 1/8" V 5/32" V Port size M3 V M5 V V 2 V V V Note 1) V 4(A), 2(B) 3.2 V V Note 1) 4 V V V Note 1) V 1/8" V V V 5/32" V V V Type of wiring C Kit: Connector C Kit: Connector S Kit: Serial transmission (EX510) C Kit: Connector Connector kit Connector kit Direct EXH outlet with built-in silencer V Page 755 Blanking plate assembly V V V Page

0.55

DIN or Conduit type 5 2 V 1 2 DIN connector (Refer to page 50.)

EXxx-OMU0020CN

General diagnostics 1 . 5-7 General Diagnostics 1 Bit 0 Maximum number of valves 016 132 1 Valve coil(s) short circuit 0() 1: 2 US1 diagnostics 1 0US1 ON 21.6 V 1US1 20.4 V 3 Reserved 0 4 US2 diagnostics 1 0US2 ON 22.8 V 1US2 21.6 V 5 US2 diagnostics 2 0US2 ON 17 V 1US2 OFF 17 V 6 Reserved 0 7 US1 diagnostics 2 0US1 ON 17 V 1US1 OFF 17 V 5.1.2.2.