SMC Corporation of America
Elite Part Number Search
Search Results "VV5FS3-31-101-03"
XGT312-50336-2F

Type: High Vacuum Slit Valve, Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: F (2 pcs D-A93 w/D-sub Connector)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XGT312-50336-2F
XGT313-50336-1

Type: High Vacuum Slit Valve, Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 3 (Cassette Type Half MESC), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XGT313-50336-1
XGT313-50336-1F

Type: High Vacuum Slit Valve, Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 3 (Cassette Type Half MESC), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: F (2 pcs D-A93 w/D-sub Connector)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XGT313-50336-1F
XGTP312-50336-2F

Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: F (2 pcs D-A93 w/D-sub Connector)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XGTP312-50336-2F
XGTP311-50336-2C

Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XGTP311-50336-2C
XGTP312-50336-2C

Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XGTP312-50336-2C
XGTP313-50336-1

Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 3 (Cassette Type Half MESC), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XGTP313-50336-1
XGTP313-50336-1C

Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 3 (Cassette Type Half MESC), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XGTP313-50336-1C
XGTP311-50336-1C

Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XGTP311-50336-1C
XGTP311-50336-1F

Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: F (2 pcs D-A93 w/D-sub Connector)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XGTP311-50336-1F
XGTP313-50336-1F

Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 3 (Cassette Type Half MESC), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: F (2 pcs D-A93 w/D-sub Connector)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XGTP313-50336-1F
XGTP312-50336-1FN

Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: F (2 pcs D-A93 w/D-sub Connector), End Lock: N (None)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XGTP312-50336-1FN
XGTP311-50336-1

Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XGTP311-50336-1
XGTP312-50336-1

Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XGTP312-50336-1
XGTP313-50336-1N

Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 3 (Cassette Type Half MESC), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: None, End Lock: N (None)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XGTP313-50336-1N
ITV3110-05N4N

Model: 31 (4400 l/min [ANR]), Pressure Range: 1 (0.005~0.1MPa), Power Voltage: 0 (24VDC), Input Signal: 0 (Current Style 4~20mADC), Monitor Output: 5 (Analog Output 4~20mA Source Type), Thread: N (NPT), Port Size: 4 [1/2 (3100)], Bracket: None, Cable Connector: N (w/o Cable Connector)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/ITV3110-05N4N
ITV3150-02N4CS4

Model: 31 (4400 l/min [ANR]), Pressure Range: 5 (0.005~0.9MPa), Power Voltage: 0 (24VDC), Input Signal: 0 (Current Style 4~20mADC), Monitor Output: 2 (Switch Output NPN), Thread: N (NPT), Port Size: 4 [1/2 (3100)], Bracket: C (L Bracket), Cable Connector: S (Straight Style 3m), Pressure Display Unit: 4 (PSI)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/ITV3150-02N4CS4
ITV3150-02N4N4

Model: 31 (4400 l/min [ANR]), Pressure Range: 5 (0.005~0.9MPa), Power Voltage: 0 (24VDC), Input Signal: 0 (Current Style 4~20mADC), Monitor Output: 2 (Switch Output NPN), Thread: N (NPT), Port Size: 4 [1/2 (3100)], Bracket: None, Cable Connector: N (w/o Cable Connector), Pressure Display Unit: 4 (PSI)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/ITV3150-02N4N4
ITV3150-05N4CL

Model: 31 (4400 l/min [ANR]), Pressure Range: 5 (0.005~0.9MPa), Power Voltage: 0 (24VDC), Input Signal: 0 (Current Style 4~20mADC), Monitor Output: 5 (Analog Output 4~20mA Source Type), Thread: N (NPT), Port Size: 4 [1/2 (3100)], Bracket: C (L Bracket), Cable Connector: L (Right Angle Style 3m)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/ITV3150-05N4CL
ITV3150-34N3BL4

Model: 31 (4400 l/min [ANR]), Pressure Range: 5 (0.005~0.9MPa), Power Voltage: 0 (24VDC), Input Signal: 3 (Voltage Style 0~10VDC), Monitor Output: 4 (Analog Output 4~20mA Sink Type), Thread: N (NPT), Port Size: 3 [3/8 (2100, 3100)], Bracket: B (Flat Bracket), Cable Connector: L (Right Angle Style 3m), Pressure Display Unit: 4 (PSI)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/ITV3150-34N3BL4