Rated Vacuum Range: -101 to 0 kPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: C4L (ø4 One-touch Fitting, Elbow Type), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: D (Panel Mount Adapter + Front Protection

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

2 q u r !0 !1 e !4 !3 w !0 !

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

6 8 34 25f8 5.5 M10 x 1.25 17 15 M24 x 1.5 1/8 81 11 3.5 5.5 143 10 46 32 8 9 40 31f8 7.5 M14 x 1.5 18 15 M30 x 1.5 1/8 87 13 3 4 159 10 53 40 10 11 48 34f8 7.5 M16 x 1.5 22 21 M33 x 2 1/4 108 16 5 0 183 16 54 8 Series CHN Dimensions Single clevis type: CHNC Width across flats B1 MM GA2 NN Rc P GB2 Rc P Rc P Cushion valve Cushion valve GB1 V T Cushion valve H1 GA1 CD Push press fitting W

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MGOM.,/Slide bearing MGQL,,/Ball bush bearing MGQL12-25-3O more stroke MGOM'12-2s-Lil . 5 O l O O , MGQM32-1OO t l01ooT P=o.5MPa 1 ,*"1 -Tt r t r . l 080 ; , . d63 t t , 5od ' l4oo o50 E;\ .' !

5 Port Air Operated Valve Series SYA3000/5000/7000 1

R port thread type Series 3 SYA3000 5 SYA5000 Nil Rc G F 40 SYA 7 1 Base mounted N NPT NPTF T P, R port thread type Type of actuation Nil Rc 2 position single G F Port size 1 N NPT Symbol Applicable series Nil Port size Without sub-plate NPTF T 2 position double 1 8 01 SYA3000 Port size With sub-plate 2 Symbol Nil Port size Without sub-plate Without sub-plate (Pilot port: Expect RC) 1 4

Air Cylinder NCM Series Stainless Steel Cylinders

S 1 p c . n n p c s . L Long leads uountng B Front Nose Mount C -Rear Pivot E -Double End K -Non-Rotating Rod R -Block Mount W-Double Rod Auto.Switch 853. D-853 Gsg D-G59 B54. D-854 K59 D-K59 864 .

Air Cylinder MGQ Series Compact Guide Cylinder

MGOM.,/Slide bearing MGQL,,/Ball bush bearing MGQL12-25-3O more stroke MGOM'12-2s-Lil . 5 O l O O , MGQM32-1OO t l01ooT P=o.5MPa 1 ,*"1 -Tt r t r . l 080 ; , . d63 t t , 5od ' l4oo o50 E;\ .' !

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Series 0.5 316 SS Knob with a raised section on top (indication window) 250 (1.7) AK3652 0.29 P.3 Compression Rc, R, NPT Female thread type Compression AK4652 Note) Cv calculation based on SEMI Standard Series AZ For details, refer to the product catalog available on SMC website.

Clean Regulator/Fluororesin Type

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Gun Type Ionizer

186 q Installation Distance and Discharge Time p. 182 Alarm p. 186 w Static Neutralization Range p. 183 Mode Switch Setting p. 187 e Pressure Flow Rate Characteristics p. 184 Wiring p. 187 Dimensions p. 188 How to Order p. 185 Accessories (for Individual Parts) p. 185 Related Products p. 189 Specifications p. 186 AC Adapter Specifications p. 186 Specific Product Precautions p. 190 Parts

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3 r !5 u q y e t !2 w i A CJ1 CJP CJ2 A Cylinder tube sectional view A-A !0 o CM2 CG1 Component Parts MB No. q w e r t y u i o !0 !1 No.

Direct Operated Precision Regulator Modular Style Series ARP3000 1

ARP3000-02 VY1 G ARP3000-02BG PPA How to Order JIS Symbol AL ARP 3000 BG R 02 Option Direct operated precision regulator Nil None Reverse flow R Thread type Accessory Nil N F Rc NPT G Nil None With bracket With pressure gauge B G Pressure gauges are shipped together with regulator, (but not assembled).

ZMA

ZF ZP ZCU How to Order Ejector Manifold AMJ ZZMA 06 06 R Misc. Number of stations Port and silencer location R L B 01 1 station Right side Left side Both sides 10 10 stations (max.) Note) Right and left side are viewed from the front side of VAC port.

ZB-OM00301

FA 3m 27 (M230) 2 O 1 No.ZB-OM00301 Assy ZB1ZS A M G A E 0.0~-101.0KPa G (2m) F -100.0~100KPa ZS-39-5G A NPN2 B PNP2 1) M SI2) P (psi)1) 1) (M230) 2 2)kPa O 1 V Assy 45 2 V Assy 45 (V Assy ) A ) 28 - No.ZB-OM00301 A R R Nm 0.0540.08 R R ON OFF R 29 - No.ZB-OM00301 3 P911 Nm 0.075~0.096 M2 / 3 Assy Assy / / O (/) O 30 - No.ZB-OM00301 [L/min(ANR)] V

EXxx-OMV0017-D

Power off is displayed when power is not supplied. 3 Power status Indicates the connection status of the PCNFC reader / writer. 4 R/W connection status R/W undetected: NFC reader / writer is not identified or USB is not connected.

2-Color Display Type High-Precision Digital Pressure Switch Series ZSE30/ISE30

If the power should not come back on, please contact P/A for an inspection.

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

When a large number of valves will be operated simultaneously, use type B (supply/exhaust on both sides), applying pressure to the P ports on both sides and releasing exhaust from the R ports on both sides. Note 2) The value is for manifold base mounting (5 stations). 2 position type with single action. Note 3) The weight W is the value for the manifold only.

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

When a large number of valves will be operated simultaneously, use type B (supply/exhaust on both sides), applying pressure to the P ports on both sides and releasing exhaust from the R ports on both sides.

AME

) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bracket 2-port size (Option) Maintenance space M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 146 167 167 198 198 I 56 66 66 80 80 J 15 20 17 22 19 K 5 8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3

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3 r !5 u q y e t !2 w i A CJ1 CJP CJ2 A Cylinder tube sectional view A-A !0 o CM2 CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Component Parts MB No. q w e r t y u i o !0 !1 No.