53

operation of the compressor which can cool down 9.5 kW at 60 Hz.

Cylinder with Lock

E2 TA TC TD TF TH TL TO TR TS TT TU TX TY TZ UW XV Z 32 MB-S03 47 62 62 12 +0.070 0 47 35 45 12 7 10 13 8.5 50 71 74 49 131 153 40 MB-S04 54 80 80 16 +0.070 0 60 45 60 17 9 12 17 10 63 77.5 97 58 150 174 50 66 80 92 16 +0.070 0 60 45 60 17 9 12 17 10 75 91 109 71 166 198 63 MB-S06 77 100 110 20 +0.084 0 80 60 70 20 11 14 22 15 90 103 130 87 179 211 80 99 100 130 20 +0.084 0 80 60 70 20 11

7

AC Specification (Built-in Full-wave Rectifier Type) AC Specification (Built-in Full-wave Rectifier Type) Class B Class B Apparent power (VA) Note 1) 2) Temperature rise (C) Note 3) Apparent power (VA) Temperature rise (C) Model Model VXD23 to 25 VXD26, 27 VXD28, 29 VXD2A to 2C VXD2D, 2E VXD2F, 2G 7 60 9 60 9.5 70 10 70 12 14 70 70 Class H Class H Apparent power (VA) Note 1) 2) Temperature

100

50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 200 180 160 140 120 100 80 60 40 20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 200 180 160 140 120 100 80 60 40 20 0 Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Vacuum pressure Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] Suction flow rate Suction flow rate

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

70 X 60 70 ZZ 180 192 Model CY1B50 CY1B63 Mounting Nut/included (2 pcs.)

HRX-OM-X010

Table 3-5 Facility water temperature range Installation conditions Facility water temperature range(deg C) Ambient Relative temperature(deg C) humidity(%) 70 29 to 30 60 27 to 30 35 50 24 to 30 40 20 to 30 30 15 to 30 70 24 to 30 60 22 to 30 30 50 19 to 30 40 15 to 30 30 11 to 30 70 20 to 30 60 17 to 30 25 50 14 to 30 40 11 to 30 30 10 to 30 70 15 to 30 60 13 to 30 20 50 10 to 30 40 30 70

Vacuum Pad

Applicable pad 04S Applicable pad 06S Applicable pad 08S Applicable pad 10S Applicable pad 15S 60 70 60 60 60 4 4 4 4 4 1.5 1.5 1.5 1.5 1.5 4.1 0.8 1.5 2.5 4.1 6.1 3.1 1.6 4.1 10.1 6.9 4.9 2.1 3.9 10.9 Refer to pages 70 and 71 for adapter applicable to the ZP2 series. 30 Series ZP2 How to Order GS ZP2 T 06 S A3 With adapter Vacuum inlet direction Mounting Direction Vertical Symbol Symbol

MXS

MXS12-20 MXS12-10 0.02 0.005 20 40 60 80 100 120 0 0 0 20 40 60 80 100 120 60 20 40 80 100 120 Load (N) Load (N) Load (N) 3.11-8 Air Slide Table Series MXS Table defection by pitch moment Table deflection by yaw moment Table deflection by roll moment Table pitch deflection due to static pitch moment applied at arrow for fully extended stroke of slide table Table yaw deflection due to static

Booster Regulator/Air Tank

(P3 P2) x 9.9 V [L] = (Q Qb/2) x (Tc x K/60) Obtain the tank capacity V. (841 600/2) x (0.5 x 2/60) V = = 4.6 [L] (1.0 0.8) x 9.9 Applicable combination model Internal capacity Tank model VBAT05A(1) VBAT05S(1) VBAT10A(1) VBAT10S(1) VBAT20A(1) VBAT20S(1) VBAT38A(1) VBAT38S(1) 5L VBA10A/11A Select the tank capacity over V.

