SMC Corporation of America
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Product number for single unit (to order separately) Table for combination High voltage power supply module / IZTP Controller / IZTC Ion generator (nozzle) / IZTN43 43 43-L 41 41-L IZT43 IZT43-L Transistor input/output type controller and high voltage power supply module and IO-Link type controller and high voltage power supply voltage cannot be mixed.

SV 41. Set the product operation when "Pump maintenance" alarm is generated with [] key or [] key, and press [SEL]key to enter. Table 5.20-28 Operation setting when "Pump maintenance" alarm is generated Set value Explanation Initial value (Default setting) This alarm is not detected.

PV SV HRSH Series 5.17 Pump Operation Mode Setting 5-41 HRX-OM-Q026 Chapter 5 Display and Setting of Various Functions 5.18 Warming Up Function 5.18.1 Warming up function Keep the power supply ON for this function. This function does not operate when the power is OFF.

HRZ Series 5.4 Examples of System Operation 5-41 5-41 HRX-OM-X010 Chapter 6 Error Message and Troubleshooting Chapter 6 Error Message and Troubleshooting 6.1 Error Message The following are to be performed in the event of an error in this system. The ALARM lamp comes on. Alarm buzzer comes on. The Alarm Display screen is displayed on the LCD screen.

Pg.7 53<56.5> 3.5 to 7 VFS 142.5 MAX.10 71.5 VS Indicator light Cover diameter 1.5 Cross section 0.23mm2 VS7 < >: AC 82.5 75 0 1 01 02 M plug connector (M): VQZ225 (R)lMl 57 Indicator light Cover diameter 1.5 Cross section 0.23mm2 (Lead wire) 300 122.5<124.5> 61.5<62.5> 73.5 147 58.5<63.5> < >: AC 1.12-41 VQZ1000/2000/3000 Base Mounted Dimensions: VQZ2000 3 position closed center/exhaust

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 34 (mm) (mm) C M8 x 1.25 40 ZPX40H-B01-B10 42 M10 x 1.5 Model A 40 ZPX40H-B01-B8 B 42 A B C D E F Y G 63 65 14.5 26 41 63 3.5 M10 x 1.5 Model ZPX63H-B01-B10 ZPX63H-B01-B12 ZPX80H-B01-B10 ZPX80H-B01-B12 63 65 14.5 26 41 63 3.5 M12 x 1.75 50 ZPX50H-B01-

Dimensions 40-41 -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Dimensions 40-41 -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

37.5 34.5 25.5 38.5 40 33 35.5 26.5 36 32 28.5 29.5 31 24 27 80 46 42.5 39.5 29.5 43.5 45 38 40.5 30.5 41 36 32.5 33.5 35 28 31 100 50 46.5 43.5 31.5 47.5 49 42 44.5 32.5 45 38 34.5 35.5 37 30 33 41 Compact Hydraulic Cylinder Double Acting/Double Rod: 3.5MPa Series CHQWB B 32 to 100 D-A9 D-F9 D-F9W A B Approx.

Double acting spring type Single acting RSH20T-PS RSH32T-PS RSH50T-PS RSH63T-PS RSH80T-PS Double acting RSH20D-PS RSH32D-PS RSH50D-PS RSH63D-PS RSH80D-PS RSH-R20 RSH-R32 RS1H-R50 RS1H-R63 RS1H-R80 Set of items 37 to 41 in above table Set of items 37 to 41 in above table (not including 39) The seal kits for 20 to 32 consist of items 37 to 41 and those for 50 to 80 consist of items 37 to 41

SV 41. Set the product operation when "Pump maintenance" alarm is generated with [] key or [] key, and press [SEL]key to enter. Table 5.19-28 Operation setting when "Pump maintenance" alarm is generated Set value Explanation Initial value (Default setting) This alarm is not detected.

