Compact Cylinder

through 15 KA H H1 Rod end nut Width across flats B1 NY EY D X C1 K NX A + Stroke B + Stroke L EX L1 Rod end male thread Basic (mm) Size Stroke range (mm) A B D EX EY F H K KA L NX NY Q Y 20 25 32 40 5 to 50 49 42.5 10 22 47 11.5 M5 x 0.8 depth 8 5 8 6.5 5.5 36 15 3 5 to 50 49 42.5 10 24 53 11 M5 x 0.8 depth 8 5 8 6.5 5 41 14.5 4 5 to 100 56 49.5 14 28 62 12 M8 x 1.25 depth 13 6 12 6.5 7 51

Rotary Actuator/Vane Style Series CRB2

(mm) E (g6) F (h9) M L K G D C B A Model A port B port CDRB2BWU10-S 4 9 10 0.5 9 3 14 45.5 15 29 CDRB2BWU15-S 5 12 15 0.5 10 4 18 47 20 34 CDRB2BWU15-D Rotary actuator CDRB2BWU20-S 6 14 20 0.5 10 4.5 20 51 29 42 B port A port CDRB2BWU20-D (34.5: Connector type) Angle adjuster CDRB2BWU30-S 2 x R 8 16 30 1 12 5 22 55.5 40 50 CDRB2BWU30-D Switch unit R Q Y P N Model 90 100 180 270 CDRB2BWU10

Possible to transfer a workpiece at low-speed.

Switch Proper Mounting Position (at Rotation End Detection) Solid state switch Reed switch Size Rotation angle A Operating angle ( m) Hysteresis angle B A Operating angle Hysteresis angle B ( m) 90 19 15 25.5 21.5 5 12 61 63 10 180 22 18 35 31 90 22.5 18.5 31 27 4 9 47 52 15 180 26.5 22.5 43.5 39.5 90 40 36 52.5 48.5 4 9 40 41 20 180 46 42 71.5 67.5 90 47 43 63 59 2 7 29 32 30 A 180 55 51

Compact Cylinder with Solenoid Valve/

lead wire (Lead wire length 300 mm) M MO M-type plug connector without connector 5 Series CVQM Dimensions 32 to 63 EXH 2 x P2 F SUP P1 S S Q 2 x HB through Manual button 2 x HA through V W 2 x 2 x OA effective length RA KA 2 x N through Y EB (KB) EA M J F1 (KB) KA 2 x 2 x OB counterbore depth RB M Z X B + Stroke L EB A + Stroke EA E Axial piping Bore size (mm) F1 32 40 50 63 30 34.5 43.5 51

Low Profile Guide Type

35.5 50,100,150,200,250,300 CY1F CY1F CY1F15 52.5 10 16 7 6.5 16 29 9 8 23 17 9 34 32 17 41.5 50,100,150,200,250,300,350,400,450,500 CY1F25 70 13 17 10.5 8 22 40 10 12 33.5 22.5 12 46 44 23.5 55 100,150,200,250,300,350,400,450,500,550,600 CYP Model KC KA KB KH KW L LA LL LW LZ ML MM N PA PB PC Q QA QB QW CY1F10 6.5 44 8 19 59 38 58 20 86 19 5 M3 x 0.5 18.5 40 40 8.5 90 4 12 33 CY1F15 6.5 51

VK3000

VK300-82-2-01 VK300-82-2-03 110 VAC 110V 200 VAC 200V VK300-82-2-02 VK300-82-2-04 220 VAC 220V VK300-82-2-07 VK300-82-4-51 VK300-82-4-06 VK300-82-3-05 VK300-82-3-53 240 VAC 240V 6 VDC 6V 12 VDC 12V 24 VDC 24VD 48 VDC 48VD 3-2-11

VK3000

VK300-82-2-01 100 VAC V100 VK300-82-2-03 110V 110 VAC 200 VAC 220 VAC VK300-82-2-02 200V VK300-82-2-04 220V S070 240V 6V 12V 24VD 48VD 240 VAC 6 VDC 12 VDC 24 VDC 48 VDC VK300-82-2-07 VK300-82-4-51 VK300-82-4-06 VK300-82-3-05 VK300-82-3-53 DIN terminal VQD VQD-V Light (Built-in connector) Marking Circuit with light AC Circuit diagram 12 VDC or less Circuit diagram 24 VDC or more Circuit

High Pressure Coolant Valve

219) 246.5 (248.5) 282 (284) 301 (303) 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41 50 135 164.5 200 219 50 60 79 90 77 1 8 1 2 3 x 3 4 3 x 1 1 4 95.5 111 119 VNH VNH 1 4 VND Note) ( ): CE-compliant product (-Q) VCC Model J K L M N O P Q R S T U VNH1 -10A A B VNH2 -15A A B VNH3 -20A A B VNH4 -25A A B M5 x 0.8 depth 5.5 M6 x 1 depth 6 M8 x 1.25 depth 6 M8 x 1.25 depth 6 20 24 24 29 36 48 51

