ZPT/ZPX

9 35 35 10 9 9 M18 x 1.5 M18 x 1.5 10 H H Width across flats 16 Width across flats 16 45 28 Width across flats 37 4-M4 x 0.7 Width across flats 24 3-M3 x 0.5 G G 10 @ 10 F F @ E E Y Y 3 3 18 34 C C A A B D Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B D Dimensions

-fl Seies

9!"Bsr I l l c o M . I r + ) i (L.-,{+) i ,.-jq35' ) ,**'il-ffi:l;t I F * 5 | | --:a I ,r.t!!-asl |r,Ftn-i '**tb#";1.;'*'*lffi:';l .-^t /#!3 sL | ,..,9!!i,e, l 4s -s 1t^:!!-% , , ",",""" 1l-,:e!"6 ,tL--!9!!",qL+r |L-.!.S!"jqt+r , _^99!j,, r , .-i9!3r r-) tL--sq:L,d r+ ,_!t, r I 5.d"." 1l^:eqBi5, , lL--9s!L,. r+l ,.i9!4rr t I L_l-g!!",o r+l .-^AAr r L.^t9!3, , , ,..' ".' lt+e!'

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

9, @0 EX260 EX123/124/126 EX500 EX600 EX245 EX250 EX120/121/122 EX140 EX180 EX510 M8/M12 ATEX @1, @2, @4, @5 Type 1 Type 2 Type 3 Type 1 Type 2 @6, @7 @1 to @3 EX260 EX250 p. 233 p. 235 @6 to #0 @6, @9 VProduct Table Series Protocols No. Part no. Connector type Cable length EtherNet/IP End plate EX600-ED2m !

Series PF2W Digital Flow Switch For Water

A flow rate of up to 9 can be accumulated. The accumulated flow rate is reset when the power supply turns OFF. (With PF2A7H, it is possible to select a holding function.) Real-time switch output, accumulated switch output, or accumulated pulse output can be selected as an output type.

Thermo-chiller

Users equipment side To the thermo-chiller Users equipment side 1 2 SD+ RD Circuit diagram Internal Internal circuit circuit 3 5 SG SD 9 5 SD SG The terminal resistance of RS-485 (120 ) can be switched by the operation display panel.

5 Port Air Operated Valve

VFA3000 DXT031-30-11 DXT156-9-8 Note VFA5000 HNBR 7 Gasket 1/4: VF5000-71-1 3/8: VF5000-71-2 1/2: VF5000-71-3 8 1/4: VF3000-71-1 3/8: VF3000-71-2 Sub-plate Aluminum die-casted Round head combination screw (1 pc.) DXT031-44-1 (M4 x 39.5, With spring washer) Caution For mounting valve Tightening Torque for Mounting Valve Hexagon socket head cap screw (1 pc.)

VCW

Voltage VDW AC DC Thread type 5 6 9 24VDC 12VDC 1 2 3 4 9 100VAC 200VAC 110VAC 220VAC VC Rc G NPT NPTF Nil F N T (Other, less than 50VDC) LV (Other, less than 250VAC) PA AC specifications are only for DIN terminal and conduit terminal type. Port size Consult SMC regarding other voltages (9).

VQ20/30

Series VQ20 L dimension 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Stations No. L 6 8 11 13 15 17 20 22 24 27 29 31 34 36 38 40 43 45 47 50 85.5 110.5 148 173 198 223 260.5 285.5 310.5 348 373 398 435.5 460.5 485.5 510.5 548 573 598 635.5 Series VQ30 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Stations No.

PVQ10

= " 9 00 5 0 ' , > 5 0 77 $" 7 9 00 0 ++

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

(Displays [0] when the value is within the 9 to 9 L/min range.)

Digital Flow Switch (Integrated display type)

Although the accumulated flow value is measured up to 9 L, normally only the lower 3 digits are displayed. Press and hold the button to display the upper 3 digits.

Low Profile Slide Table Series MXF

9 !8 i !5 u !7 q !

LVQ

LVQ6m only LQ1 P Option (1) LVN Note) Options (2) cannot be combined with each other. 6 7 8 9 24 Nil 1 2 3 4 5 None With flow rate adjustment With bypass High back pressure with flow rate adjustment High back pressure with bypass Valve type 0 1 2 N.C. N.O.

ZL3-OM00601

No.ZL3-OM00601-B 9. Specifications 9.1. Ejector specification ZL3 Model No.

ZL3-OM00801

No.ZL3-OM00801-A / / ZL3 ZL6 No.ZL3-OM00801-A 2 1. 5 2. 6 3. 7 3.1. 7 3.2. 8 3.3. 9 3.4. 10 3.5. 12 4. 13 5. 14 6. 15 7. 16 8. 20 9. 21 10. 24 11. ,, 25 11.1. 25 11.2. 26 11.3. 26 12. 27 13. 28 1 - No.ZL3-OM00801-A /ZL3ZL6 *1) (ISO/IEC)(JIS) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating

IDX-OM-V020

IDFA60/70/80/90 Series 9.1 Specifications 9-1 IDX-OM-V020 Chapter 9 Option C 9.2 Precautions for installation and handling IDFA60/70/80/90 Series 9-2 IDX-OM-V020 Chapter 10 Option L Chapter 10 Option L Option L: Dryer with heavy duty auto drain.

Common Supply Regulator

Options 9 6. Structural Drawing and Replacement Parts 10 7. Assembly of Optional Parts 11 8. Operation and Adjustment 12-13 9. Trouble Shooting 14-15 10. How to Replace the Components 16-21 10-1. Diaphragm Assembly Replacement 16 10-2. Valve Guide Assembly and Valve Assembly Replacement 17 10-3. Square Embedded Type Pressure Gauge Replacement 18 10-4.

IO-Link/ELECTRO-PNEUMATIC REGULATOR

Default: Gain 9 Bit Bit 3, 2, 1, 0 Value Bit 3 2 1 0 Setting 0 0 0 0 Gain 0 0 0 0 1 Gain 1 0 0 1 0 Gain 2 0 0 1 1 Gain 3 0 1 0 0 Gain 4 0 1 0 1 Gain 5 0 1 1 0 Gain 6 0 1 1 1 Gain 7 1 0 0 0 Gain 8 1 0 0 1 Gain 9 * 1 0 1 0 Gain A 1 0 1 1 Gain B 1 1 0 0 Gain C 1 1 0 1 Gain D 1 1 1 0 Gain E 1 1 1 1 Gain F * indicates the initial shipping value. 16 - Parameter index 0x43 Parameter name Sensitivity

S Couplers

KKA3S-P01 KKA4S-P01 KKA6S-P01 Plug O-ring KKA7S-P01 KKA8S-P01 KKA9S-P01 14 Revision history A Safety Instructions added Selection: Warning No. 9 added Handling: Warning No.6 added B Mounting: Warning No.3 changed Changed notation of tightening method Handling: Warning No.5/8/9 added C -Fluid: N2 add 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298

Digital Pressure Switch ( compatible)

The order of displayed characters is A b Y (Z) 0 1 9 symbol space. (Characters which can be displayed are different for 1 digit on the left and 3 digits on the right.) Pressing the and button button to set. Return to function selection mode. simultaneously adds/deletes the dot (decimal point).