High Vacuum L Type Valve

Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

CEx-OMQ0011

100 100 50 50 0 0 0 5 m/s m/s 19 4-3.

MXS Series Air Slide Table

Applicable auto switch lead wire length(m) Load voltage Auto switch part No.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

MRQ 1 3 7 20 MSUA1 MSUA3 MSUA7 MSUA20 Electrical entry/Lead wire length DNil L C CL CN Grommet/Lead wire: 0.5 m Grommet/Lead wire: 3 m Connector/Lead wire: 0.5 m Connector/Lead wire: 3 m Connector/Without lead wire 20Rotating angle Symbol Applicable Rotating angle Available only with R73, R80 and T79 type connectors. Lead wire with connector part nos.

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

Locking style Turn 90 to counterclockwise pushing M/O button. Lock is released when G on cap and H OFF mark on M/O button correspond. (Lock remains released.) When locking is desired, turn M/O button clockwise 90 while pushing fully, correspond G on cap and H ON mark on M/O button. The correct position is confirmed by click sound "click".

Series TPH Clean Tubing Polyolefin Tubing

R. Fittings & Tubing Air Cylinders Rotary Actuators How to Order TPS0604 B 20 Tubing model Color Length per roll Symbol W B R BU Y G Color White Black Red Blue Yellow Green Symbol 20 100 Length 20 m roll 100 m reel 20 m roll 100 m reel Burst Pressure Characteristics Curve and Operating Pressure Model TPS0604 TPS0805 TPS1065 TPS1208 TPS0425 Model 5 6 8 10 12 4 O.D.

EXxx-OMV0017-D

EXW1 EXW1 Up to 100 m V.1.0 / V.2.0 Available *1 EXW1 EXW1+EX600 *2 V.1.0 Not available EXW1 EX600 Up to 10 m V.1.0 Not available EX600 EXW1 Up to 10 m V.1.0 Not available Available *3 EX600 EXW1+EX600 Up to 10 m V.1.0 Not available Available *3 EX600 EX600 Up to 10 m V.1.0 Not available Available *1 Available in protocol V.2.0. *2 Up to 100 m between an EXW1-series Base and Remote, and up

HRX-OM-X071

Altitude [m] 1. Max. ambient 2. Cooling capacity temp.

Series PF2W Digital Flow Switch For Water Refer to www. poweraire .com for details of products compatible with overseas standards.

Cable wire color Terminal 1 Brown DC+ q 2 Not used N.C. w 3 Blue DC e 4 White IN: 1 to 5 V r Power supply / Output connector (8P) Power supply / Output connector (accessory) i u y t r e w q Pin No. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.

Precautions 1

Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ None N (Example) H7CN Since there are other applicable auto switches than listed, refer to page 1581 for details. For details about auto switches with pre-wired connector, refer to pages 1784 and 1785.

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Port size Symbol Cylinder side In the side of solenoid valve M5 01 Elbow M5 x 0.8 R 1/8 M5 x 0.8 Rc 1/8 Rc 1/4 Note 1) 02 R 1/4 Rc 3/8 Note 2) 03 04 F01 Rc 3/8 Rc 1/2 G 1/8 G 1/4 Note 1) R 3/8 R 1/2 R 1/8 Caution Control F02 R 1/4 Meter-out Meter-in Be sure to read before handling.

Clean Gas Filter

Construction q t e r w IN Description No.

Compact Guide Cylinder Series MGQ

Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Since there are other applicable auto switches than listed, refer to page 351 for details. For details about auto switches with pre-wired connector, refer to pages 1784 and 1785.

1

Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ The auto switch is shipped together, but not assembled.

JXCx-OMT0062

itself. (5) Do not energize to the BK R LS terminal when there is a necessity to shut down the motor drive power (M 24V) externally.

Electric Actuator Miniature Rod Type Miniature Slide table Type

Condition 1) 15mm position Step no.0 Step no.0 (Move M: Relative) No.

Polyurethane Tubing Series TU/TIUB  — 20 m roll  — 100 m roll Model/Specifications For general pneumatic tubing — Option — Manufactured upon receipt of order (Please consult with SMC.) Flexible Tubing size Polyurethane tubing Metric size (Series

TU0425 TU0604 TU0805 TU1065 TU1208 TIUB01 TIUB05 TIUB07 TIUB11 TIUB13 Color 100 m reel Black, White, Red, 200 m reel X3 Blue, Yellow, Green, 400 m reel Clear, Orange 500 m reel X4 20 m roll Red, White, Yellow, Green, Clear, Orange 373 Soft Polyurethane Tubing Series TUS Suitable for piping in confined spaces Extremely flexible Soft polyurethane tubing Model/Specifications 20 m roll

CU

Lead wire length (m) Load voltage Auto switch part no.

Digital Pressure Sensor

M5, R(PT) 1/8, R(PT) 1/4 Mounting bracket .M5 style only 3.6-1 Digital Pressure Sensor GS40 How to Order GS40 X202 Digital Pressure Sensor PSE ZSE4 ISE4 Port size Optional M5 (Female) R(PT)1/8 R(PT)1/4 5m-long lead wire X202 M5 01 02 ZSE5 ISE5 ZSE6 ISE6 Accessories B None Bracket (M5 style only) ZSE3 ISE3 GS PS Specifications ISA Model GS40-M5 GS40-01 GS40-02 ZSE1 ISE1 Air or inert gas Fluid

VDW30/40-XF

Compact / Lightweight 2 Port Solenoid Valve VDW30/40-XF Series For Air/Water Compact / Lightweight resin body (PPS) IP65 RoHS Weight: 120 g (VDW30-XF) n t r e y l d a i 30 mm c r e i r c e s l t e e c c t b t i Power consumption e e o n d l a n .