IDX-OM-X011

Troubleshooting . 6-1 6.2 Reset the Thermal relay and High Pressure Switch . 6-3 Chapter 7 Documents . 7-1 7.1 Specifications . 7-1 7.2 Refrigerant and GWP . 7-2 7.3 Dimensions . 7-2 7.4 Electrical circuit diagram . 7-3 7.5 Air and refrigerant circuits and functions . 7-5 Chapter 8 Option C . 8-1 8.1 Specifications . 8-1 8.2 Precautions for installation and handling . 8-1 Chapter 9 Option

7.4

S07 1 2 5 C4 G Connector kit 1 setManifold base part no. 2 setsValve part no. (Stations 1 to 2) 2 setsValve part no. (Stations 3 to 4) 2 setsValve part no. (Stations 5 to 6) 2 setsValve part no.

AIR COMBINATION

Recommended torque unit: Nm Screw 1/8 1/4 3/8 1/2 3/4 Torque 35 812 1520 2025 2830 *For port size M5: After tightening fitting, tighten approx. 1/6 more by using tool. Do not apply any torsional moment, or bending moment except the weight of the filter regulator itself. External piping needs to be supported separately.

HRX-OM-W004

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 AL01 : Low level in tank abnormal 1 AL02 : Low level in tank 2 AL03 : Phase loss / phase reverse error 7 3 AL04 : Water leakage 1 4 AL05 : Pump inverter error 2 5 AL06 : Internal fan stop 3 Alarm flag 1 6 AL07 : Fan Inverter error 8 7 Unused 8 AL09

S Couplers

Barb fitting type (for rubber hose) Barb fitting type (for rubber hose) Model Hose nominal Model Hose nominal KK130P-07B -09B -11B -13B KK130S-07B -09B -11B -13B 6 (1/4") 6 (1/4") 8 (1/4") 8 (1/4") 9 (3/8") 9 (3/8") 12 (1/2") 12 (1/2") The figures in ( ) indicate the internal diameter of the applicable hose.

3 Port Solenoid Valve

Winding direction Expose approx. 2 threads Pipe tape Class 1 Turbine Oil (with no additive), ISO VG32 3. Screwing in fitting When screwing fittings into valves, tighten as follows. 1) For M5 (1) When installing SMC fittings, etc., follow the procedures below. After tightening by hand, tighten an additional 1/6 rotation for M5 with a tool.

155

1 !2 !3 !4 !5 Pilot valve: SF4 u Pilot valve i Rated voltage !1 Manual override SF4 Nil 1 2 3 4 5 6 7 9 Push type Slotted locking type Nil B 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Others Equivalent to the standard models except for u, i, !1. Refer to page 378.

EXxx-OMN0037CN

5 4 3 2 1 0 MSB AD LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD LSB -31No.EX-OMN0037CN-A -32No.EX-OMN0037CN-A EX600-AM B M12 (5 )4 2 2 M12 (4 ) No. 1 LED 2 () 3 () 4 5 6 () -33No.EX-OMN0037CN-A 1 24 V() 24 V() 2 + 3 0 V() 0 V() 4 0 V() 5 FE FE 1M12 (4 ) 1 1 24 V NC 2 2 A/D DC24 V D/A DC24 V 3 34 0 V 0 V 4 5 FE FE 5 FE FE 100 k 250 1

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

Flow Rate and Effective Area AS12 1F-M3 AS13 1F-M3 AS12 1F-M5 AS13 1F-M5 AS22 1F-01 AS23 1F-01 AS22 1F-02 AS23 1F-02 AS32 1F AS33 1F AS42 1F AS43 1F Model Metric size 3.2, 4 3.2, 4, 6 3.2, 4 6, 8, 10 8,10 4 6 6 8 10 12 10, 12 Tubing O.D. 1/8" 5/32" 1/8", 3/16" 1/8" 5/32" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 3/8" 1/4" 1/4", 5/32" Controlled flow (Free flow

CEx-OMG0106

N Terminal No. 6 7 8 9 1 0 0 0 0 2 1 0 0 0 3 0 1 0 0 4 1 1 0 0 5 0 0 1 0 6 1 0 1 0 7 0 1 1 0 8 1 1 1 0 9 0 0 0 1 10 1 0 0 1 11 0 1 0 1 12 1 1 0 1 13 0 0 1 1 14 1 0 1 1 15 0 1 1 1 16 1 1 1 1 0Open between IN6~9 and COM 1Short circuit between IN6~9 and COM Set Home When dip switch is set ON, origins signal is inputted. When dip switch is set OFF, origin input is not required.

