17

R R L L L R Standard piping/Centralized piping (mm) L R WXX Y S d D R Applicable O-ring Model Operating direction Centralized piping MY1B25 MY1B32 MY1B40 15.5 16.2 5.5 6 11.4 1.1 C9 20 20.4 5.5 6 11.4 1.1 L R 23.5 25.9 6 8 13.4 1.1 C11.2 DO-ring R R R Centralized piping (mm) R R R L L L WX SS Model L -X MY1B25 MY1B32 MY1B40 R R 26.5 10 Centralized piping Piping tube 40 5.5 Note) Refer to

3 Port Solenoid Valve SYJ300/500/700 Series

R P R 10% rated voltage Allowable voltage 0.5 (With light : 0.55 ) Power consumption W Note) DC 0.9 ( With light : 1.0) 100V External pilot 110V [115V] 1.0 (With light : 1.10) [1.1 ( With light : 1.2) ] SYJ71 R 2 4 SYJ72 R 2 4 Apparent power VA AC 1.8 (With light : 1.9) 200V A X A X 1.9 (With light : 2.0) [2.2 (With light : 2.3) ] 220V [230V] P R P R Surge voltage suppressor Diode Indicator

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Note) If there are more than 4 stations, supply air from both P ports and exhaust from both R ports.

MG

0 r o @2 e !

39

Q R K L M N O P Q Part no.

VZ1000

location, P/R port with One-touch fitting for 6 VZ1000-3A-1D r VZ1000-3A-1U t SUP/EXH block assembly VZ1000-2A-1M y Note) Block pin (2 pcs.) is attached for q, e, t, y.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

Manual release N L Non-locking style Locking style Cylinder stroke (mm) (Refer to the standard stroke table on p.3.8-5.) Lock position H R W Applicable auto switches/Refer to p.5.3-2 for further information on auto switch.

CXWM/CXWL

9 Nickel plated Nickel plated Nickel plated Round type R snap ring Lock nut Plug Plug Magnet Set screw for seal Spring Type CR snap ring Replacement Parts: Seal Kit Round type R snap ring Shock absorber Nickel plated Model Kit no.

IDX-OM-W029

IDU55E-30 GFCI R R GFCI R GFCI TB TB PRR PRR PRR MC1 THS MC1 CM MC1 CM FM1 M FM2 MC2 FM2 MC2 P PRS FM1 P P IDU75E-30 M For Option R GFCI R GFCI TB CM FM1 () FM2 PRR MC1 MC1THR MC2 C11 CM PRS OLR MC2 PRS1 PRS2 ILS THR THS FM2 THS CM THP1 THP2 OLP1 1 OLP2 1 THP1 FM1 THP2 FM2 OLR PRR THR PRS2 P PRR P TB GFCI MOV M IDU Series 6-4 6 4 IDX-OM-W029 6 6-5 IDU55E,75E IDU55E,

1.1

P. 196 PWM control P. 197 R Refrigerant dryer P. 192 Refrigerator P. 192 Relay P. 198 Relief valve P. 195 RS232C P. 198 RS485 P. 198 RTD (Resistance Temperature Detector) P. 196 S Sealing mechanism P. 194 SEMI F47 P. 199 SEMI S2 P. 199 SEMI S8 P. 199 Signal input/output, I/O P. 199 Solenoid valve P. 195 Solid state relay (SSR) P. 198 Specific heat/Specific heat capacity P. 195 Specific resistance

Digital Flow Switch (Integrated display type) ( compatible)

Indicator light Output 1 and 2: Orange Power supply Used as switch output device 12 to 24 VDC, including ripple (p-p) 10% voltage Used as IO-Link device 18 to 30 VDC, including ripple (p-p) 10% Current consumption 50 mA max.

Digital Flow Switch (Integrated display type) ( compatible)

Indicator light Output 1 and 2: Orange Power supply Used as switch output device 12 to 24 VDC, including ripple (p-p) 10% voltage Used as IO-Link device 18 to 30 VDC, including ripple (p-p) 10% Current consumption 50 mA max.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Manual release N L Non-locking style Locking style Cylinder stroke (mm) (Refer to the standard stroke table on p.3.4-5.) Lock position H R W Applicable auto switches/Refer to p.5.3-2 for further information on auto switch.

MK

(mm) Operating direction Piston area (cm2) RHC 1.0 0.7 0.5 0.3 80 56 40 24 0.8 R 12 6 MTS 110 77 55 33 1.1 H 150 105 75 45 1.5 R 16 8 CC 200 140 100 60 2 H 200 139 100 60.8 2 R 20 12 298 208 149 90.2 3 H 370 258 185 112 3.7 R 25 12 490 341 245 149 4.9 H Order Made 600 418 300 182 6 R Made to Order 32 16 800 557 400 243 8 H 1050 731 525 319 10.5 R Refer to the p.5.4-1 regarding made to order

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

4/2.5 x R 4/2.5 x M5 For soft nylon and polyurethane tubing M-01AU-4 M-5HL-4 For nylon, soft nylon and polyurethane tubing Body rotates at 360 around the stud axis For reducing R 1/8 female to M5. 1 8 KKA 1 8 R R x M5 female M-5B 1 8 6/4 x R 6/4 x M5 M-01AU-6 P.196 M-5HL-6 P.198 KP 1 8 P.199 Plug Hose nipple Use to plug unused M5 port.

Electro-Pneumatic Proportional Valve Series VEF/VEP

(Refer to the flow characteristics.) 1 (P) 2 (A) 3 (R) Current A Current A Choked flow Q: Air flow rate [L/mi (ANR)] P: Valve-inlet pressure [MPa] S : Effective area [mm2] t : Temperature [C] 293 273 + t Q = 120 x S (P + 0.1) F1 solenoid F2 spring Flow Characteristics: 2 Port Controlled opening 1 (P) 2 (A) 3 (R) Spool Effective area (mm2) 1 (P) 2 (A) 3 (R) Sleeve Current A Current A Choked

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

S2 F 2 R A1 R Photo micro switch Series Without switch/mounting rail Nil 6 8 1 2 3 4 5 6 NPN 1pc.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Q1 = M L2 = L2 + (3 x P) 3. L1 + (3 x P) L2 + (3 x P) 4. L2 = Q2 = M L1 = 5. Q2 = M 6.

MY1

(Except 32, 40) Side port Side port Back port Back port L L L Front port Front port L L L L L R R R R R R O-ring R R L L R R Bottom port Bottom port DL L Piping tube -X L R Technical Data Slide table operating direction For bottom piping, refer to the figure above. 1365

MLGC

B76 B73 I.C. 5V P P P P P P P P P P P P P P P P P 3 wire (Equiv.