MXS Series Air Slide Table

-50 MXS12-40 MXS12-30 0.010 0.01 MXS12-20 MXS12-10 0.02 0.005 20 40 60 80 100 120 0 0 0 20 40 60 80 100 120 60 20 40 80 100 120 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf 49 MXS Series Air Slide Table Table Deflection Table deflection by pitch moment Table deflection by yaw moment Table deflection by roll moment Table pitch deflection due to static pitch moment

Air Cylinder

(74) 4.5 100 125 5 M22 x 1.5 100 Up to 300 301 to 1500 20 16 (20) 1/2 17.5 16 (17.5) 1/2 40 37 121 41 60 30 71 16 110 M12 x 1.75 10 26 6 14 65 60 (74) 6 120 150 7 M26 x 1.5 With Rod Boot (mm) (mm) With Air Cushion (mm) Bore size Rc, NPT port WA WB W WH GA GB P 20 12 10 (12) M5 x 0.8 16 15 (16) 25 1.5 25 12.5 10 (12.5) M5 x 0.8 16 14.5 (16) 25 1.5 32 12 10 (12) 1/8 16 14 (16) 25 1.5 40 13

39

Cylinder Specifications Bore size (mm) 25 50 Equivalent 40 63 Equivalent 80 Equivalent Clamping Unclamping 30 , 45 , 60 , 75 90 , 105 , 120 30 , 45 , 60 75 , 90 , 105 105 Angle Cushion Unclamping side: Rubber bumper Maximum operating pressure 0.8 MPa Ambient and fluid temperature 10 to 60 (No freezing) Minimum operating time 1.0 sec. to clamp, 1.0 sec. to unclamp Power clamp cylinder with

Vacuum Unit

exhaust Suction flow (High-noise reduction silencer exhaust) Vacuum pressure [kPa] 0 0 20 40 60 80 60 60 Suction flow [L/min (ANR)] 50 50 Suction flow (Silencer exhaust/ Complex exhaust) Suction flow (Silencer exhaust/ Complex exhaust) Flow Rate Characteristics 40 40 100 Air consumption Vacuum pressure [kPa] 30 30 80 60 20 20 40 High-noise reduction silencer exhaust 10 10 20 0 0 0.1 0.2

MY2

57 PC 7.2 8.2 5.5 PE 3.7 2.7 5 PG 4 6 9 PP 5.3 8 16 Q 152 198 312 QQ 16.4 20.4 25.5 PB 40 60 70 PD 2.8 6.6 8.5 PA 40 60 100 PH 5.1 7.5 9.5 "P" indicates cylinder supply ports.

AC

Coef. for compensation 20 10 0 10 30 40 50 60 Air temp.

Table of Contents

Note) 2 position single 1 2 Note) 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC G: Grommet C kit single only.

Air Cylinder Series MB

B TA TL TU TC TX TE TO TT TR TS TH TF TDH10 MB-S03 32 40 50 63 80 100 125 32 40 50 63 80 100 125 +0.070 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 +0.084 0 +0.084 0 46 52 65 75 95 114 136 45 60 60 70 70 90 105 8.5 10 10 15 15 15 18.5 62 80 92 110 130 158 186 50 63 75 90 110 132 160 74 97 109 130 150 184 212 12 17 17 20 20 26 26 13 17 17 22 22 24 24 10 12 12 14 14 17 25 35 45 45 60 60 75 85 89

Series AK1000

80 Flow rate (slpm, N2) AK1000HF 100 psig (0.69 MPa) 30 psig (0.21 MPa) Inlet pressure: 50 psig (0.34 MPa) 60 0.41 50 0.34 Delivery pressure (psig) Dlivery pressure (MPa) 40 0.28 30 0.21 20 0.14 10 0.07 0 0.00 0 20 40 60 80 100 120 140 160 180 200 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

Coolant Valve

Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz CE-compliant Nil Q 1 2 3 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Note) Electrical entry: D or DZ only 4 4 5 6 5 6 Manual override 7 7 Non-locking push type Non-locking push type A (projecting) Nil Semi-standard For other rated voltages, please

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Load Weight Allowable Moment MY2H/m3 MY2H/M3 MY2H/M1 MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 20 20 20 20 Load weight kg Moment Nm Moment Nm Moment Nm MY2H40 MY2H40 MY2H40 MY2H40 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 4 4 3 3 3 3 MY2H16 2 2 2 2 0.2 MY2H16 MY2H16 MY2H16 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300 400500 1000 1500 100