(11) M4 (13.5) 0.004 0.012 0 0.043 6 29 36 10 14 20 4.5 1.5 7 10 0.5 42 M5 M5 (10) M5 (18) 5.5 (16.5) 0.005 0.014 0 0.043 40 43 13 16 22 5 2 8 12 1.0 8 50 M5 Port location: Body side CRB1BW Size -lSSCRB Size , #1 Port location: Axial direction CRB1BW Size -lSESCRB Size , #3 1.1-9 Rotary Actuator/Vane Style Series CRB1 Double vane Port locations: Body side/ CRB1BW10-lD Port locations: Body
Stroke (mm) Refer to Standard Stroke on page 6-7-5. Applicable Auto Switch/ Refer to page 6-16-1 for further information on auto switches.
8 F 24 VDC 5 G DIN terminal 24 VDC With surge voltage suppressor A B D E H J L M 4 H 100 VAC Size 2 2 1/4 N.C. 7 J 110 VAC Aluminum 4 5 N.O. 3/8 K 200 VAC 7 L 230 VAC 4 8 7 Resin (With bracket) M Conduit terminal 24 VDC With surge voltage suppressor 4 N 100 VAC 10 7 P 110 VAC A B C D E F G H J K L M N 5 Q 200 VAC Size 3 3 N.C. 8 1/4 R 230 VAC 10 (N.C. only) 6 N.O.
With bowl guard (Nylon bowl) Note 7) Note 7) Note 7) Note 7) + Semi-standard t c With drain cock J Note 4) Drain guide 1/8 Drain guide 1/4 + d Flow direction Nil Flow direction: Left to right R Flow direction: Right to left + e Pressure unit Nil Name plate and caution plate for bowl in SI units: MPa Z Note 5) Name plate and caution plate for bowl in imperial units: psi, F Note 8)
None XLFV16-30-1-2 XLFV25-30-1-2 XLFV40-30-1-2 XLFV50-30-1-2 XLFV63-30-1-2 XLFV80-30-1-2 Yes XLFV16A-30-1-2 XLFV25A-30-1-2 XLFV40A-30-1-2 XLFV50A-30-1-2 XLFV63A-30-1-2 XLFV80A-30-1-2 XLG General use None XLG16-30-1-2 XLG25-30-1-2 XLG40-30-1-2 XLG50-30-1-2 XLG63-30-1-2 XLG80-30-1-2 High temperature None XLG16-30-1H-2 XLG25-30-1H-2 XLG40-30-1H-2 XLG50-30-1H-2 XLG63-30-1H-2 XLG80-30-1H-2 *
8 30 R 1/8 81 18 45.5 34 19.0 6 6 22.6 KK13P-01M KK13S-01M 14 42.5 R 1/4 31 R 1/4 86 22 24.1 7 -02M -02M 48.5 37 42.1 R 3/8 30.6 R 3/8 89 7.5 35.3 27 31.1 -03M -03M 17 10.2 53 44 44.8 R 1/2 35.8 R 1/2 108 51 32.1 -04M -04M 22 Reference dimension after installation.
area (mm2) 1.6 3.5 7 14 26 Note 1) Flow rate values are measured at 0.5 MPa and 20C.
for metal seal 3 position type 2-6-7 Series VQ5000 Base Mounted Plug Lead Unit: C Kit (Connector Kit) How to Order Manifold C W VV5Q 5 5 08 03 Series Option 5 VQ5000 Option None Exhaust cleaner for Rc 1: D side exhaust Exhaust cleaner for Rc 1 1/2: D side exhaust Exhaust cleaner for Rc 1: U side exhaust Exhaust cleaner for Rc 1 1/2: U side exhaust Symbol Nil CD1 CD2 CU1 CU2 SB SD SU W Manifold
NBR 1 1 P36203010#1 AP100 P36203010#1 Damper 7 NBR, other P36201021 1 1 P36202026 1 P36202026 O-ring 8 H-NBR 2.5 x 1.05 2 2 1.42 x 1.52 3 1.42 x 1.52 O-ring 9 NBR 1 1 4.5 x 1 3 3 4.5 x 1 4.5 x 1 4.5 x 1 O-ring 10 NBR 10 x 1.3 1 1 27.8 x 1.5 1 1 JISB2401P11 1 27.8 x 1.5 JISB2401P11 O-ring 11 NBR JISB2401P5 Note) 1 1 JISB2401P5 Note) O-ring 12 NBR JISB2401P16 Note) 2 2 JISB2401P16
Connection thread size (R, NPT, G) Proper tightening torque [Nm] 1/16, 1/8 3 to 5 1/4 8 to 12 3/8 15 to 20 1/2 20 to 25 Body size Maximum allowable torque [Nm] M5 0.05 1/8 0.07 1/4 0.16 3/8 0.2 1/2 0.4 2. Insufficient tightening may cause seal failure, or loosen the threads. 3.
