20 to 60C0 to 85%R.H.10 to 55 Hz 1.5 mm amplitude X, Y, Z directions for 2 hrs. each100 m/s2 (approx. 10 G) X, Y, Z directionOnly display unit with cover is equivalent to IP65.

20 to 60C0 to 85%R.H.10 to 55 Hz 1.5 mm amplitude X, Y, Z directions for 2 hrs. each100 m/s2 (approx. 10 G) X, Y, Z directionOnly display unit with cover is equivalent to IP65.

20 to 60C0 to 85%R.H.10 to 55 Hz 1.5 mm amplitude X, Y, Z directions for 2 hrs. each100 m/s2 (approx. 10 G) X, Y, Z directionOnly display unit with cover is equivalent to IP65.

20 to 60C0 to 85%R.H.10 to 55 Hz 1.5 mm amplitude X, Y, Z directions for 2 hrs. each100 m/s2 (approx. 10 G) X, Y, Z directionOnly display unit with cover is equivalent to IP65.

20 to 60C0 to 85%R.H.10 to 55 Hz 1.5 mm amplitude X, Y, Z directions for 2 hrs. each100 m/s2 (approx. 10 G) X, Y, Z directionOnly display unit with cover is equivalent to IP65.

20 to 60C0 to 85%R.H.10 to 55 Hz 1.5 mm amplitude X, Y, Z directions for 2 hrs. each100 m/s2 (approx. 10 G) X, Y, Z directionOnly display unit with cover is equivalent to IP65.

20 to 60C0 to 85%R.H.10 to 55 Hz 1.5 mm amplitude X, Y, Z directions for 2 hrs. each100 m/s2 (approx. 10 G) X, Y, Z directionOnly display unit with cover is equivalent to IP65.

20 to 60C0 to 85%R.H.10 to 55 Hz 1.5 mm amplitude X, Y, Z directions for 2 hrs. each100 m/s2 (approx. 10 G) X, Y, Z directionOnly display unit with cover is equivalent to IP65.

PS1000/PS1100

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP ISA2 IS ZSM PF2 IF Data Small, lightweight electronic pressure switch Extremely compact (1/3 size as compared to Series ZSE2) 13W x 10H x 30L (mm) 2-wire type Applicable to either NPN or PNP output.

How to Order MGQ M Cylinder stroke (mm) Refer to “ Standard Stroke ” on page 339. Slide bearing Ball bushing bearing Bearing type M L 12 mm 16 mm 20 mm 25 mm 32 mm Bore size 12 16 20 25 32 40 mm 50 mm 63 mm 80 mm 100 mm 40 50 63 80 100 M9BW 2 pcs. 1 pc. n

Thread type M5 x 0.8 Rc NPT G 12, 16 Nil TN TF 20 to 100 Applicable Auto Switch/Refer to pages 1719 to 1827 for further information on auto switches.

Diaphragm Valve for Ultra High Purity

Select compatible materials of construction for the gas Vacuum to 125 psig (0.9 MPa) 200 psig (1.4 MPa) 375 pisg (2.7 MPa) -10 to 71C (No freezing) S 316L SS Electropolish + Passivation Ni-Co Alloy PCTFE (Option: Polyimide) AZ4542 0.29 0.5 Inboard leakage Outboard leakage 2 x 10-11 Pam3/s 2 x 10-10 Pam3/s 1) 4 x 10-9 Pam3/s 1) Ra 10in. (0.25 m) Face seal, Tube weld 60 to 110 psig (0.4 to

Manifold Regulator ARM1000/2000 Series

n) + 23 (79 x n) + 25 (188 x n) + 43 (187 x n) + 45 Common IN Individual IN Common IN Individual IN 1 8 1 8 ARM1000 57 1 8 1 8 IRV 1 4 1 8 ARM2000 136 1 8 1 8 VEX How to Order SRH ARM 1000 A1 5 01 G SRP Semi-standard Regulator for manifold Nil 1 0.7 MPa setting (Standard) 0.2 MPa setting SRF Number of stations Note 1) Pressure gauge for 1.0 MPa is used.

20 to 60C0 to 85%R.H.10 to 55 Hz 1.5 mm amplitude X, Y, Z directions for 2 hrs. each100 m/s2 (approx. 10 G) X, Y, Z directionOnly display unit with cover is equivalent to IP65.

20 to 60C0 to 85%R.H.10 to 55 Hz 1.5 mm amplitude X, Y, Z directions for 2 hrs. each100 m/s2 (approx. 10 G) X, Y, Z directionOnly display unit with cover is equivalent to IP65.

CRBU2W20904.8 (3.5)M5 x 0.8M5 x 0.8905.6M5 x 0.8M5 x 0.8

CRBU2W15901.5 (1.0)M5 x 0.8M3 x 0.5902.6M5 x 0.8M3 x 0.5

20 to 60C0 to 85%R.H.10 to 55 Hz 1.5 mm amplitude X, Y, Z directions for 2 hrs. each100 m/s2 (approx. 10 G) X, Y, Z directionOnly display unit with cover is equivalent to IP65.

CRBU2W15901.5 (1.0)M5 x 0.8M3 x 0.5902.6M5 x 0.8M3 x 0.5

CRBU2W20904.8 (3.5)M5 x 0.8M5 x 0.8905.6M5 x 0.8M5 x 0.8

CRBU2W309011.3 (8.5)M5 x 0.8M5 x 0.89014.4M5 x 0.8M5 x 0.8