The VQC series has five standard wiring packages bringing a world of ease to wiring and maintenance work, while the protective enclosures of three of them conform to IP67 standards for protection from dust and moisture. The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing manifold configuration. The VQC series

"END PLATE, 4/5 PORT SOLENOID VALVE

The VQC series has five standard wiring packages bringing a world of ease to wiring and maintenance work, while the protective enclosures of three of them conform to IP67 standards for protection from dust and moisture. The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing manifold configuration. The VQC series

Table of Contents

TI/ TIL 5 PA PAX Material Model PB %# & 1 & VXA212 0 2 2 0 2 . 2 0 2 . 2 . 0 2 . 0 2 . 0 2 . 0 2 ) .!* VXA213 0 2 VXA223 VXA224 VXA225 0 2 .!* / 0 0 2 0 2 2( VXA226 0 2 17-3-93 2 The VX series will be revised shortly. Series VXA21/22 Normally Closed (N.C.), Normally Open (N.O.) Fluid JIS Symbol N.C.

Electric Actuators

(A contact) 1 2 1 pc. 2 pcs. 6 6 pcs.

AC Servo Motor Driver

INSTALLATION 2 1 to 2 6 2.1 Installation direction and clearances . 2 3 2.2 Keep out foreign materials . 2 4 2.3 Cable stress . 2 5 2.4 Inspection items . 2 5 2.5 Parts having service lives . 2 6 3.

Smooth Cylinder/Low Speed Cylinder

(n=2, 3, 4, 5) (n-2) 2 35 + 35 (n-2) 20 + 35 (n=2, 4, 6) Note 3) D-M9V 5 35 20 (n=2, 3, 4, 5) (n-2) 2 25 + 35 (n-2) 15 + 35 (n=2, 4, 6) Note 3) D-A9V 5 25 15 (n=2, 3, 4, 5) (n-2) 2 D-M9WV D-M9AV 35 + 35 (n-2) 20 + 35 (n=2, 4, 6) Note 3) 10 35 20 (n=2, 3, 4, 5) (n-2) 2 50 + 45 (n-2) D-C7 D-C80 15 + 45 (n=2, 4, 6) Note 3) 10 50 15 (n=2, 3, 4, 5) D-H7 D-H7W D-H7NF (n-2) 2 60 + 45 (n-2) 15 +

Fluoropolymer Piping Equipment

Class Class No. 1 1 2 2 2 2 2 2 3 3 3 3 3 3 3 3 3 3 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1 2 1 2 C 3 4 F 1 2 3 4 5 6 7 E 9 10 1 2 3 4 5 6 F 9 1 2 3 4 5 7 8 9 1 2 3 4 5 6 1/8" A A B C D E F A B C D E F A B C D E F G A B C D E F G H A B C D E F 1 2 2 2 2 2 2 3 3 3 3 3 3 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1/8" 1/8" 1/8" Branch tee female Run tee male Run tee female 1/4" A A 1/4

LX

(A contact) 1 2 1 pc. 2 pcs. 6 6 pcs.

LEC-OM02904

2(No.PB45) ()150ms (1) 2 t t 2 2 2 2 7 17 7 (2) No.PB4522 [Hz] PB45 No.PB45 0 2 2 [Hz] [Hz] [Hz] 0 1 2 3 4 5 6 7 8 9 A B C D E F 40.0dB 24.1dB 18.1dB 14.5dB 12.0dB 10.1dB 00 01 02 03 2250 1125 20 21 22 23 24 25 26 27 28 29 2A 2B 2C 2D 2E 2F 30 31 32 33 34 35 36 37 38 39 3A 3B 3C 3D 3E 3F 70 66 62 59 56 53 51 48 46 45 43 41 40 38 37 36 40 41 42 43 44 45 46 47 48 49 4A 4B 4C 4D 4E

10

Applicable fluid 1 Model Air Water Oil Steam Medium vacuum For Air For Air VX2 0 Page 5 2 For Medium vacuum For Medium vacuum VX2 4 Page 10 2 For Water For Water VX2 2 Page 14 2 2 For Oil For Oil VX2 3 Page 16 Can be used with heated water. 2 2 2 For Steam For Steam VX2 5 Page 18 1 For details, refer to pages 45 and 46. 2 Refer to the individual specifications for each fluid.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

16.2 34 16.2 17 34 B 2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 R 3 R 3 P 1 A 4 A 4 A 4 A 4 A 4 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, 5/32" 6, 1/4" One-touch fitting (X, PE port) Applicable tubing O.D.: 6, 1/4" M5 x 0.8 [4(A), 2(B) port] Applicable D-sub connector: equivalent { } JIS-X-5101 MIL-C-24308 (L4) L3 (3.2) 101.2 Switch

7

Rainproof type Splashproof type 2.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

Applicable piping size Applicable tubing size (mm) 2 2 2 2 2 3 3 3 3 3 3 3 3 4 4 4 4 5 5 5 6 6 6 Size No.

1

With X417 (2 pcs.)

Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

RX(n+2).0 Digital input 0 (CN0, pin.2) RY(n+2).0 RX(n+2).1 Digital input 1 (CN1, pin.2) RY(n+2).1 Rserve RX(n+2).2 Digital input 2 (CN2, pin.2) RY(n+2).2 RX(n+2).3 Digital input 3 (CN3, pin.2) RY(n+2).3 RX(n+2).4 Digital input 4 (CN0, pin.4) RY(n+2).4 Digital output 0 (CN0, pin.4) RX(n+2).5 Digital input 5 (CN1, pin.4) RY(n+2).5 Digital output 1 (CN1, pin.4) RX(n+2).6 Digital input 6 (CN2

New

equipment Av Cv 2.

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

For details, refer to page 2-4-92.

OMU0023

Check End Details of code error sum code ) 1 byte 2 bytes 2 bytes 2 bytes 2 bytes 2 bytes The MSB of the Problems 01-FF code Note 4) LRC CR, LF function code is changed to 1.

A_HEC-OM-K001

Air is sucked in from the controller side and discharged through the back via this fan. (9) Fan (Outlet of air) 2.1 Temperature Controller 2-1 A_HEC-OM-K001-1.7 Chapter 2 Description and Function of Each Part 2.2 Heat Exchanger (5) (6) (8) (2) (7) (4) (1) (3) Fig.2-2 Heat Exchanger Table 2-2 Heat Exchanger No. Name Description Inlet port of chemicals.