System: Q (Vacuum Pump System for Manifold), Valves: R (Supply Valve; Self-holding, Release Valve; N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: E (Digital Pressure Switch for Vacuum, -100 to 100, NPN 2 Outputs), Connector: L (L-type Plug Connector, Lead Wire w/Connector & Lead Wire for Pressure Switch), Vacuum, V Port: 08 (Metric Size, ø8 One-touch Fitting), Bracket: w/o Option, Pump

High-precision Digital Pressure Switch

R Current read value For example, when the display value is 1.000[MPa], 5%R.D. is 5% of 1.000[MPa], which becomes 0.05[MPa]. When the display value is 0.800[MPa], 5%R.D. is 5% of 0.800[MPa], which becomes 0.04[MPa]. R.D. The pressure range within which the product will meet all published specifications.

PVC Quick Drain Valve

0 1 Body PVC 2 Housing PVC LVW LVW q 3 Poppet PTFE w 4 Union end PVC LQ1 5 Union nut PVC 6 O-ring EPDM FKM LQ3 7 O-ring EPDM FKM 8 O-ring EPDM FKM LVN 9 O-ring EPDM FKM 10 O-ring EPDM FKM LQHB OUT TL TIL TLM TILM Dimensions TD TID TH TIH D3 D2 D1 IN L1 L2 L4 L3 L1 2 x Rc1/8 (NPT1/8) Pilot port PA PB Dimensions (mm) Part no.

Related Products: Motor Operated Auto Drain Series ADM200

No. w q Description ADC12 ADC12 e Note) Description Cap Body Motor Cam SCS13 r t C3604B 20137-1A Valve assembly y NBR S-16 O-ring 14-20-50 Note) Motor port no. in the case of 100 VAC: 812PG-100VAC

Compressed Air Preparation Filter

Construction: AFF, AM, AMD t q IN OUT w Component Parts No. Description Material 1 Body Aluminum die-cast 2 Flange Aluminum die-cast 3 Bowl Stainless steel e r Replacement Parts No.

Quick Exhaust Valve Series AQ

Description AQ2000/3000/5000 AQ1500 AQ1510 Aluminum die-casted Zinc die-casted Zinc die-casted Body q Brass Brass Guide w Cover Aluminum die-casted e Replacement Parts Part no. Material No.

Manifold Regulator ARM1000/2000 Series

11.5 16.5 R 4.8 4.8 A 4.5 4.5 B 25 34.5 ARM1000 ARM2000 IC ITVH Dimensions by the Number of Stations Manifold stations (n) ITVX Model Symbol 1 36 27 48 39 2 55 46 76 67 3 74 65 104 95 4 93 84 132 123 5 112 103 160 151 6 131 122 188 179 7 150 141 216 207 8 169 160 244 235 9 188 179 272 263 10 207 198 300 291 L1 L2 L1 L2 ARM1000 PVQ ARM2000 VY1 VBA VBAT AP100 753

Manifold Regulator Modular Type ARM2500/3000 Series

Bonnet Common IN Individual IN Common IN Individual IN Polyacetal 2 Regulator Regulator ARM2500-A-02 ARM2500-B-02 ARM3000-A-03 ARM3000-B-03 9 1 Replacement Parts End plate R 10 1 Description Material Part no. End plate L 11 1 No.

Sine Cylinder Series REC

9 e r t q !3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts Qty. No. Description Material Note No.

Flame Resistant

0 06, 08, 10 Flow rate [L/min(ANR)] Flow rate [L/min(ANR)] i q y !2 !1 !3 Number of needle rotations Number of needle rotations AS3201F, AS3211F AS4201F, AS4211F r Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Component Parts No.

51

Calculation: (Example) CDG3BN40-150 Standard mass of movable parts: Table (2) Rod end [Basic], Bore size [40] 121 g Additional mass: Additional mass of stroke 61 x 150/50 = 183 g 183 g Switch magnet 13 g Total 317 g Construction With rubber bumper o r !0 t !2 q y e !1 i u w Contents Replacement Parts/Seal Kit Note No.

Sine Cylinder Series REC

9 e r t q !3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts Qty. No. Description Material Note No.

CL

w e r t y u i o !

Water Strainer

e w r No.

Water Regulator

M30 x 1.5 Panel cut dimension 30.5 q t Component Parts No.

Slit Valve

The product should be operated after thoroughly reading the manual and understanding its contents. 530 Slit Valve XGT Series Construction i u w q !2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Compact and

If the piping diameter is reduced, it may lead to insufficient flow of supply air, reduction of suction flow and reduction in the vacuum pressure. 1 The values indicating characteristics are representative values, and may vary depending on the atmospheric pressure (weather, altitude, etc.). 2 Supply pressure: 0.45 MPa Construction Model Selection Caution q t w r e y 1.

ADM200

No. w q Description ADC12 ADC12 e Note) Description Cap Body Motor Cam SCS13 r t C3604B 20137-1A Valve assembly y NBR S-16 O-ring 14-20-50 Note) Motor port no. in the case of 100 VAC: 812PG-100VAC

Air Cooled Aftercooler Series HAA 1

R S 1B union union 1 2 B 1 HA AT ID AMG AFF AM Misc. 14-15-3

Symbol: 3-Position, Pressure Center, Solenoid: Double, Voltage: 100V AC, Option: Indicator Light, Port Size: B02 [Bottom Piping 1/4 (R Port 3/8)], Thread: -, Connector: -, Q: -