Free Mount Cylinder

S T S T S T S T S T C(D)UK6C(D)UK10C(D)UK16C(D)UK20C(D)UK25C(D)UK32For the auto switch weight, refer to page 68 to 72.

Environment

Only Nil, S or T can be selected.

MG

0 r @4 e o t 16: 25 stroke MX 20, 25: 75 stroke or less !8 MTS !

Aluminum High Vacuum Angle Valve

G after is grommet, C for conduit, T for terminal, and D for DIN. Note 2) Refer to Construction for component parts numbers.

Series VQ Base Mounted Metal Seal/Rubber Seal

kit r AXT100-2-TB2 (4) Terminal block assembly (8 terminals) T kit t VZ Note 1) S kit is composed of a flat cable housing ass'y (AXT100-2-PS20) of q SI unit and w P kit (20 pin).

Rotary One-touch Fittings Series KS/KX

t e l a m e F ) T P ( c R 8 / 3 T P N 8 / 3 ) T P ( c R 3 1 M K h c u o t e n O g n i t t i f g n i t t i f h c u o t e n O 3 6 8 0 1 ) T P ( R , 6 8 / 1 ) T P ( R , 6 4 / 1 ) T P ( R , 6 8 / 3 ) T P ( R , 6 8 / 1 ) T P ( R , 6 4 / 1 3 ) T P ( R , 6 8 / ) T P ( R , 6 4 / 1 ) T P ( R , 6 8 / 3 ) T P ( R , 6 4 / 1 KM11 4 1 M K h c u o t e n O g n i t t i f g n i t

MGP

1 t !9 !2 !6e q u !4 w !7 !3 @0 !1 y !5 Component Parts Description Material Note Component Parts Description Material Note No. q w e r t y u i o !0 for piston rod for guide rod No. !1 !2 !3 !4 !5 !6 !7* !8* !

LX Series Compact Electric Actuators

q . r. lksi : Screw LXFH5BC 30 Ball t : : t l : . : : : : : t : i : : t : i ' . serie!: LXF: LXFH5BD 30 Screw LXFH5SA 30 Slide LXFH5SB 20 I LXP82BC 60 50 220 Linear ball bearing LXP82BD 60 50 90 Ball Screw 60 50 160 6 0 ' .

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators 3(R2) 1 (P) (R1)5 1 (P) (R1)5 3(R2) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) y 3 position closed center/exhaust center/pressure center 3 position closed center 2(B) (A)4 q t r w 3(R2) 1 (P) (R1)5 (B) 2 (A) 4 3 position exhaust center 2(B) (A)4 3(R2) 1 (P) (R1)5 3 position pressure center u 2(B) (A)4 3

REA/REB

8 t !4 !5 @2 @1 #2 #4 #5 #7 #6 #8 Component Parts No. Description Cylinder tube No.

Air Cylinder

Note 4) Trunnion nut is packaged for U, T, UZ. Mounting Brackets/Part No.

Rotary Actuator/Vane Style Series CRB2

Single vane type Double vane type , 0 5 Chamfer +4 0 a a r r n n 9 0 n n e g g 0 o o g e e i i n t t 1 2 a a 0 a 8 7 t t r o o 1 +4 0 0 0 n R R o e +4 0 +4 0 i t g 0 a n 9 t o a e r R g n n o a ti r a n t o o R ti a t o R Chamfer Chamfer Chamfer Chamfer A port B port A port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead of chamfer.

REA/REB

8 t !4 !5 @2 @1 #2 #4 #5 #7 #6 #8 Component Parts No. Description Cylinder tube No.

HRX-OM-W002

If Option T is selected, Option T1 cannot be selected.

Vacuum Pad

ZP3-T(10/13/16)UM;(J/K)3-@ ZP3-T(10/13/16)B;(J/K)3-@ ZP3-T(10/13/16)UM;(J/K)6-@ ZP3-T(10/13/16)B;(J/K)6-@ ZP3-T(10/13/16)UM;(J/K)10-@ ZP3-T(10/13/16)B;(J/K)10-@ ZP3-T(10/13/16)UM;(JB/K)15-@ ZP3-T(10/13/16)B;(JB/K)15-@ ZP3-T(10/13/16)UM;(JB/K)20-@ ZP3-T(10/13/16)B(JB/K)20-@ Buffer assembly part no. Note 3) Buffer assembly part no. Note 3) Pad unit part no.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

F Nil Rc G N T NPT NPTF Brackets are not installed.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Note 2) To insert the T-nuts, remove the covers at both ends of the body and insert them into the T-slots.

5 Port Solenoid Valve

Kit (Terminal block) L Kit (Lead wire) M Kit (Circular connector) q SV e SYJ t t SZ VF VP4 VQ 1/2 y VQ 4/5 Corresponding kit S(EX600, EX250, EX126), F, P, T @0 VQC 1/2 !

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Port size M5 x 0.8 t 10.5 15 18 20 t 10.5 15 18 20 Series Assembly part no.

A_HEC-OM-K001

During Auto tuning Auto tuning failure A T 1 E R R 1 9 P V < 2 3 . 0 C # 1 A T F a i l u r e A u t o T u n i n g M O D E S h u t O f f C a n c e l : A T k e y <4> External sensor sampling cycle setting: Mode indication External Sensor Sampling Cycle. Default value: 180 sec. Setting range 10 to 999 sec.