C92

1 !2 !3 No. !4 !5 !6 !7 !8 !

I

Fitting SUS304 Pressure detection portion Diaphragm: SUS630 Lead Wire Special flexible polyvinyl chloride 6 three-core (red, black, white) 3000m Port Size 1/8 1/4 M5x0.8 M5x0.8 Mass Approx 220g PSE520 P O R T S I Z E 01 Rc(PT) 1/ 8 and M5x0.8 02 Rc(PT) 1/ 4 and M5x0.8 T01 NPTF 1/8 and M5x0.8 T02 NPTF 1/4 and M5x0.8 Based on 250C (80F) T E C H N I C A L SPECIFICATIONS CONNECTION ACCESSORIES

MHx-OMZ0004

M3x7 0.59Nm 17 - 12 (No.1No.4)KQ2L04-M3G1 KQ2L04-M3G1 2(TCU0425B-1) 3(M44 ) TCU0425B-1 44 (No.1No.4)6 () 5(KQ2H04-06A1)1)4 6 () 4 6 KQ2H04-06A1 18 - () 19 - 5-3 1. 2. 3. 4. 1.() 2. 5m 3. 4. 5 5-4. 1.

Mechanically jointed rodless cylinder With cam follower guide, With single-axis linear guide With double-axis linear guide

Maintenance 3-1. Inspections 3-1-1. Daily Check 1) Smoothness of the operation 2) Changes in piston speed and cycle time 3) Smooth movement of the slide table for the entire stroke 3-1-2.

VNC/VNH Series

(See diagram at the top right of the page.) 4) Remove cable gland (4), washer (5) rubber seal (6). Wiring 1) Insert cable gland (4), washer (5) and rubber seal (6) into cable (7) in order, and insert it into housing (2). 2) Loosen screws (11) on terminal (3). Insert lead wires (10) and tighten screws (11) again. Note 1) The tightening torque should be 0.5 Nm +/15%.

Series VCS

Valve model Port size VCS21 VCS20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCS30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCS31 VCS30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCS40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCS30-12-04 VCS41 1/2 48 56 36 44 23 23 6 5.5 7 23 VCS40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCS Direct Operated

&snac

0 n e t o u c h f i t t i n s f o r P U r s e a i r e x h a u s t ( 0 P t i o n : P , P S ) F Y 2 0 s p a c e r I 7 E20t-01,02P i p i n s a d a p t 0 r7 i n o u t e r d l a m e t e r ( 2 0 0 ) ( 1 9 6 ) 0 p t i 0 n : P S ) ft r / 8 , 1 . / 4 N i p p l e 7 I / B : ( 7 7 ) t . / 4 : ( ' 1 3 N o t e : N 0 . 4 , N o . 7 , 6 : O n l Y 8 : O n l V t y p e t y p e M P r t s e I s p a r e a N O P

Coolant Valve

. 20 (14) 3 25 (16) 4 1 1 1 4 32 (22) 5 1 B 1 4 Flange 32F Nil: Non-locking push type 40A 1 1 2 Valve size 2 to 9 40 (28) 6 1 B 1 2 Flange 40F 2 50A 50 (33) 7 50F 2B Flange Semi-standard 2 B 1 2 Flange 65F 65 (45) 8 Electrical entry/With light/surge voltage suppressor 3B Valve size 1 Valve size 2 to 9 80F 80 (56) 9 Symbol Electrical entry Flange Values in parentheses are N.C. at 1 MPa.

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

1122Series MXP/MXPJ6 Air slide table 6, 10, 12, 16 How to Order Clean series 11 Vacuum suction type MXP 11 12 15 M9N MXP 22 12 15 M9N Copper, fluorine and silicon-free + low particle generation Number of auto switches Nil s n 2 pcs. 1 pc. n pcs. 22 Vacuum suction type Bore size Stroke mm Type of auto switch 6 10 12 16 5, 10 10, 20 15, 25 20, 30 Nil Without auto switch Refer to the table

Flow Sensor Series PFMV

hole) The dimensions show the PFMV5-1.

