The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, PRESSURE SWITCH, ISE1-6, N59, 73.00000 lb

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, PRESSURE SWITCH, ISE1-6, N59, 73.00000 lb

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, PRESSURE SWITCH, ISE1-6, N59, 73 lb

HRX-OM-M090

Allowable voltage range 10% Circuit protector17 A 10 (For option -T-MT : 15 Electric system Applicable earth leakage breaker capacity9 A 10 (For option -T-MT : 15 (50/60Hz) A 4.6/5.1 4.7/5.2 5.1/5.9 Rated operating current4 For option -T-MT : 5.6/6.7 For option -T-MT : 5.7/6.8 For option -T-MT : 6.1/7.5 consumption4 (50/60Hz) kVA 0.9/1.0 0.9/1.0 1.0/1.2 Rated power For option -T-MT : 1.1/

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Pressure Control Equipment Specifications 0 to 1 MPa Rated pressure range Output Specifications 0.1 to 1 MPa Set pressure range NPN open collector output 1.5 MPa Withstand pressure Max. 30 V, 80 mA Residual voltage 1 V or less 0.01 MPa Set pressure resolution 12 to 24 VDC, Ripple (p-p) 10% or less (with power supply polarity protection) Power supply voltage Brown DC (+) 55 mA or less (at

CE2

(Example) 40D-A3C-4, 63D-A3C-6, 100D-A3C-10 50D-A3C-5, 80D-A3C-8 1.08 0.32 0.38 0.38 0.73 Double knuckle Accessory bracket 0.19 0.05 0.05 0.05 0.14 Knuckle pin 10-12-49 7 Series CE2 Dimensions: 40 to 100 RC 1/4 Pressurized locking port RC P Rod side cylinder port RC P Head side cylinder port Basic style RC 1/4 Unlocking port Unlocked when pressurized 7 (6 core twisted pair shielded wire)

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

Compatible motor Actuator part number P Step motor (Servo/24 VDC) (Except cable specifications and actuator options) Example: Enter LEMB25T-300 for the LEMB25T-300W-S12N1.

1

flats H Maximum thread depth P Weight JT20 M8 x 1.25 19.2 8 11 (25.4) 23 10 13.6 22 9.5 22 g JT32 M10 x 1.25 23 10 13.4 (30.6) 28 12 16.3 27 11.5 38 g JT40 M14 x 1.5 29 14 19 (40.4) 37.4 17 20.3 36 15.5 98 g * Value in ( ) is the dimension when the dust cover is used.

Magnetic Separator FHM Series

Micromesh element Element size Description Model Port size Micromesh element (With relief valve) EM040-12 3/8, 1/2 55 x L90 FH34 FH44 FH54 FH64 (Refer to P. 511.) EM910-12 3/4, 1 74 x L117 EM140-12 Line filter 1 1/4, 1 1/2 74 x L195 EM930-12 2 88 x L282 EM240-12 2 1/2, 3 119 x L280 EM810-12 3/4, 1 65 x L95 EM910-12 1 1/4, 1 1/2 74 x L117 FH100 (Refer to P. 518.)

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Pressure Control Equipment Specifications 0 to 1 MPa Rated pressure range Output Specifications 0.1 to 1 MPa Set pressure range NPN open collector output 1.5 MPa Withstand pressure Max. 30 V, 80 mA Residual voltage 1 V or less 0.01 MPa Set pressure resolution 12 to 24 VDC, Ripple (p-p) 10% or less (with power supply polarity protection) Power supply voltage Brown DC (+) 55 mA or less (at

CEx-OMQ0013

NO YES NO YES YES NO NO NO YES P.10 9 YES YES NO 1? 14.5 ?

Exhaust Cleaner for Clean Rooms AMP Series

Description AMP320 AMP220 AMP420 AMP-EL220 AMP-EL320 AMP-EL420 Element assembly With O-ring 4 Note) The first and second elements are integrated, and cannot be replaced separately. 4 Exhaust Cleaner for Clean Rooms Series AMP Dimensions (mm) 1in = 25.4mm N Optional specifications O T: With element service indicator P R Q S SMC M D IN C Bracket (accessory) G L J I H K B A IN Bracket mounting

3 Position Cylinder Series RZQ

M K E Z a a L B + Full stroke M K A + Full stroke J E 4-O1 effective thread depth RB RA W 4-O1 T Section a-a Standard type (Through hole type)/RZQB 2-RR 50, 63 Flat washer (Included) 4-HR 2-RR Flat washer (Included) b 2-N 4-O 4-N b Section b-b (mm) Bore size (mm) A B C D E FA FB G H I J K L M N O1 O P Q RA RB RR RH T W Z 100.5 82.5 14 22.4 45 33 12.5 9 M8 x 1.25 60 4.5 17 18 34 5.5 M6 x 1.0

AC Servo Motor Driver (SSCNET Type)

From the View menu bar "parameter (A)" please click on the "parameter setting (P)". "Parameter Settings" screen will be displayed. Please click on Read". 6.3.3 Parameter setting method Please set the parameters for each actuator. Refer to "LECSS Operation Manual,chapter 5 for details of each parameter.

PSxx-OMT0001CN

-14No.PS-OMT0001CN-E 2 (ISA3) ISA3-F ISA3-G ISA3-H (5 m ) 0.010.03 mm 0.020.15 mm 0.050.30 mm () 1 060 2 10300 2 30500 2 () 1 1 100200 kPa OUT1 OUT2 5 () 3 -20220 kPa 0.005 mm 0.010 mm 0.020 mm (25 ) 0.010 mm 0.015 mm 0.030 mm 0 0 (3) (20) 0200 kPa -20220 kPa / 1 kPa OUT2 6 0.5F.S. 1 digit (25 ) 2F.S. 0 7 600 kPa 1.5 4 5 L/min 12 L/min 22 L/min DC24 V 10(p-p

VFR3000-OMJ0001

SOL.ASOL.B 1 AC 2 SOL.ASOL.B 1 DC24V 2 () () 1.1Nm ) SOL.ASOL.B 1 AC 2 SOL.ASOL.B 1 DC24V 2 9 VFR3000-OMJ0001-A VFR3000 VFR3000 VFR3000 VFR3000 Series Series Series Series 3 3 3 3 DIN DIN DIN DIN / / / / 01T 01T 01T 01T DIN (A B AB) COM 1.25-3.5M1.25Y-3L1.25-3M VFR3000 AB+ B+COM -COM 90 O 1) 0.9MPa 2) 3) MAX.50 4) 2 5) P 3 AB ARBF3000 P AB ARBF3050 A B P 1.0MPa 1)

reduces flow setting time

5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.

Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: NPT 1/8, Option 1: -, Option 2: -, Option 3: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: NPT 1/8, Option 1: -, Option 2: -, Option 3: -

Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: NPT 1/8, Option 1: -, Option 2: -, Option 3: -