High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

A Input/output specifications 22 30 62 70 NPN open collector 2 output + Analog output Bracket D NPN open collector 2 output + Auto shift input Refer to the dimensions for the difference between brackets A and D. D PNP open collector 2 output + Analog output PNP open collector 2 output + Auto shift input Optional Note) Auto shift input is used for the auto shift function.

LEF-OM002xx

Bolts Size Belt Belt tension Part number (N) LEF16 LE-D-6-1 9.8 pull LEF25 LE-D-6-2 19.6 LEF32 LE-D-6-3 49.0 LEF40 LE-D-6-4 98.1 Bolts Size Tightening torque 6.Motor cover is installed. (Only "With motor cover") (Nm) M2.5 0.3610% M3 0.6310% M4 1.510% M5 310% The fingernail of "Grommet" is inserted in the hole of "Pulley box". Grommet 43 - 7.

OMU0023

122 7A z 27 1B ESC 59 3B ; 91 5B [ 123 7B { 28 1C FS 60 3C < 92 5C \ 124 7C | 29 1D GS 61 3D = 93 5D ] 125 7D } 30 1E RS 62 3E > 94 5E ^ 126 7E ~ 31 1F US 63 3F ?

Solid State Auto Switch:

[mm] (Reference value) 17 Weight 5.5 Most sensitive position [g] Auto switch model D-M9Nm-5 D-M9Pm-5 D-M9Bm-5 0.5 m (Nil) 7 6 Lead wire length 1 m (M) 13 11 3 m (L) 35 31 5 m (Z) 57 51 17-E683 D-M9m-5

MHF2

Protrusion of Auto switch Lead wire type In-line entry Perpendicular entry Illustration MHZ Auto switch Hysteresis L L Auto switch operating position (ON) Finger position MHF Auto switch operating position (OFF) MHL D-M9 D-F9W D-M9V D-F9WV Model MHR Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close 4.5 4.5 4.5

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

BBA4: D-C7/C8/H7 "D-H7BAL" switch is set on the cylinder with the screws above when shipped.

MHF2

Protrusion of Auto switch Lead wire type In-line entry Perpendicular entry Illustration MHZ Auto switch Hysteresis L L Auto switch operating position (ON) Finger position MHF Auto switch operating position (OFF) MHL D-M9 D-F9W D-M9V D-F9WV Model MHR Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close 4.5 4.5 4.5

1

Peak high and peak low display modes 7 Peak high and peak low display modes for PSE100 Z/ISE3, Z/ISE4, 4B, 4E, Z/ISE5B, 6B High High High High Peak mode high Peak mode high High Pressure Vacuum Pressure Vacuum Peak mode low Low Peak mode low Low Low Low Low Time Time Under most operating conditions the pressure will vary over time (see graph).

Microspeed Cylinder: Double Acting/Single Rod Series CQSX ø 12, ø 16, ø 20, ø 25 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

temperature None Rubber bumper Female threads Rod end threads JIS class 2 Rod end thread tolerance +1.0 0 Standard stroke: Stroke length tolerance Through hole/Double end tapped common Mounting 12, 16: 1 to 300mm/s 20, 25: 0.5 to 300mm/s Piston speed Minimum Strokes for Auto Switch Mounting Unit: mm D-A9, D-F9WV D-F9P B, D-F9W D-A9V D-F9N D-F9V Number of auto switches 2 pcs. 15 Note) 20 Note

AC Servo Motor Driver (SSCNET /H Type)

(SW1) (SW1) (SW2-3, SW2-4) (SW2-3, SW2-4) 0 33 0 49 1 34 1 50 2 35 2 51 3 36 3 52 4 37 4 53 5 38 5 54 6 39 6 55 ON ON 7 40 7 56 8 41 8 57 1 2 3 4 1 2 3 4 9 42 9 58 A 43 A 59 B 44 B 60 C 45 C 61 D 46 D 62 E 47 E 63 F 48 F 64 -14- 5. Parameter list (Driver side) Please configure the appropriate parameters to enable correct driver operation. Refer to [5.

This combination Filter/ Regulator minimizes space and piping by integrating the 2 units into one. Standard features include a relieving regulator, which can be quickly locked by pushing down on the adjustment knob. There are many options, which include gauges, auto-drain, metal bowl and covers, different set pressures, etc. The AW is part of the family of modular air preparation units and

Series AFM Modular Style Mist Separator is a cost effective, clean looking solution to your filtration needs. The standard filtration is 0.3µm with a 95% particle size collection rate. The modular design allows connection with other SMC air preparation equipment. Use in combination with the AF series to meet your clean room filtration requirements. The AFM is available in 3 size options.

Series AFM Modular Style Mist Separator is a cost effective, clean looking solution to your filtration needs. The standard filtration is 0.3µm with a 95% particle size collection rate. The modular design allows connection with other SMC air preparation equipment. Use in combination with the AF series to meet your clean room filtration requirements. The AFM is available in 3 size options.

Series AFM Modular Style Mist Separator is a cost effective, clean looking solution to your filtration needs. The standard filtration is 0.3µm with a 95% particle size collection rate. The modular design allows connection with other SMC air preparation equipment. Use in combination with the AF series to meet your clean room filtration requirements. The AFM is available in 3 size options.

This combination Filter/ Regulator minimizes space and piping by integrating the 2 units into one. Standard features include a relieving regulator, which can be quickly locked by pushing down on the adjustment knob. There are many options, which include gauges, auto-drain, metal bowl and covers, different set pressures, etc. The AW is part of the family of modular air preparation units and

Series AFM Modular Style Mist Separator is a cost effective, clean looking solution to your filtration needs. The standard filtration is 0.3µm with a 95% particle size collection rate. The modular design allows connection with other SMC air preparation equipment. Use in combination with the AF series to meet your clean room filtration requirements. The AFM is available in 3 size options.

This combination Filter/ Regulator minimizes space and piping by integrating the 2 units into one. Standard features include a relieving regulator, which can be quickly locked by pushing down on the adjustment knob. There are many options, which include gauges, auto-drain, metal bowl and covers, different set pressures, etc. The AW is part of the family of modular air preparation units and

Series AFM Modular Style Mist Separator is a cost effective, clean looking solution to your filtration needs. The standard filtration is 0.3µm with a 95% particle size collection rate. The modular design allows connection with other SMC air preparation equipment. Use in combination with the AF series to meet your clean room filtration requirements. The AFM is available in 3 size options.

Series AFM Modular Style Mist Separator is a cost effective, clean looking solution to your filtration needs. The standard filtration is 0.3µm with a 95% particle size collection rate. The modular design allows connection with other SMC air preparation equipment. Use in combination with the AF series to meet your clean room filtration requirements. The AFM is available in 3 size options.

This combination Filter/ Regulator minimizes space and piping by integrating the 2 units into one. Standard features include a relieving regulator, which can be quickly locked by pushing down on the adjustment knob. There are many options, which include gauges, auto-drain, metal bowl and covers, different set pressures, etc. The AW is part of the family of modular air preparation units and