JXCx-OMT0023

DI2 DI1 DI0 0 0 1 1 0 1 0 2 0 1 1 3 1 0 0 4 1 0 1 5 1 1 0 6 1 1 1 7 (b) Incremental value command system 1) Point table Set the point table values by using set up software(MR Configurator2TM) or the operation section. Set the position data (target position), servo motor speed, acceleration time constant, deceleration time constant, dwell and auxiliary function in the point table.

SZ3000

3-22 23 Cassette Type Manifold Plug-in Type Series SZ3000 Dimensions: SZ3000 Plug-in 1 2 SS5Z3-60PD Stations B(26 pins) 2n1-M5 x 0.8 [4(A), 2(B) port] With external pilot 4One-touch fitting [1(P), 3(R) port] Applicable tubing O.D.: 8 13.3 (Pitch) P = 10.5 13.3 24 24 16.2 16.2 17 36.7 SV 34 34 B 2 B 2 B 2 PE B 2 B 2 B 2 B 2 B 2 B 2 B 2 R 3 R 3 R 3 R 3 SZ P 1 P 1 P 1 P 1 A 4 A 4 A 4 X A 4 A

SFOD-OMT0009CN

10.5 [5m ] L E C P *B* (a) (b) 2 A B-1 L 1 A A-1 (b) 6 A B-1 B B-2 1 1.5m 5 A A-1 B A-2 3 3 3m B B-2 COM-A/COM B-3 4 B A-2 COM-B/A-3 5 5m (c) COM-A/COM B-3 Shield COM-B/ A-3 Vcc B-4 12 GND A-4 13 Vcc B-4 A B-5 7 GND A-4 A A-5 6 A B-5 B B-6 9 A A-5 S B A-6 8 (d) B B-6 3 B A-6 (a) + B-1 4 A-1 5 + B-3 1 2 A-3 (a) (8) (14.2) B1 A1 (b) 2 1 (17.7) (14) (18) (10.2) 6

Table of Contents

Auto Switch Mounted from Direction B 1.

Electric Actuator/Slider Type

1 !5 A-A t y @2 C B e @1 !0 C B r w C-C B-B !4 !2 Body Table !3 Component Parts No. Description Material Note No.

SFOD-OMT0010

7 A B-5 Nil Robotic type cable Black 6 A A-5 Orange 9 S Standard cable B B-6 Black 8 B A-6 3 Actuator side Controller side (14.2) (b) 2 1 (8) (a) (14) B A1 (17.7) 6 5 1 (c) 2 1 (18) A6 B6 15 16 L (11) (30.7) 10.4 Actuator cable (8-20m) (a) (b) L E C P Signal name Terminal Cable colour Terminal number number Brown 2 A B-1 Red 1 A A-1 Cable length [L] Orange 6 B B-2 8 8mNote) Yellow 5 B A-2

LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil W G 1 N.C. (B contact) 2 pcs.

Air Slide Table

A C B B stroke operation 1) Initial state (0 stroke position) B stroke A stroke 2) Operation When the air pressure is supplied from the C port, the rod operates the B stroke.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

_ _ 1 A 346 _ _ 0 B 818 _ _ 1 B 333 _ _ 0 C 750 _ _ 1 C 321 _ _ 0 D 692 _ _ 1 D 310 _ _ 0 E 642 _ _ 1 E 300 _ _ 0 F 600 _ _ 1 F 290 7 8 7.

Table of Contents

B port D B C G1 U G2 U If B port of Body (B) is machined, the port is plugged with Rc 1/8.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

ti n ti a g g n o a r ti a t e a e o n t t o g o r 1 1 Key e r r y 0 9 y y e 2 0 + 4 0 0 e e K 8 + 4 0 K K 0 + 4 0 + 4 0 0 0 Key Key 1 (40) e Key g n a r n o ti a t o r y e K (85) (40) (40) A port B port A port B port A port B port A port B port Direct Mounting of Body L 4 screws Model CRB1BW50 CRB1BW63 CRB1BW80 CRB1BW100 L Screw M6 48 M8 52 M8 60 M10 80 11-4-4 70 Series CRB1 Rotary

5 Port Air Operated Valve Series SYA3000/5000/7000 1

(A) 4 (A) 4 (B) 2 (B) 2 (Example) SS5YJA7-41-03-01 1 pc. SYJA7140 1 pc. SYJA7240 1 pc. SYJ7000-21-1A 1 pc. 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 position exhaust center 3 position closed center (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) The asterisk denotes the symbol for assembly.

Electric Actuator with Integrated Guide

pc., (B contact) 2 pcs., Proximity switch rail 1 pc.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

B port D B C G1 U G2 U If B port of Body (B) is machined, the port is plugged with Rc 1/8.

Plug-in Unit

2 1(P) port 4-G 1/2 Conduit port VQC SMC SMC SMC SMC SMC SMC SMC SQ 95.5 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 77.5 90 72 VQ0 13 55.5 42.7 43.5 20.5 VQ4 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 33.5 11.5 15.7 12 2-Rc 1/8 (Pilot exhaust port) VQ5 (6.5) 21.5 2-Rc 1/8 (External pilot port) 27 2n-Rc 1/4, 3/8, C8, C10, C12 <4(A), 2(B) port> Rc 1/4: 1/4" Female thread Rc 3/8: 3/8" Female thread C8 : 8 One-touch

VQC

SUP block plate VVQ1000-16A EXH shutoff position When using EXH block base (VVQC1000-19A--C ) Note 1) Port plug Note 2) A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B With 3.2 (1/8") One-touch fitting C3 (N1) Side port Fill out in case of mixed sizes (CM/LM/NM).

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Description Bore size Stroke range 12, 16 1 to 29 Stroke range 20, 25 1 to 49 32 to 63 1 to 99 Part no.: CQ2KB50-57D CQ2KB50-75D with 18 mm width spacer inside. B dimension is 115.5 mm.

VQ5000

0 1 0 1 VQ510 A side + A side VQ520 B side + B side A side + A side 0 1 3 4 5 VQ5 0 B side + B side A side + A side .

High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

MY1

Applicable cylinder MY1B25 MY1B32 MY1B40 Model MY-J Bore size SMY1B Bore size , #3 (#1 + #3 + #6) B 28 40 44 B 78 88 108 F 96 111 131 C 14 20 22 C 39 44 54 E 1 1 1 E 1 1 1 MY-J25 MY-J32 MY-J40 Note) One set of floating brackets consists of one right piece and one left piece.