α PneuAlpha HARDWARE MANUAL

Protection IP 20 Certications CE, UL/cUL Certications TV (AL-10MT-D, AL-10MR-D) Description Specication UL 508 EN60730-1 EN61010-1 EN50081-1 EN50082-1 EN50082-2 10 3.

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No.

Low Profile Guide Type

Cylinder identification symbol Piping direction R L Centralized piping on right Centralized piping on left Bore size (mm) CY3B CY3R 10 15 25 10 15 25 Thread type Symbol Thread type M Rc NPT G Bore size (mm) 10, 15 CY1S Nil 25 TN TF CY1L CY1H CY1F CY1F CYP D-X Technical Data 1553 CY1F Series Construction #2 #3 #4 @0 #0 @4 @5 @6 q A @1 #7 #8 #9 !9 #1 $0 !6 #6 @9 r A $1 $2 $3 $4 t y w e !

VQ

rated voltage 1 2 3 4 5 6 9 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Other (1) : Option Note 1) Except for large flow capacity style.

10

R R: Gripping point distance [mm] 6 MHL2 Series Construction 10 16 to 25 e r t u w y @4 @0 @1 @2 !7 !5 !8 @3 !3 e o i q @6 @7 @3 @5 !9 !0 !2 !1 !6 !4 Component Parts No. Description Material Note 1 Body Aluminum alloy Hard anodized No.

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

6 cassette Solenoid on opposite A port Nil 1(P) port: Rc 1/8 3(R) port: Rc 1/8 Solenoid on same side as A port 2(A) port: Rc 1/8 S Valve stations Type S42 (Solenoid on same side as port A) 01 1 station 1(P) port: Rc 1/8 3(R) port: Rc 1/8 20 20 stations 2(A) port: Rc 1/8 4-13-7 8 Series VKF300 Dimensions: Manifold Body ported Common SUP, Common EXH/Top Ported Type 20 Manifold Grommet: G

0.01

8 4 Rc 1/4, G 1/4 NPT 1/4 Rc 1/4, G 1/4 NPT 1/4 Female thread Rc 1/4, G 1/4, NPT 1/4 Resin Case material Resin Aluminum Stainless steel Air (Nitrogen) Fluid 0.01 m (filtration efficiency: 99.99%) Note) Nominal filtration rating Initial pressure drop 0.03 MPa (at inlet pressure 0.7 MPa, maximum flow) Maximum operating pressure (at 20C) 1.0 MPa (in case of nitrogen: 0.99 MPa) 5 to 45C Operating

PSxx-OMS0006CN

(ZS-46-A1) 3X8L A B(ZS-46-A2) 3X8L B -14No.PS-OMS0006CN-G (a)(a) (b) (ZS-46-B) +(ZS-46-D) 90 -15No.PS-OMS0006CN-G (-M5) 1/6~1/4 1~1.5Nm (ZS-46-N) -01-N01 23 3~5 Nm -C4H-C6H-N7H-C4L-C6L-N7L 1/61/4 1~1.5Nm -16No.PS-OMS0006CN-G -17No.PS-OMS0006CN-G ,FG -18No.PS-OMS0006CN-G Z/ISE20(F)-N NPN 1 Max.28 V80 mA 1 V -P PNP 1 Max.80 mA 1 V -19No.PS-OMS0006CN-G [] 3 0.2 [] / OUT1 OUT1 [F10]30 (

Single Axis Electric Actuator Serriies LJ1S Slider Guide

-Y/Yaskawa Electric Corporation (for motor)2 MR-JCCBL5M (for encoder) LJ1-1-R05 6 160 5 6 DP9320081-2 (for motor) DP9320089-2 (for encoder) LJ1-1-Y053 DP9320083-2 (for motor/brake) DP9320089-2 (for encoder) LJ1-1-Y05B 149 LXF (AC servomotor by Mitsubishi Electric Corporation) Model Manufacturer part no.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

Valve model Port size VCW2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCW3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCW4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCW Dimensions (