B [Tightening torque] L[]ZB[]3 M30 x 1.5 [1820Nm] L[]ZB[]5 M45 x 1.5 [2426Nm] *Use locking m echanism when m ounting Caution L[]ZB[]3 4 Across flat 26 L[]ZB[]5 5 Across flat 41 42 Direct m ounting on the m otor the motor Model no.

Manifold Specifications for 41 and 42 Type Manifold Specifications for 41 and 42 Type SS5Y5-41 SS5Y5-42 SS5Y7-42 Port size Flow characteristics Model 52-SY740 52-SY540 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) 1,5,3 Model Applicable valve 4,2 (A,B) (P ,EA,EB) b Cv c[dm3/(sbar)] c[dm3/(sbar)] Single base / B mounting Manifold style b Cv SS5Y5-41 1 (SUP) / 3/5 (EXH) Common SUP / Common EXH 1/4

Connection Port CRBU2W10 CRBU2W15 CRBU2W20 CRBU2W30 90 CRBU2W40 90 Vane type Model (size) 180 270 90 180 270 90 180 270 90 180 270 180 270 Rotating angle Single vane Double vane Volume (cm3) 1.2 1.5 2.9 3.7 6.1 7.9 15 20.2 25 31.5 41 1(0.6) 1.5(1.0) 4.8(3.5) 11.3(8.5) Side ported M5 x 0.8 Port size Axial ported M5 x 0.8 M3 x 0.5 90 100 90 100 90 100 90 100 90 100 Rotating angle Volume (cm

Conduit terminal: VP3185-T A B DIN terminal: VP3185-D A B [110] 81 35 Light (For TL, TZ) Max.12 31.3 G1/2 Applicable cable 6 to 12 Light position (For DL, DZ) G1/2 NO NO PE PE [243] 237.6 239 228.5 213 31 31 130 130 52 52 41 41 105 105 [ ]: With indicator light (TL, TZ) 1312 Note) CE-compliant: D/DO only (Electrical entry) VP3145/3165/3185 Series Made to Order [Option] Please contact SMC

Installation 17 Wiring 17 Setting and Adjustment 18 LED Display 22 Specification 25 Specifications 25 Dimensions 26 End Plate Model Indication and How to Order 27 Summary of Product parts 28 Mounting and Installation 30 Wiring 30 Specification 32 Specifications 32 Dimensions 33 IO-Link Master Unit Model Indication and How to Order 40 Summary of Product parts 40 Mounting and Installation 41

ON-OFF 1 L/min ,10 11 12 1 L/min () SI SI PF3W ON-OFF () ON 0 PVC -15No.PF-OMM0004-D IN IN (75 ) 9022545 -16No.PF-OMM0004-D (PF3W704/720/740 ) (M44 ) 8 1.5 mm (81 ) (PF3W711 ) (M54 ) 2 mm (81 ) -17No.PF-OMM0004-D (PF3W704/720/740 ) 3.04 8 0.50.7 Nm (81 ) ,, (4 ) (PF3W711/721 ) ,(4.0,4 ) 1.01.2 Nm (81 ) (4 ) -18No.PF-OMM0004-D () M8 3/8 24 mm 1/2 27 mm 3/4 32 mm 1 41

PV SV 41. Select temperature alarm monitoring method from the table below with [] key or [] key, and confirm by pressing SEL. Table 5.16-20 List of set value Initial value Set value Item Explanation (Default setting) Alarm monitoring starts at the same time as it is turned on.

Pressure unit is MPa: Setting unit is 0.01MPa Pressure unit is PSI: Setting unit is 1PSI MPa to PSI to HRS-R Series 5.16 Alarm customize function 5-41 HRX-OM-X027 Chapter 5 Display and setting of various functions Changing of operation when communication error Setting and checking 20. Press the [SEL] key once.

PV SV 41. Select temperature alarm monitoring method from the table below with [] key or [] key, and confirm by pressing SEL. Table 5.16-20 List of set value Set value Item Explanation Initial value (Default setting) Continuous monitoring Alarm monitoring starts at the same time as operation starts.