25.2 30 20 20 10 30 60.5 (N02L: 61.5) 2 x M3 x 0.5 thread depth 4 ZSE ISE Piping port 02L: R1/4 N02L: NPT1/4 3.5 ZSP PS 8.8 Atmospheric vent port 2.6 ISA PSE IS 10.3 29.5 ISG ZSM Width across flats 17 M5 x 0.8 thread depth 5 41 2 25.2 49.5 58.8 64.8 Piping port Rc1/8 Piping port URJ1/4 Piping port TSJ1/4 -A2L: URJ1/4 -B2L: TSJ1/4 -C01L: Rc1/8 737 Series ZSE80/ISE80 Dimensions With bracket
(500) Vertical: 1.8 (50) Horizontal: 17.6 (500), Vertical: 3.5 (100) Optical linear encoder (incremental) Sensor 30 None 1.25 Provided 30 None 1.25 Provided 30 None 1.25 Provided Pushing operation 6 1 to 4.8 1 to 5 1 to 3.9 Positioning operation Positioning repeatability (m) Note 4)5) Accuracy (m) Note 4)5) 90 5 90 5 90 5 Measurement Maximum speed (mm/s)Note 6) 100 10 100 10 100 10 400 41
Antistatic specifications (FGDE, FGDF) Note) For a comparison with the nominal filtration accuracy according to the element category, refer to pages 41 and 42. 24 C
(Refer to the instruction manual for details on the cleaning.) 42 47 49.5 40 39.5 43 44.5 34.5 35.5 36 38 40 41.5 10 12000 14000 HAW75 45 48.5 52 45 41 43 45.5 34.5 35.5 36 39 40 42.5 15000 18000 20 HAW110 Conditions: Air pressure 0.7 MPa, Cooling water temperature 30C. Inlet air temperature 50C is saturated air. At 70C or more, it is humid air with dew point 67C. 16
1/41/8, 1/41/4C37PPSStainless steelNBR FKM EPDMAir, Oil--
------1/41/8, 1/41/4C37PPSStainless steelNBR FKM EPDMAir, Oil--
------1/41/8, 1/41/4C37PPSStainless steelNBR FKM EPDMAir, Oil--
1/41/8, 1/41/4C37PPSStainless steelNBR FKM EPDMAir, Oil--
------1/41/8, 1/41/4C37PPSStainless steelNBR FKM EPDMAir, Oil--
------1/41/8, 1/41/4C37PPSStainless steelNBR FKM EPDMAir, Oil--
1/41/8, 1/41/4C37PPSStainless steelNBR FKM EPDMAir, Oil--
------1/41/8, 1/41/4C37PPSStainless steelNBR FKM EPDMAir, Oil--
------1/41/8, 1/41/4C37PPSStainless steelNBR FKM EPDMAir, Oil--
1 15-9-41 Dimensions AS2000E/3000E 2-port size L7 Max. Min.
VMG1-06-150-300 VMG1-06-200-300 VMG1-06-150-600 VMG1-06-200-600 VMG1-06-150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 31 32 33 34 35 36 37 38 41 42 43 44 45 46 47 48 49 50 51 52 300 mm Note
Wiring 17 Flow Setting 20 Function Setting 22 Default settings 22 F0 Unit selection function 23 F1 Setting of OUT1 24 F2 Setting of OUT2 27 F3 Operating fluid 28 F4 Reference condition 29 F5 Response time 30 F6 Display mode 31 F7 External input 32 F8 Display resolution 35 F9 Auto-preset 36 F10 Accumulated value hold 38 F11 Analogue output filter 39 F12 Power saving mode 40 F13 Security code 41
Size: 31 (3/8), Model Combination: B (AF+AR), Port Size: 03 (3/8, Size 31), Accessory: C (Float Auto Drain, N.C., Size 31 & 41), Pressure Relief Valve: V (Downstream Valve), Option: 8 (Metal Bowl w/Sight Glass, Size 31 & 41)
Size: 31 (3/8), Model Combination: AF+AR+AL, Port Size: 03 (3/8, Size 31), Accessory: C (Float Auto Drain, N.C., Size 31 & 41), Pressure Relief Valve: w/o Valve, Option: 8 (Metal Bowl w/Sight Glass, Size 31 & 41)
Size: 31 (3/8), Model Combination: AF+AR+AL, Port Size: 03 (3/8, Size 31), Accessory: C (Float Auto Drain, N.C., Size 31 & 41), Pressure Relief Valve: V (Downstream Valve), Option: 8 (Metal Bowl w/Sight Glass, Size 31 & 41)