XM, XY

flange) (mm) Model A 75.8 102.5 119 B 48 66 79 C 1 2 2 D 23.5 38 53 E 40 55 75 Fn 26 41 52 G 40.5 57 70 H 21.5 30 35 J XYH-25 XYH-40 XYH-50 100.2 130 178 494 XMH, XYH Series Glossary 2 Shaft Sealing Method 1 Seal Materials Bellows Bellows offer cleaner sealing with reduced particle generation and less outgassing.

ZP

Form w 1 Material e Vacuum inlet r Mounting Bracket Assembly Flat, Ball Joint Type Thin Flat Type with Ribs Deep Type Connection M5 x 0.8 thread B 10 B5 41 25 2.5 M5 x 0.8 5 16 42 26 25 48 30 3.5 10 N S U F GN GS N4 N6 U4 U6 41 25 2.5 M6 x 1 6 16 42 26 25 48 30 3.5 40 57 39 6 25 B8 48 30 3.5 M8 x 1.25 8 40 57 39 6 ZP Y D C2 B6 Construction p. 117 Adapter Assembly p. 123 Dimensions Per Vacuum

CJ5-S

A A1 L1 NX MM NDH10 R1 U1 A A1 L L1 NX MM NDH10 NZ R1 U1 + 0.4 + 0.2 0.2 0.4 8 + 0.058 0 + 0.058 0 + 0.058 0 + 0.070 0 + 0.070 0 + 0.084 0 + 0.058 0 + 0.058 0 20 I-G02SUS Y-G02SUS 20 16 8 8 8 34 8.5 25 M8 x 1.25 10.3 11.5 34 8.5 16 21 25 M8 x 1.25 16 10.3 11.5 IY-G02SUS + 0.4 + 0.2 0.2 0.4 0.3 0.5 0.3 0.5 0.3 0.5 0.3 0.5 I-G03SUS Y-G03SUS 25, 32 25, 32 20 10 10 10 10 41 10.5 30 M10 x 1.25

7.4

(Stations 7 to 8) SS0752-08C S0712-5G-C4 S0722-5G-C4 S0732-5G-C4 S07A2-5G-C4 Body Ported Manifold Bar Base Voltage Symbol Type 5 24 VDC 6 12 VDC Note) The valve cannot be used as a standalone unit. Prefix the asterisk to the part numbers of the solenoid valve etc. Write sequentially from the 1st station on the D side.

SS5Y Bar stock manifold, SY, 4/5 PORT SOLENOID VALVE, 0.00000 lb

Manifold Type: 42 (Base Mounted), Valve Stations: 9 Stations, A, B Port: C6F (ø6 One-touch Fitting G), CE Marked: Q (CE Marked)

Manifold Type: 42 (Base Mounted), Valve Stations: 9 Stations, A, B Port: N3 (5/32" One-touch Fitting), CE Marked: Q (CE Marked)

Manifold Type: 20 (Body Ported), Valve Stations: 9 Stations, A, B Port: 00F (G), CE Marked: Q (CE Marked)

Manifold Type: Base Mounted, Valve Stations: 9 Stations, A, B Port: ø6 One-touch Fitting G, CE Marked: CE Marked

Manifold Type: Base Mounted, Valve Stations: 9 Stations, A, B Port: 5/32" One-touch Fitting, CE Marked: CE Marked

Manifold Type: Body Ported, Valve Stations: 9 Stations, A, B Port: NPTF, CE Marked: CE Marked

Manifold Type: Body Ported, Valve Stations: 9 Stations, A, B Port: G, CE Marked: CE Marked

Manifold Type: 20 (Body Ported), Valve Stations: 9 Stations, A, B Port: 00T (NPTF), CE Marked: Q (CE Marked)

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

VQ4 Note) Based on JIS B 8375-1981 (Supply pressure: 0.5 MPa) VQ5 Dimensions VQZ Single unit Manifold VQD 2n-C4, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 2-C4, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M3 mounting hole ~ =4.5 ~ =4.5 M2.5 mounting hole Residual pressure release manual override Residual pressure release manual override DIN rail clamp screw

PFxx-OMA1007

(Refer to page 40, 41) Standby OFF delay 0 to 9s 0s Common Sensor Sets enabling/disabling of automatic isolation. (Refer to page 40, 41) Auto isolation Enable/Disable Disable Common Isolation delay Sets isolation delay. (Refer to page 40, 41) 0 to 9s 3600s Common Sets whether it is necessary to input the security code or not.

Rotary Actuator Ｃ ( Ｄ ) ＲＡ１＊＊＊３０～１００－＊＊Ｚ

Loosen the hexagon nut 41 of right cover 34 to remove the seal washer 40 and hexagon nut with the hexagon socket set screw 37 from the angle adjustment collar 39 . 17 15 10 3 14 11 5 12 19 9 14 12 1 4 11 6 34 35 37 40 41 15 39 45 - Assembly procedure 1. Apply the grease provided in the seal kit to parts shown in Table (20). Table (20) Parts where grease is to be applied 2.

SFOD-OMT0005CN

(P.41) (CN1: EMG OFF 3.(P.12) ) INP ON (INP 9.1 (P.32) PLC ) 5 3.(P.12) PLC (PLC) 2 11.4 (P.49) () 10.(P.41) 3.(P.12) -81- 5(P.23) 9.1 (P.32) 3.(P.12) PLC (PLC) 2 11.4 (P.49) () () 3.2 (P.13) USB 10.(P.41) 5 10.(P.41) 10.(P.41) 3.(P.12) ( EMG ) 3.

Cylinder with Turntable Series MGT

Mass (g) D-M9N(V) D-M9P(V) D-M9B(V) Auto switch model Precautions Caution 0.5 8 8 7 1 14 14 13 Lead wire length (m) 3 41 41 38 Do not fix the auto switch with the existing screw installed on the auto switch body.

C95

6 5.4-41 -XC10 Dual stroke cylinder/Double rod !7 Made to order common specifications 5.4-46 -XC11 Dual stroke cylinder/Single rod !8 5.4-52 -XC12 Tandem cylinder !

CLK1

36 Ws Width across flats K Width across flats 44 0.050 0.093 +0.027 0 +0.3 0 +0.4 0 F Shaft: 12d9 Clevis width CLK1A: 16.5 R15 Hole: 12H8 CLK1B: 19.5 S + Stroke 27 1.5 40 Z + Stroke 97 2 57 T ZZ + Stroke (mm) Symbol BX BY D F GA GB L M N S T W Wc Ws Z ZZ IA K Bore size 40 56 54 16 44 77 10 55 M12 x 1.5 86 112.5 57 5 39 27.5 114 228 47 14 50 64 64 20 55 78.5 10 58 M16 x 1.5 87.5 117 60 7 41