Non-contact Gripper

5 3 0.4 (MPa) 5 2.5 4 0.4 (MPa) 0.4 (MPa) Lifting force (N) Lifting force (N) Lifting force (N) 4 2 3 0.3 (MPa) 0.3 (MPa) 3 1.5 0.3 (MPa) 2 0.2 (MPa) 0.2 (MPa) 2 1 0.2 (MPa) 0.1 (MPa) 0.1 (MPa) 1 1 0.5 0.1 (MPa) 0 0 0 0 1 2 3 4 5 6 7 8 9 10 Distance from the workpiece (mm) 0 1 2 3 4 5 6 7 8 9 10 Distance from the workpiece (mm) 0 1 2 3 4 5 6 7 8 9 10 Distance from the workpiece (mm) Size:

Dedicated Controller

OFF SUP 1MC 5Ry SGDE servomotor Motor 1MC 1 R U V SGDE servo pack 2 1MC M T 3 W 1CN 4 150 PULS PULS SIGN SIGN CLR CLR 1 2 3 4 5 6 Be sure to ground.

Air Slide Table Series MXQ

Ma = K Mmax Work piece mounting coefficient K: Fig. 3 Allowable moment coefficient : Graph 2 Max. allowable moment Mmax: Table 4 Mar = 36 Mrmax = 36 K = 1 = 1 ' = 0.39/36 = 0.011 May = 1 x 1 x 18=18 Mymax = 18 K = 1 = 1 = 0.39/18 = 0.022 Find the load factor of the static moment.

MB1

6!9!2!8 !4w !7 i o A A' Cylinder tube sectional view A-A' !0 !1 Parts list No. q w e r t y u i o !0 !1 !2 !3 No. !4 !5 !6 !7 !8 !

Compact and Lightweight

Model 6 6 6 ZH05DA ZH07DA 1/4" 1/4" 1/4" ZH05DA ZH07DA One-touch One-touch SUP. EXH. 6 6 8 ZH10DA 1/4" 1/4" 5/16" ZH10DA 8 10 10 ZH13DA ZH15DA 5/16" 3/8" 3/8" ZH13DA ZH15DA 10 12 12 ZH18DA ZH20DA 3/8" 1/2" 1/2" ZH18DA ZH20DA One-touch Oval release button is only available with 6. VAC. One-touch and screw-in connection SUP. VAC. EXH. Model SUP. VAC. EXH.

Thermo-con/Rack Mount Type

400 W (Tap water)*1 510 W (Tap water)*1 800 W (Tap water)*2 1 kW (Tap water)*2 Heating capacity 600 W (Tap water)*1 1 kW (Tap water)*1 1.2 kW (Tap water)*1 1.4 kW (Tap water)*2 2 kW (Tap water)*2 Temperature stability*3 0.01 to 0.03C Pump capacity Refer to the performance charts.

Free Mount Cylinder for Vacuum Series ZCUK

Applicable cylinder bore (mm) 10 16 20 25 32 NTP-010 NTJ-015A NT-015A NT-02 NT-03 WCS4 x 0.7 WCS5 x 0.8 WCS6 x 1 WCS8 x 1 WCS10 x 1 9.2 11. 5 15. 0 19. 6 8 10 13 17 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 4 5 5 6 7.8 9.8 12. 5 16. 5 1261

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

3 @1 @0 !1 !0 !2 r w u e !5 y !9 u t MDHR3 !4 !3 q !1 @0 @1 w o e i !5 MHZ MHF r !7 !6 t !8 !0 !2 i !9 y u MHL Component Parts MHR MHR Description Material Description Material Note No. Note No.

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

Q = D __ 4 6 _ 1000 Q = (D d) __ 4 6 _ 1000 Formula (1) .

Cylinder with Turntable Series MGT

3 @2 @1 @5 !1 !0 Section AA @0 u @8 r y !6 @3 @4 e !7 w i t q A A @7 #3 @9 #0 #1#2 !8 !9 #4 @8 @6 !4 !5 Description Material Note Component Parts Description Material Note Component Parts No.