Manifold Specifications

plug connector (L) DIN terminal (D) M plug connector (M) 300 (Lead wire length) MAX. 10 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 (mm) 2 110.5 100 88 11.5 3 135.5 125 104 16 4 148 137.5 120 14 5 160.5 150 136 12.5 6 185.5 175 152 17 7 198 187.5 168 15 8 210.5 200 184 13.5 9 223 212.5 200 11.5 10 248 237.5 216 16 Stations L1 L2 L3 L4 : With light/surge voltage suppressor 3-3-51

Large blow and

Do not use in an atmosphere having corrosive gases, chemicals, sea water, water steam, or where there is direct contact with any of these. 13 21.6 30 42 ZH -X185 ZH -X185 Air 0 to 0.7 MPa 5 to 80 (with no freezing or condensation) Refer to back page 50 for Safety Instructions and pages 49 to 51 for Vacuum Equipment Precautions.

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet A Width across flats 10 3 34.5 15 11 6 41 18 14.5 10 51 22 20.5 N S U F GN GS J K ZP3 T 10 13 16 B B5 15 59 40.5 10 20 66.5 48 JB K Dimensions Per Vacuum Inlet: One-touch Fitting 1.82 Bellows Type with Ribs Model D E F Fitting part min. hole size Fitting part no. Vacuum inlet direction q Pad dia.

ZSP1

Filter case Pin Slot Housing Filter element (ZX1-FE) Filter gasket Gasket groove Connector Socket Lead wire Hook 16-7-3 Series ZSP1 Dimensions Grommet type: ZSP10X Adjusting needle Pressure sensor Vacuum supply port ADJ 20 Adsorption nozzle port 08 7 48.3 Lead wire length 600 (3000) Adsorption nozzle port 0X: M5 x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 58 51 50 PV 6.5

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Rc G NPT Nil F N Port size 04 1/2 (Female thread) 14-20-51 Series ADH4000 Construction Component Parts q o i u !1 No.

NCQ8

Leakage current from switch is 1 mA. 51 Reed Switch Direct Mounting Style D-A90(V)/D-A93(V)/D-A96(V) Refer to www.smcworld.com for details of products compatible with overseas standards. Auto Switch Specification Grommet Electrical entry: In-line PLC: Programable Logic Controller D-A90, D-A90V (Without indicator light) D-A90, D-A90V Auto switch part no.

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Series HAW Water Cooled Aftercooler 1

70C 100C 41.5 43 45.5 37 43 49.5 37 43 45.5 37 42 43.5 40 44 46 39.5 43 44.5 41 43 45.5 A B C A B C A B C A B C A B C A B C A B C 35.5 36 36.5 33.5 36 38 33.5 36 36.5 33.5 35 36 34.5 36 37 34.5 35.5 36 34.5 35.5 36 38.5 40 42 36 40 45.5 36 40 42.5 36 40 41 38 40 42.5 38 40 41.5 39 40 42.5 200 300 400 500 1000 1500 2000 3300 4000 4000 5700 7000 HAW2 5 HAW7 5 37.5 47 51

IDG

auto-drain With drain guide Port size A B C D E F G H J K L M H H Model IDG3V/3HV/5V/5HV IDG10V/10HV 5.5 224 45 11 275 59 14 133 158 188 208 185 244 269 365 87 30 24 8.5 78 180 192 1/8, 1/4 7 102 41 35 11 92.5 201 242 IDG20V/20HV 1/4, 3/8 305 IDG30V/30HV 322 IDG50V/50HV 168 409 464 544 121 50 40 IDG60LV/60SV 77 18 9 239 246 13 112 278 IDG75LV/75SV 3/8, 1/2 334 180 IDG100LV/100SV 614 14-19-51

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Dimensions MSUA1 MSUA1-S/SE C 8-M3 x 0.5 depth 5 51 31 38 23.5 B 25 4-M4 x 0.7 depth 4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 22.5 4.5 +0.025 0 2.5H9 A Long groove depth 4 (Positioning pin hole) 35h9 0 0.062 22.5 3-3H9 depth 3 +0.025 0 +0.043 0 17 H9 ( A

CE

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) RS Q G 47.5 RS H A 17 RZQ 40 27 3.5 51 MI W S CEP1 CE1 Rod side flange style: CEP1F12 Stroke CE2 ML2B 4 (Positioning pin hole) C J G5-S CV 4 +0.05 +0.02 (Positioning pin hole) +0.05 +0.02 MVGQ 27 18 CC 6 RB 5.5 38 4-4.5 J 50 D-X 20Data 10-12

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

800) 258-9200-www.stevenengineering.com B1 K A N F N B C M S + Stroke H RHC ZZ + Stroke MK(2) RS Q G (mm) Bore size (mm) 40 50 63 80 100 Stroke range Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 RS H A B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51