8, 1/4, NPT 1/8, 1/4 27 22 22 76.5 75 33 30 (SUS) Stainless steel 19 13 81 Rc 1/4, 3/8, NPT 1/4, 3/8 37 26 37 112.5 110.5 47 36 M6 x 1 20.5 16 99 Rc 3/8, 1/2, NPT 3/8, 1/2 50 33.5 47.5 142 138 60 46 M8 x 1.25 44 10 11 55 3.5 Rc 1/4, NPT 1/4 27 37 20 4 77 75.5 36 30 56 19 15 80 5.5 Rc 3/8, NPT 3/8 37 46 34 7.5 111.5 109.5 47 36 PPS 68 20.5 22 99.5 5.5 Rc 1/2, NPT 1/2 50 57 42 8 142.5
IN MaterialO Model Body Seal Brass, Stainless steel NBR, FPM, EPR Orifice size (mm) Model Port size Rc(PT) VXA212 , 1 8 1 4 , 1 8 1 4 , 1 4 3 8 , 1 4 3 8 , 1 4 3 8 , 1 4 , 3 8 1 2 0 2 3 4.5 VXA213 0 2 VXA223 0 2 4.5 6 8 VXA224 0 2 VXA225 0 2 10 VXA226 0 2 4.1-57 VXA21/22 Normally Closed (N.C.)/Normally Open (N.O.)
Brass 1 Electroless nickel plated Body NBR, Aluminum alloy 2 Valve Stainless steel 3 Spring Free flow Fitting Male thread Brass 4 Electroless nickel plated Spacer Stainless steel 5 Stopper NBR 6 O-ring 7 Cassette NBR 8 Seal Stainless steel + NBR 9 Gasket Bushing Type: AKB Auto Switch D-B7/B8 D-G7/K7 R 1/4, 3/8, 1/2 NPT 1/4, 3/8, 1/2 R 1/8 NPT 1/8 Free flow Female thread Male thread Description
Note 1) 2 1/8, 1/4 3 3/8 4 1/2 Type Metric size Inch size 2 Elbow 3 Universal Tubing O.D. 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" Tubing O.D. 23 3.2 Note 2) 04 4 06 6 08 8 10 10 12 12 16 16 Control type 0 Meter-out 1 Meter-in * Meter-out and meter-in types can be visually identified by color of the knob.
--CNPN (1 output) + Analogue (4 to 20 mA) output type PFMB7--DMaximum applied voltage: 28 V Maximum load current: 80 mA Internal voltage drop: 1 V or less C: Analogue output: 1 to 5 V Output impedance: 1 k D: Analogue output: 4 to 20 mA Maximum load impedance: 600 NPN (1 output) + External input type PFMB7--GMaximum applied voltage: 28 V Maximum load current: 80 mA Internal voltage drop:
1 1.5 4 7 65 26.6 40.5 5.2 7 Options One-touch Fittings for Vacuum Regulator Bracket Assembly Bracket For IRV10(A) P601010-17 For IRV20(A) P601020-17 One-touch fitting for IRV10(A) 51A C6 VVQ1000 Bracket Fitting type Fitting size Nil L1 Straight Elbow Size 6 8 1/4" 5/16" Symbol C6 C8 N7 N9 One-touch fitting for IRV20(A) Bottom Bracket Assembly VVQ2000 C6 51A For IRV10(A) P601010-14 For IRV20
N1: 1/8 N3: 5/32 N7: 1/4 Top ports are indicated by LN.
7 9 SA 1 (P) VA 4 (B) 2 (A) 3 (R) 2 SA VA VH300/400 VM 8 5 6 VR 4 3 VH 1 9 VHS 7 4 (B) 3 (R) 1 (P) 2 (A) 2 VH600 6 5 4 1 7 1 (P) 2 (A) 4 (B) 2 3 (R) Component Parts Material VH200/300/400 Zinc die-casted Aluminium die-casted Description No.
16 70.5 3.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 87.5 20.5 M6 x 1 Depth 6 32 42 3 57 52 47 127 115 98 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10 M6 x 1 Depth 7.5 39 50 0 77 74 59 155 143 128 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4,