Table of Contents

0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !

Table of Contents

10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o o g g 1 O-ring seals separate vacuum and atmosphere. t Employs a magnetically coupled rodless cylinder with no air leakage from moving parts. n 1 r a L L e e e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and low particulate

V100

VK Nil F N T Rc G NPT NPTF Passage symbol Body size N.C. (Normally closed) A N.O.

LEC-OM07605CN

A 1 () () [] A 2 LECSS2-T Series/ / *3) 1 1.5 3)1 1 () A 3 1. 15P()N() (PE)( )(PE) (RCD)B 2. (L1L2L3) 3. () () A 4 4.

AC Servo Motor Driver (CC-Link Type)

Refer to LECSC2-T Operation Manual,chapter 6 for details. Recommended Parameter Values [LEF] LEFS25 LEFS32 LEFS40 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

ZP

W Dimensions: With Adapter ZP2-T W-B5 ZP2-T 20 W-B5 7 7 20 8 12 11 M5 x 0.8 M5 x 0.8 4 4 6 6 A (14) (14) 8 8 Y Y a A a C C b B 20 21 Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y Model ZP2-T3507W-B5 ZP2-T4010W-B5 ZP2-T5010W-B5 ZP2-T6010W-B5 ZP2-T4020W-B5 ZP2-T5020W-B5 ZP2-T6020W-B5 ZP2-T8020W-B5 2 x 1.5 0.5 0.5 10 11 2.5 0.8 ZP2

AC

Then, the charging time (T) for a 100l tank, V 10 T = t x = 110 x = 110(s). 10 10 T = t x = 49 x = 49(s). 10 10 V 10 T = t x = 12.4 x = 24(s). 100 10 V 10 1.13-2 VBA1110 to 4200 Size Selection Pulsation is decreased by using tank. If secondary capacity is undersized, pulsation may occur.

Fluoropolymer Piping Equipment

(The body of the fitting is PTFE machined.) 904 A LQ1 Series Tubing Extension Union Elbow Reducing How to Order Tubing connection Fitting type 1 R8 LQ1 E 2 T Size combination (Metric) B side A side LVC Piping type Symbol E Type Union elbow Class Model Tubing size (mm) Applicable tubing size (mm) Symbol R Type Reducing LVA LQ1E21-T-R8 LQ1E21-T-R9 LQ1E21-T-R10 LQ1E22-T-R8 LQ1E22-T-R9 LQ1E22

CC-Link-E

S. a EX. ) To set pressure at 0. 3M Pa by I TV2030( f or 0. 5M Pa t ype) ( 0. 3M Pa/0. 5M Pa) 40952457D EC999( H EX) A pressure of 0. 3M Pa i s set by sendi ng i nput dat a of 999 t o t he el ect ropneum at i c regul at or t hrough t he m ast er PLC. Com m uni cat i on dat a al l ocat i on For "1" t he num ber of t he st at i on.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

A A A A SS5Y5-45S1UStations D.

Vacuum

a a U4 o4 Urethane tube a a a U6 a6 Urethane tub a a a a List O Pad Dia. * Pad Type A5 M 5 x 0 8 a o A6 t\,t6 x 1 a o a o A8 N48 x 1 a o r!

LX

13 75.5 59 52 27 [18] Stroke + 127 15 (39) (52) N x P The dimension inside [ ] shows the location at which the home position switch operates. 58 28 U 36: T-slot pitch 20 5 N C (5.1) 4 5.5 10 5.8 36 10.5 1 0.2 6.5 6.5 1 3 39 28 3.3 T-slot A +0.030 0 depth 4 C +0.030 0 depth 4 L-M6 4H9 Body mounting reference plane Work piece mounting reference plane T-slot A dimension T-slot B dimension

Vacuum

a a U4 o4 Urethane tube a a a U6 a6 Urethane tub a a a a List O Pad Dia. * Pad Type A5 M 5 x 0 8 a o A6 t\,t6 x 1 a o a o A8 N48 x 1 a o r!

Electric Actuator/Slider Type

3 q u t y u o A !9 r e @0 !0 !2 !5 !6 !4 i A w A-A Component Parts No. Description Material Note No.

KJ

11.6 8.4 9.3 15.3 16.6 15.8 16.8 5.8 6.3 6.3 7.3 b T VMG Applicable tubing Applicable tubing a a Male Run Tee: KJY H (width across flats) Effective area (mm2) Nylon Urethane Connection thread T Applicable tubing O.D.

Profi-E

S. consi st s of 12 bi t s, t o t he E/P regul at or t hrough m ast er PLC( i nput t i ng t arget val ue t o 0 area) . a f orm ul a> Set pressure / F. S. pressure range x 4095 The val ue obt ai ned by t hi s f orm ul a i s convert ed t o a hexadeci m al num ber f or sendi ng.